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Low temperature perovskite formation of lead zirconate titanate thin films by a seeding process
Abstract
A two-step seeding process has been developed to lower the transformation temperature and modify the grain structure of ferroelectric lead zirconate titanate (PZT) thin films with high Zr/Ti ratio. Previous study has shown that nucleation is the rate-limiting step for the perovskite formation. Therefore, any process that enhances the kinetics of nucleation is likely to decrease the transformation temperature. In this process, a very thin (45 nm) seeding layer of PbTiO 3, which has a low effective activation energy for perovskite formation, was used to provide nucleation sites needed for the low temperature perovskite formation. In this study, we have shown that the pyrochlore-to-perovskite phase transformation temperature of PbZrxTi 1−xO 3 films of high Zr/Ti ratio (e.g., x = 53/47) can be lowered by as much as 100 °C. The grain size of these films can also be substantially modified by this two-step approach.
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Citations
Cited by
Chemical Solution Deposition of Perovskite Thin Films
Schwartz, R. W. (1997) · Chemistry of Materials · doi:10.1021/cm970286f · Cited by 537
Chemical solution deposition of electronic oxide films
Schwartz, R. W., Schneller, T., & Waser, R. (2004) · Comptes Rendus. Chimie · doi:10.1016/j.crci.2004.01.007 · Cited by 469
PZT thin films for microsensors and actuators: Where do we stand?
Muralt, P. (2000) · IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control · doi:10.1109/58.852073 · Cited by 375
Control of Microstructure and Orientation in Solution‐Deposited BaTiO 3 and SrTiO 3 Thin Films
Schwartz, R. W., Clem, P. G., Voigt, J. A., Byhoff, E. R., Van Stry, M., Headley, T. J., & Missert, N. A. (1999) · Journal of the American Ceramic Society · doi:10.1111/j.1151-2916.1999.tb02091.x · Cited by 145
Metadata
- Authors
- Kwok, C. K., & Desu, S. B.
- Venue
- Journal of Materials Research
- Published
- 1993-02
- Volume
- 8
- Issue
- 2
- Pages
- 339-344
- ISSN
- 0884-1616 (ISSN-L)
- 0884-2914
- 2044-5326
- OpenAlex
- W2066120182
- Cited by
- 256
- References
- 0
- FWCI
- 13.50
- Type
- journal article
- Language
- en
- Open access
- closed
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- Kwok, C. K., & Desu, S. B. (1993). Low temperature perovskite formation of lead zirconate titanate thin films by a seeding process. Journal of Materials Research. https://doi.org/10.1557/jmr.1993.0339
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