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Nanometallic antenna-assisted amorphous silicon waveguide integrated bolometer for mid-infrared
Open accessAbstract
Bolometers are thermal detectors widely applied in the mid-infrared (MIR) wavelength range. In an integrated sensing system on chip, a broadband scalable bolometer absorbing the light over the whole MIR wavelength range could play an important role. In this work, we have developed a waveguide-based bolometer operating in the wavelength range of 3.72–3.88 µm on the amorphous silicon (a-Si) platform. Significant improvements in the bolometer design result in a 20 × improved responsivity compared to earlier work on silicon-on-insulator (SOI). The bolometer offers 24.62% change in resistance per milliwatt of input power at 3.8 µm wavelength. The thermal conductance of the bolometer is 3.86 × 1 0 − 5 W / K , and an improvement as large as 3 orders magnitude may be possible in the future through redesign of the device geometry.
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The device's responsivity exceeds previous state-of-the-art values for waveguide-integrated thermal-type PDs beyond 3 μm, reaching record-high photoresponsivity for waveguide-integrated PDs using the bolometric effect beyond 3 μm.
“reaches record-high photoresponsivity for waveguide-integrated PDs using bolometric effect beyond 3 μm.”
From Room-temperature waveguide-integrated photodetector using bolometric effect for mid-infrared spectroscopy applications (2025) · cites this paper as [27]
The device achieves a notable improvement in NEP, over 25 times greater than previously reported waveguide-integrated PDs using the bolometric effect.
“our device achieves a notable improvement in NEP, over 25 times greater than previously reported waveguide-integrated PDs using the bolometric effect26,27”
From Room-temperature waveguide-integrated photodetector using bolometric effect for mid-infrared spectroscopy applications (2025) · cites this paper as [27]
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Cites
Mid-Infrared Nanometallic Antenna Assisted Silicon Waveguide Based Bolometers
Wu, Y., Qu, Z., Osman, A., Cao, W., Khokhar, A. Z., Soler Penades, J., Muskens, O. L., Mashanovich, G. Z., & Nedeljkovic, M. (2019) · ACS Photonics · doi:10.1021/acsphotonics.9b01198 · Cited by 46
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Cited by
Sorted by citations
Shim, J., Lim, J., Kim, I., Jeong, J., Kim, B. H., Kim, S. K., Geum, D.-M., & Kim, S. (2025) · Light: Science & Applications · doi:10.1038/s41377-025-01803-3 · Cited by 31
“Moreover, our device achieves a notable improvement in NEP, over 25 times greater than previously reported waveguide-integrated PDs using the bolometric effect 26,27 , without relying on noble metals or exotic materials, thus preserving full CMOS compatibility.”
InfluentialKim, I., Lim, J., Shim, J., Park, J., Ahn, S.-Y., Lim, H., & Kim, S. (2024) · ACS Sensors · doi:10.1021/acssensors.4c00941 · Cited by 23
Metadata
- Authors
- Wu, Y., Qu, Z., Osman, A., Wei, C., Cao, W., Tarazona, A., Oo, S. Z., Chong, H. M. H., Muskens, O. L., Mashanovich, G. Z., & Nedeljkovic, M.
- Affiliations
- University of Southampton (GB)
- Japan Advanced Institute of Science and Technology (JP)
- University of Belgrade (RS)
- ORCID
- Venue
- Optics Letters
- Publisher
- Optica Publishing Group
- Published
- 2021-02-01
- Volume
- 46
- Issue
- 3
- Pages
- 677
- ISSN
- 0146-9592 (ISSN-L)
- 1539-4794
- OpenAlex
- W3115746103
- Cited by
- 29
- References
- 1
- Citations by year
- 2025: 5 · 2024: 7 · 2023: 8 · 2022: 6 · 2021: 3
- FWCI
- 1.46
- Type
- journal article
- Language
- en
- Open access
- hybrid
- doi.org
- Licence
- Locations
- Optics Letters (publishedVersion, cc-by)
- PubMed (publishedVersion)
- ePrints Soton (University of Southampton) (submittedVersion)
- Funders
- Engineering and Physical Sciences Research Council (EP/L01162X/1, EP/L021129/1, EP/N00762X/1)
- Royal Academy of Engineering (RF201617/16/33)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Superconducting and THz Device Technology
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Plasmonic and Surface Plasmon Research
- Keywords
- amorphous silicon, mid-infrared detection, thermal detectors, responsivity, thermal conductance
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