Preparation of Epitaxial LiTaO3 Thin Films by Metal Organic Chemical Vapor Deposition and its Electrical and Optical Properties
Abstract
Epitaxial LiTaO3 thin films were deposited on epitaxial Pt(111)/Al2O3(001) and Al2O3(001) substrates by metal organic chemical vapor deposition using LiTa(OC2H5)4(OC2H4OCH3)2 and Li(DPM) precursors. The full-width at half-maximum of the rocking curve of LiTaO3 thin films were respectively 0.29° on Al2O3(001) substrates and 0.98° on epitaxial Pt(111)/Al2O3(001). Electrical measurements showed that the remanent polarization and coercive field of the films were 2Pr=76 μC/cm2 and E =130 kV/cm, respectively. The leakage current density was 10-6–10-8 A/cm2 at 120 kV/cm. Refractive indices n measured at 632.8 nm were measured respectively as 2.15 on Al2O3(001) and 2.14 on Pt(111)/Al2O3(001).
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Epitaxial LiTaO3 thin films have been obtained only on specific substrates, such as LN or sapphire.
“Regardless, epitaxial thin films have been obtained only on specific substrates, such as LN or sapphire [199-201].”
From Metal Oxide Thin Films for Advanced Photonic Applications (2026) · cites this paper as [199]
Cites
Heteroepitaxial Growth of LiTaO3 Single-Crystal Films by RF Magnetron Sputtering
Shiosaki, Y. S. (1991) · Japanese Journal of Applied Physics · doi:10.1143/jjap.30.2204 · Cited by 42 · see citing works
Dielectric and pyroelectric properties of LiTaO3single crystals
Ping, S. S., & Lin, L. H. (1981) · Ferroelectrics · doi:10.1080/00150198108209548 · Cited by 11 · see citing works
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Metal Oxide Thin Films for Advanced Photonic Applications
Stîngescu, M.-L., Șopronyi, M.-A., Antohe, Ș., & Scărișoreanu, N.-D. (2026) · Crystals · doi:10.3390/cryst16030164 · Cited by 2 · see citing works
- Authors
- Yamamoto, T., Wakiya, N., Mizutani, N., & Shinozaki, K.
- Affiliations
- Tokyo Institute of Technology (JP)
- Shizuoka University (JP)
- ORCID
- Wakiya, Naoki
- Venue
- Key Engineering Materials
- Publisher
- Trans Tech Publications, Ltd.
- Published
- 2006-09
- Volume
- 320
- Pages
- 57-60
- ISSN
- 1013-9826 (ISSN-L)
- 1662-9795
- OpenAlex
- W2077107823
- Cited by
- 4
- References
- 2
- Citations by year
- 2017: 1 · 2014: 1 · 2013: 1 · 2012: 1
- FWCI
- 0.00
- Type
- journal article
- Language
- en
- Open access
- closed
- Licence
- Locations
- Key engineering materials (publishedVersion)
- Topics
- Physical Sciences › Materials Science › Materials Chemistry › Ferroelectric and Piezoelectric Materials
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photorefractive and Nonlinear Optics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Semiconductor materials and devices
- Keywords
- lithium tantalate, LiTaO3 thin films, epitaxial thin films, metalorganic chemical vapor deposition, epitaxial substrates, rocking curves, remanent polarization, coercive field, leakage current density, refractive index, optical properties, electrical properties
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