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A Rapid Thermal Nanoimprint Apparatus through Induction Heating of Nickel Mold

Fu, Xinxin, Chen, Qian, Chen, Xinyu, Zhang, Liang, Yang, Aibin, Cui, Yushuang, Yuan, Changsheng, Ge, Haixiong·2019·Micromachines
DOI 10.3390/mi10050334PMC PMC6562963
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Abstract

Thermal nanoimprint lithography is playing a vital role in fabricating micro/nanostructures on polymer materials by the advantages of low cost, high throughput, and high resolution. However, a typical thermal nanoimprint process usually takes tens of minutes due to the relatively low heating and cooling rate in the thermal imprint cycle. In this study, we developed an induction heating apparatus for the thermal imprint with a mold made of ferromagnetic material, nickel. By applying an external high-frequency alternating magnetic field, heat was generated by the eddy currents and magnetic hysteresis losses of the ferromagnetic nickel mold at high speed. Once the external alternating magnetic field was cut off, the system would cool down fast owe to the small thermal capacity of the nickel mold; thus, providing a high heating and cooling rate for the thermal nanoimprint process. In this paper, nanostructures were successfully replicated onto polymer sheets with the scale of 4-inch diameter within 5 min.

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Figure 1 Experimental setup for rapid thermal NIL (T-NIL): (a) schematic diagram of the rapid imprint apparatus; (b) cross-section view of the chamber and imprint materials stack during the imprint process; and (c) photograph of the home-made imprint apparatus.
Figure 1 Experimental setup for rapid thermal NIL (T-NIL): (a) schematic diagram of the rapid imprint apparatus; (b) cross-section view of the chamber and imprint materials stack during the imprint process; and (c) photograph of the home-made imprint apparatus.CC BY · PubMed Central
Figure 2 (a) Photograph of the customer-made induction coil panel; and (b) schematic illustration of induction heating for nickel mold.
Figure 2 (a) Photograph of the customer-made induction coil panel; and (b) schematic illustration of induction heating for nickel mold.CC BY · PubMed Central
Figure 3 (a) Schematic illustrations of thermal nanoimprint process on polymer sheet; and (b) sequence of heating and pressing during the thermal nanoimprint process.
Figure 3 (a) Schematic illustrations of thermal nanoimprint process on polymer sheet; and (b) sequence of heating and pressing during the thermal nanoimprint process.CC BY · PubMed Central
Figure 4 (a) Plot of the depth of imprinted poly(methyl methacrylate) (PMMA) nanoholes vs imprint pressure under the imprint temperature of 120 °C; and (b) plot of the depth of imprinted PMMA nanoholes vs imprint temperature under the imprint pressure of 0.5 MPa. The height of nanopillars on the mold is 250 nm.
Figure 4 (a) Plot of the depth of imprinted poly(methyl methacrylate) (PMMA) nanoholes vs imprint pressure under the imprint temperature of 120 °C; and (b) plot of the depth of imprinted PMMA nanoholes vs imprint temperature under the imprint pressure of 0.5 MPa. The height of nanopillars on the mold is 250 nm.CC BY · PubMed Central
Figure 5 (a) Plot of measured temperature at different locations vs imprint time during a typical imprint process; and (b) infrared radiation (IR) thermal image of the nickel mold at one moment in the heating process (the unit for the axis in Figure 5b is °C).
Figure 5 (a) Plot of measured temperature at different locations vs imprint time during a typical imprint process; and (b) infrared radiation (IR) thermal image of the nickel mold at one moment in the heating process (the unit for the axis in Figure 5b is °C).CC BY · PubMed Central
Figure 6 (a) Photograph of the 4-inch diameter nickel mold (right) and nanopatterned PMMA sheet fabricated through our rapid imprint apparatus (left); (b) top-viewed scanning electron microscope (SEM) image of the nickel mold; (c) tilted-viewed SEM image of the nickel mold; (d) top-viewed SEM images of the imprinted PMMA sheet; and (e) tilted-viewed SEM images of the imprinted PMMA sheet’s cross section.
Figure 6 (a) Photograph of the 4-inch diameter nickel mold (right) and nanopatterned PMMA sheet fabricated through our rapid imprint apparatus (left); (b) top-viewed scanning electron microscope (SEM) image of the nickel mold; (c) tilted-viewed SEM image of the nickel mold; (d) top-viewed SEM images of the imprinted PMMA sheet; and (e) tilted-viewed SEM images of the imprinted PMMA sheet’s cross section.CC BY · PubMed Central
Figure 7 (a) Top-viewed SEM image of the anodic aluminum oxide (AAO) mold; and (b) top-viewed SEM image of the imprinted PMMA layer on polyethylene terephthalate (PET) substrate.
Figure 7 (a) Top-viewed SEM image of the anodic aluminum oxide (AAO) mold; and (b) top-viewed SEM image of the imprinted PMMA layer on polyethylene terephthalate (PET) substrate.CC BY · PubMed Central

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Metadata

Authors
Fu, X., Chen, Q., Chen, X., Zhang, L., Yang, A., Cui, Y., Yuan, C., & Ge, H.
Venue
Micromachines
Publisher
MDPI AG
Published
2019-05-21
Volume
10
Issue
5
Pages
334
ISSN
2072-666X
DOI
10.3390/mi10050334
PMC
PMC6562963
Cited by
17
References
0
Language
en
Licence
creativecommons.org/licenses/by/4.0/ (vor)
Funders
  • National Key R&D Program of China (2018YFB1105400)
  • National Natural Science Foundation of China (51721001)

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CoChat. (2026). Citation check: A Rapid Thermal Nanoimprint Apparatus through Induction Heating of Nickel Mold. https://app.cochat.ai/papers/10.3390/mi10050334
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Fu, X., Chen, Q., Chen, X., Zhang, L., Yang, A., Cui, Y., Yuan, C., & Ge, H. (2019). A Rapid Thermal Nanoimprint Apparatus through Induction Heating of Nickel Mold. Micromachines. https://doi.org/10.3390/mi10050334

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