Investigation on nano-absorbing precursors in the picosecond regime via the comparative study of HfO 2 /SiO 2 and Ta 2 O 5 /SiO 2 high-reflectivity coating damage
Open accessAbstract
Laser-induced damage to the final reflective and diffractive optics limits the total output energy of petawatt laser systems with pulse durations ranging from a few hundred femtoseconds (fs) up to a few tens of picoseconds (ps). In this study, the laser damage to HfO 2 /SiO 2 and Ta 2 O 5 /SiO 2 multilayer dielectric high-reflectivity (HR) coatings induced by a 1053 nm laser with a pulse width of 8.6 ps was studied to investigate the nano-absorbing precursors in ps regimes. The HfO 2 /SiO 2 HR coating exhibited stronger laser resistance than the Ta 2 O 5 /SiO 2 HR coating. Flat-bottom pits, pinpoints, and funnel pits were the three typical damage morphologies for the experimental HR coatings. The damage to the HfO 2 /SiO 2 HR coating was primarily dominated by flat-bottom pits, whereas dense pinpoints were the most significant damage for the Ta 2 O 5 /SiO 2 HR coating. The nano-absorbing precursors introduced by the ion-assisted deposition process were proved to be the damage precursors that trigger pinpoints under a strong electric field intensity (EFI). The nano-absorbing precursors located in the second EFI peak of the SiO 2 top layer induced the funnel pits. The funnel pits were expected to be the previous stage of the flat-bottom pits. After they grew along the upward-sloping crack and separated from the interface, the flat-bottom pits were formed. In addition, poor-binding interfaces promoted the formation of flat-bottom pits.
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A highly reflective mirror based on SiO2/HfO2 fabricated by e-beam evaporation shows superior resistance to a picosecond laser compared to a SiO2/Ta2O5 mirror.
“Gong et al. [71] fabricated a highly reflective mirror based on SiO2/HfO2 by e-beam evaporation, showing superior resistance induced by a picosecond laser compared to a SiO2/Ta2O5 mirror.”
From Metal Oxide Thin Films for Advanced Photonic Applications (2026) · cites this paper as [71]
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Metal Oxide Thin Films for Advanced Photonic Applications
Stîngescu, M.-L., Șopronyi, M.-A., Antohe, Ș., & Scărișoreanu, N.-D. (2026) · Crystals · doi:10.3390/cryst16030164 · Cited by 2 · see citing works
- Authors
- Gong, H., Liu, X., Tao, C., Zhao, Y., Shuai, K., Li, D., Zhang, W., Sun, J., Zhou, L., Jiang, Y., Cui, Y., Zhang, D., Dai, Y., & Shao, J.
- Affiliations
- University of Shanghai for Science and Technology (CN)
- University of Chinese Academy of Sciences
- Wuhan University of Technology (CN)
- Shanghai Institute of Optics and Fine Mechanics (CN)
- Shanghai Institute of Optics and Fine Mechanics
- China Academy of Engineering Physics (CN)
- University of Chinese Academy of Sciences (CN)
- Venue
- Optical Materials Express
- Publisher
- Optica Publishing Group
- Published
- 2023-06-01
- Volume
- 13
- Issue
- 6
- Pages
- 1820
- ISSN
- 2159-3930 (ISSN-L)
- OpenAlex
- W4378084599
- Cited by
- 11
- References
- 38
- Citations by year
- 2026: 1 · 2025: 8 · 2024: 2
- FWCI
- 0.76
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Optical Materials Express (publishedVersion)
- Funders
- Science and Technology Commission of Shanghai Municipality (Grant No. 22220760300)
- Bureau of International Cooperation, Chinese Academy of Sciences (Grant No. 181231KYSB20210001)
- China Postdoctoral Science Foundation (2021M703326)
- National Natural Science Foundation of China (52002271)
- CAS Special Research Assistant Project
- Topics
- Physical Sciences › Materials Science › Surfaces, Coatings and Films › Optical Coatings and Gratings
- Physical Sciences › Engineering › Computational Mechanics › Laser Material Processing Techniques
- Physical Sciences › Engineering › Computational Mechanics › Surface Roughness and Optical Measurements
- Keywords
- laser-induced damage, high-reflectance coatings, HfO2/SiO2 multilayer, Ta2O5/SiO2 multilayer, picosecond pulses, ion beam assisted deposition, electric field strength
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