The DOI matches its Crossref record; 22 of the 22 references it cites were found in a registry or an index.
Wafer-scale silicon photonic switches beyond die size limit
Open accessAbstract
Fast optical switches have been proposed as a promising alternative to enable continual scaling of data centers with increasing size and data rates. Silicon photonics is a compelling platform for large-scale integrated photonic switches, leveraging advanced manufacturing foundries for electronic integrated circuits. In the past decade, the port counts of silicon photonic switches have increased steadily to 128×128. Further scaling of the switch is constrained by the maximum reticle size (2–3 cm) of lithography tools. Here, we propose to use wafer-scale integration to overcome the die size limit. As a proof of concept demonstration, we fabricated a 240×240 switch by lithographically stitching a 3×3 array of identical 80×80 switch blocks across reticle boundaries. Stitching loss is substantially reduced (0.004 dB) by tapering the waveguide width to 10 μm. The fabricated switch on a 4 cm×4 cm chip exhibits a maximum on-chip loss of 9.8 dB, an ON/OFF ratio of 70 dB, and switching times of less than 400 ns. To our knowledge, this is the largest integrated photonic switch ever reported. The loss-to-port count ratio (0.04 dB/port) is also the lowest.
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In the citing paper
“one of the largest-scale PICs today, a 240 × 240 silicon photonic switch matrix with 57,600 individual switching elements, has been demonstrated experimentally by combining MEMS with silicon photonic waveguides40.”
From Integrated silicon photonic MEMS (2023) · cites this paper as [40]
In the citing paper
“The recently demonstrated large-scale silicon photonic MEMS switch matrix40 and large-scale silicon photonic MEMS LiDAR41 clearly show the potential of the combination of silicon photonics and MEMS.”
From Integrated silicon photonic MEMS (2023) · cites this paper as [40]
In the citing paper
“Even VLSI (>10,000 components) prototypes have now been demonstrated30,32,34.”
From Roadmapping the next generation of silicon photonics (2024) · cites this paper as [34]
In the citing paper
“but technologies such as MEMS/NOEMS look promising34.”
From Roadmapping the next generation of silicon photonics (2024) · cites this paper as [34]
Citations
Cites
Deep learning with coherent nanophotonic circuits
Shen, Y., Harris, N. C., Skirlo, S., Prabhu, M., Baehr-Jones, T., Hochberg, M., Sun, X., Zhao, S., Larochelle, H., Englund, D., et al. (2017) · Nature Photonics · doi:10.1038/nphoton.2017.93 · Cited by 3,340
Thomson, D., Zilkie, A., Bowers, J. E., Komljenovic, T., Reed, G. T., Vivien, L., Marris-Morini, D., Cassan, E., Virot, L., Fédéli, J.-M., et al. (2016) · Journal of Optics · doi:10.1088/2040-8978/18/7/073003 · Cited by 1,363
Large-scale nanophotonic phased array
Sun, J., Timurdogan, E., Yaacobi, A., Hosseini, E. S., & Watts, M. R. (2013) · Nature · doi:10.1038/nature11727 · Cited by 1,282
Recent advances in optical technologies for data centers: a review
Cheng, Q., Bahadori, M., Glick, M. S., Rumley, S., & Bergman, K. (2018) · Optica · doi:10.1364/optica.5.001354 · Cited by 678
High-resolution aliasing-free optical beam steering
Hutchison, D. N., Sun, J., Doylend, J. K., Kumar, R., Heck, J. M., Kim, W., Phare, C. T., Feshali, A., & Rong, H. (2016) · Optica · doi:10.1364/optica.3.000887 · Cited by 536
Quantum transport simulations in a programmable nanophotonic processor
Harris, N. C., Steinbrecher, G. R., Prabhu, M., Lahini, Y., Mower, J., Bunandar, D., Chen, C., Wong, F. N. C., Baehr-Jones, T., Hochberg, M., et al. (2017) · Nature Photonics · doi:10.1038/nphoton.2017.95 · Cited by 519
Linear programmable nanophotonic processors
Harris, N. C., Carolan, J., Bunandar, D., Prabhu, M., Hochberg, M., Baehr-Jones, T. W., Fanto, M. L., Smith, A. M., Tison, C. C., Alsing, P. M., et al. (2018) · Optica · doi:10.1364/optica.5.001623 · Cited by 417
Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers
Seok, T. J., Quack, N., Han, S., Muller, R. S., & Wu, M. C. (2016) · Optica · doi:10.1364/optica.3.000064 · Cited by 308
Self-citation32 × 32 silicon electro-optic switch with built-in monitors and balanced-status units
Qiao, L., Tang, W., & Chu, T. (2017) · Scientific Reports · doi:10.1038/srep42306 · Cited by 256
Photonic switching in high performance datacenters [Invited]
Cheng, Q., Rumley, S., Bahadori, M., & Bergman, K. (2018) · Optics Express · doi:10.1364/oe.26.016022 · Cited by 239
Research works printed but not linked: 1
- Wang, 2010, C-through: part-time optics in data centers, 327
Cited by
Sorted by citations
Roadmapping the next generation of silicon photonics
Shekhar, S., Bogaerts, W., Chrostowski, L., Bowers, J. E., Hochberg, M., Soref, R., & Shastri, B. J. (2024) · Nature Communications · doi:10.1038/s41467-024-44750-0 · Cited by 878
A large-scale microelectromechanical-systems-based silicon photonics LiDAR
Zhang, X., Kwon, K., Henriksson, J., Luo, J., & Wu, M. C. (2022) · Nature · doi:10.1038/s41586-022-04415-8 · Cited by 438
Self-citationSilicon photonics for high-capacity data communications
Shi, Y., Zhang, Y., Wan, Y., Yu, Y., Zhang, Y., Hu, X., Xiao, X., Xu, H., Zhang, L., & Pan, B. (2022) · Photonics Research · doi:10.1364/prj.456772 · Cited by 332
Quantum-dot-based deterministic photon–emitter interfaces for scalable photonic quantum technology
Uppu, R., Midolo, L., Zhou, X., Carolan, J., & Lodahl, P. (2021) · Nature Nanotechnology · doi:10.1038/s41565-021-00965-6 · Cited by 228
Scalable reservoir computing on coherent linear photonic processor
Nakajima, M., Tanaka, K., & Hashimoto, T. (2021) · Communications Physics · doi:10.1038/s42005-021-00519-1 · Cited by 203
Metadata
- Authors
- Seok, T. J., Kwon, K., Henriksson, J., Luo, J., & Wu, M. C.
- Affiliations
- Gwangju Institute of Science and Technology (KR)
- University of California, Berkeley (US)
- Venue
- Optica
- Publisher
- Optica Publishing Group
- Published
- 2019-04-12
- Volume
- 6
- Issue
- 4
- Pages
- 490
- ISSN
- 2334-2536 (ISSN-L)
- OpenAlex
- W2937088522
- Cited by
- 214
- References
- 22
- Citations by year
- 2026: 19 · 2025: 38 · 2024: 31 · 2023: 25 · 2022: 33 · 2021: 32 · 2020: 22 · 2019: 12
- FWCI
- 8.90
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Optica (publishedVersion)
- OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) (submittedVersion)
- Funders
- Advanced Research Projects Agency—Energy (DE-AR0000849)
- National Science Foundation (1827633, EEC-0812072)
- UC Berkeley
- National Research Foundation of Korea (2018R1C1B6005302)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced Optical Network Technologies
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Semiconductor Lasers and Optical Devices
- Keywords
- silicon photonic switches, wafer-scale integration, waveguide tapering, on-chip loss, switching time, data center optical interconnects
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