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Mid-Infrared Nanometallic Antenna Assisted Silicon Waveguide Based Bolometers
Open accessAbstract
The mid-infrared (MIR) wavelength region is attracting more and more research for applications such as medical diagnostics, environmental monitoring, and free space communications. In the MIR, thermal detectors play an important role because they can operate over a large wavelength range, can be fabricated using CMOS compatible processes, and do not require cooling. Today, no other MIR detector technology is able to fill this gap. We demonstrate the first uncooled silicon waveguide-based bolometers, in the Silicon-on-Insulator (SOI) and suspended silicon waveguide platforms. The bolometers comprise gold plasmonic antennas on the waveguide surface that heat up when they absorb light, and amorphous silicon thermometers (formed by ion implantation), whose electrical resistance changes by 0.90 ± 0.26% K –1 when they are heated. We show that suspending the bolometers improves their performance, and achieve sensitivities of up to 1.13 ± 0.04% change in resistance per milliwatt of input power, with a noise equivalent power of 66 μW/ . Calculations suggest the NEP could, in future, be further reduced by 4 orders of magnitude.
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The device achieves a notable improvement in NEP, over 25 times greater than previously reported waveguide-integrated PDs using the bolometric effect.
“our device achieves a notable improvement in NEP, over 25 times greater than previously reported waveguide-integrated PDs using the bolometric effect26,27”
From Room-temperature waveguide-integrated photodetector using bolometric effect for mid-infrared spectroscopy applications (2025) · cites this paper as [26]
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“Moreover, our device achieves a notable improvement in NEP, over 25 times greater than previously reported waveguide-integrated PDs using the bolometric effect 26,27 , without relying on noble metals or exotic materials, thus preserving full CMOS compatibility.”
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Metadata
- Authors
- Wu, Y., Qu, Z., Osman, A., Cao, W., Khokhar, A. Z., Soler Penades, J., Muskens, O. L., Mashanovich, G. Z., & Nedeljkovic, M.
- Affiliations
- University of Southampton (GB)
- University of Belgrade (RS)
- Venue
- ACS Photonics
- Publisher
- American Chemical Society (ACS)
- Published
- 2019-11-21
- Volume
- 6
- Issue
- 12
- Pages
- 3253-3260
- ISSN
- 2330-4022 (ISSN-L)
- OpenAlex
- W2990147893
- Cited by
- 46
- References
- 31
- Citations by year
- 2026: 5 · 2025: 6 · 2024: 9 · 2023: 7 · 2022: 7 · 2021: 8 · 2020: 4
- FWCI
- 1.71
- Type
- journal article
- Language
- en
- Open access
- green
- doi.org
- Licence
- Locations
- ACS Photonics (publishedVersion)
- ePrints Soton (University of Southampton) (submittedVersion)
- Funders
- Engineering and Physical Sciences Research Council (EP/L01162X/1, EP/N00762X/1, EP/L021129/1)
- Royal Academy of Engineering (RF201617/16/33)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Plasmonic and Surface Plasmon Research
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Superconducting and THz Device Technology
- Keywords
- ion implantation, silicon-on-insulator, suspended silicon waveguides, noise equivalent power
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