Wafer-scale silicon photonic switches beyond die size limit
Open accessAbstract
Fast optical switches have been proposed as a promising alternative to enable continual scaling of data centers with increasing size and data rates. Silicon photonics is a compelling platform for large-scale integrated photonic switches, leveraging advanced manufacturing foundries for electronic integrated circuits. In the past decade, the port counts of silicon photonic switches have increased steadily to 128×128. Further scaling of the switch is constrained by the maximum reticle size (2–3 cm) of lithography tools. Here, we propose to use wafer-scale integration to overcome the die size limit. As a proof of concept demonstration, we fabricated a 240×240 switch by lithographically stitching a 3×3 array of identical 80×80 switch blocks across reticle boundaries. Stitching loss is substantially reduced (0.004 dB) by tapering the waveguide width to 10 μm. The fabricated switch on a 4 cm×4 cm chip exhibits a maximum on-chip loss of 9.8 dB, an ON/OFF ratio of 70 dB, and switching times of less than 400 ns. To our knowledge, this is the largest integrated photonic switch ever reported. The loss-to-port count ratio (0.04 dB/port) is also the lowest.
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A 240 × 240 silicon photonic switch matrix with 57,600 individual switching elements has been demonstrated experimentally by combining MEMS with silicon photonic waveguides.
“one of the largest-scale PICs today, a 240 × 240 silicon photonic switch matrix with 57,600 individual switching elements, has been demonstrated experimentally by combining MEMS with silicon photonic waveguides40.”
From Integrated silicon photonic MEMS (2023) · cites this paper as [40]
The recently demonstrated large-scale silicon photonic MEMS switch matrix and large-scale silicon photonic MEMS LiDAR show the potential of the combination of silicon photonics and MEMS.
“The recently demonstrated large-scale silicon photonic MEMS switch matrix40 and large-scale silicon photonic MEMS LiDAR41 clearly show the potential of the combination of silicon photonics and MEMS.”
From Integrated silicon photonic MEMS (2023) · cites this paper as [40]
Even VLSI (>10,000 components) prototypes have now been demonstrated.
“Even VLSI (>10,000 components) prototypes have now been demonstrated30,32,34.”
From Roadmapping the next generation of silicon photonics (2024) · cites this paper as [34]
Technologies such as MEMS/NOEMS look promising for switching.
“but technologies such as MEMS/NOEMS look promising34.”
From Roadmapping the next generation of silicon photonics (2024) · cites this paper as [34]
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Locking Multi-Laser Frequencies to a Precision Wavelength Meter: Application to Cold Atoms
Kim, J., Kim, K., Lee, D., Shin, Y., Kang, S., Kim, J.-R., Choi, Y., An, K., & Lee, M. (2021) · Sensors · doi:10.3390/s21186255 · Cited by 15 · see citing works
Disaggregated optical-layer switching for optically composable disaggregated computing [Invited]
Ishii, K., Matsumoto, R., Inoue, T., & Namiki, S. (2022) · Journal of Optical Communications and Networking · doi:10.1364/jocn.471132 · Cited by 14 · see citing works
Ma, H., Yang, J., Huang, J., Zhang, Z., & Zhang, K. (2021) · Results in Physics · doi:10.1016/j.rinp.2021.104384 · Cited by 13 · see citing works
Ultra-Compact and Efficient Microheaters on a Submicron-Thick InP Membrane
Wang, Y., Dolores-Calzadilla, V., Williams, K. A., Smit, M. K., & Jiao, Y. (2022) · Journal of Lightwave Technology · doi:10.1109/jlt.2022.3225110 · Cited by 13 · see citing works
Efficient Intra-Rack Resource Disaggregation for HPC Using Co-Packaged DWDM Photonics
Michelogiannakis, G., Arafa, Y., Cook, B., Dai, L. Y., Hameed Badawy, A.-H., Glick, M., Wang, Y., Bergman, K., & Shalf, J. (2023) · 2023 IEEE International Conference on Cluster Computing (CLUSTER) · doi:10.1109/cluster52292.2023.00021 · Cited by 13 · see citing works
Kim, H.-K., Kim, M., Kim, M.-H., Jo, Y., Lischke, S., Mai, C., Zimmermann, L., & Choi, W. (2021) · Optics Express · doi:10.1364/oe.418222 · Cited by 13 · see citing works
Li, W., Xu, L., Wei, Z., Zhang, J., Deng, M., D’Mello, Y., & Plant, D. V. (2023) · Optics Letters · doi:10.1364/ol.497510 · Cited by 12 · see citing works
Demultiplexing‐free ultra‐compact WDM‐compatible multimode optical switch assisted by mode exchanger
Liu, S., Fu, X., Niu, J., Huo, Y., Cheng, C., & Yang, L. (2024) · Nanophotonics · doi:10.1515/nanoph-2024-0201 · Cited by 12 · see citing works
Integrated photonic MEMS switch for visible light
