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A method for interpreting the data from depth-sensing indentation instruments
Abstract
Depth-sensing indentation instruments provide a means for studying the elastic and plastic properties of thin films. A method for obtaining hardness and Young's modulus from the data obtained from these types of instruments is described. Elastic displacements are determined from the data obtained during unloading of the indentation. Young's modulus can be calculated from these measurements. In addition, the elastic contribution to the total displacement can be removed in order to calculate hardness. Determination of the exact shape of the indenter at the tip is critical to the measurement of both hardness and elastic modulus for indentation depths less than a micron. Hardness is shown to depend on strain rate, especially when the hardness values are calculated from the data along the loading curves.
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Cited by
Oliver, W. C., & Pharr, G. M. (1992) · Journal of Materials Research · doi:10.1557/jmr.1992.1564 · Cited by 26,961
The search for novel, superhard materials
Vepřek, S. (1999) · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · doi:10.1116/1.581977 · Cited by 1,208
Elastic properties of human cortical and trabecular lamellar bone measured by nanoindentation
Rho, J.-Y., Tsui, T. Y., & Pharr, G. M. (1997) · Biomaterials · doi:10.1016/s0142-9612(97)00073-2 · Cited by 924
Nano-indentation of polymeric surfaces
Briscoe, B. J., Fiori, L., & Pelillo, E. (1998) · Journal of Physics D: Applied Physics · doi:10.1088/0022-3727/31/19/006 · Cited by 760
Turner, C. H., Rho, J., Takano, Y., Tsui, T. Y., & Pharr, G. M. (1999) · Journal of Biomechanics · doi:10.1016/s0021-9290(98)00177-8 · Cited by 547
Metadata
- Authors
- Doerner, M. F., & Nix, W. D.
- Venue
- Journal of Materials Research
- Published
- 1986-08
- Volume
- 1
- Issue
- 4
- Pages
- 601-609
- ISSN
- 0884-1616 (ISSN-L)
- 0884-2914
- 2044-5326
- OpenAlex
- W2119680087
- Cited by
- 2,863
- References
- 0
- FWCI
- 33.10
- Type
- journal article
- Language
- en
- Open access
- closed
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- Doerner, M. F., & Nix, W. D. (1986). A method for interpreting the data from depth-sensing indentation instruments. Journal of Materials Research. https://doi.org/10.1557/jmr.1986.0601
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