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Ruan, Z., Wan, Y., Wang, L., Zhou, W., & Wang, J. (2024) · Light Advanced Manufacturing · doi:10.37188/lam.2024.023 · Cited by 11 · see citing works
Multi-Granular Switching Node and Enabling Devices
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Tightly‐Confined and Long Z‐Cut Lithium Niobate Waveguide with Ultralow‐Loss
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Self-controlling photonic-on-chip networks with deep reinforcement learning
Do, N., Truong, D., Nguyen, D. H. N., Hoai, M., & Pham, C. (2021) · Scientific Reports · doi:10.1038/s41598-021-02583-7 · Cited by 11 · see citing works
Optical Phased Array Super-Cell Beyond the Reticle Limit
Guglielmon, J., Byrd, M. J., Moss, B. R., Tran, J., Millman, R. P., Watts, M. R., & Poulton, C. V. (2023) · doi:10.1364/cleo_si.2023.sth5c.5 · Cited by 11 · see citing works
Toward scalable fault-tolerant photonic quantum computers
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Matsumoto, R., Konoike, R., Matsuura, H., Suzuki, K., Inoue, T., Ikeda, K., Namiki, S., & Sato, K.-I. (2023) · Journal of Lightwave Technology · doi:10.1109/jlt.2023.3304622 · Cited by 10 · see citing works
Ultra-Compact On-Chip Silicon Photonic Polarization- and Wavelength-Selective Switch
Liu, S., Huo, Y., Cheng, C., Niu, J., Fu, X., & Yang, L. (2024) · Journal of Lightwave Technology · doi:10.1109/jlt.2024.3435955 · Cited by 10 · see citing works
High-capacity strictly non-blocking optical switches based on new dual principle
Barabanova, E. A., Vytovtov, K. A., Vishnevsky, V. M., & Подлазов, В. С. (2021) · Journal of Physics Conference Series · doi:10.1088/1742-6596/2091/1/012040 · Cited by 10 · see citing works
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A hybrid solution for spatial light modulators with a large space-bandwidth product: opinion
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Nonlinear Optical Responsive Molecular Switches
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Scalable Photonic Crystal Waveguides With 2 dB Component Loss
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The control system elements of the new generation optical switching cell
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A 20x20 Focal Plane Switch Array for Optical Beam Steering
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The Emerging Nano‐Opto‐Electromechanical Systems Based on van der Waals Heterostructures
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Low-loss and broadband wafer-scale optical interposers for large-scale heterogeneous integration
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Tunable MEMS-based metamaterial nanograting coupler for C-band optical communication application
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A Monolithically Integrated Silicon Photonics 8×8 Switch in 90nm SOI CMOS
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Investigating the reliability of all-optical switches in transient mode
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Large-Scale High-Speed Photonic Switches Fabricated on Silicon-Based Photonic Platforms
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Large-Scale High-Speed Photonic Switches Fabricated on Silicon-Based Photonic Platforms
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- Authors
- Seok, T. J., Kwon, K., Henriksson, J., Luo, J., & Wu, M. C.
- Affiliations
- Gwangju Institute of Science and Technology (KR)
- University of California, Berkeley (US)
- Venue
- Optica
- Publisher
- Optica Publishing Group
- Published
- 2019-04-12
- Volume
- 6
- Issue
- 4
- Pages
- 490
- ISSN
- 2334-2536 (ISSN-L)
- OpenAlex
- W2937088522
- Cited by
- 214
- References
- 22
- Citations by year
- 2026: 19 · 2025: 38 · 2024: 31 · 2023: 25 · 2022: 33 · 2021: 32 · 2020: 22 · 2019: 12 · 2018: 2
- FWCI
- 8.90
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Optica (publishedVersion)
- OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) (submittedVersion)
- Funders
- Advanced Research Projects Agency—Energy (DE-AR0000849)
- National Science Foundation (1827633, EEC-0812072)
- UC Berkeley
- National Research Foundation of Korea (2018R1C1B6005302)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced Optical Network Technologies
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Semiconductor Lasers and Optical Devices
- Keywords
- silicon photonic switches, wafer-scale integration, waveguide tapering, on-chip loss, switching time, data center optical interconnects
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