Kazazis, Dimitrios

Extreme ultraviolet lithography

Kazazis, D., Santaclara, J. G., van Schoot, J., Mochi, I., & Ekinci, Y. (2024) · Nature Reviews Methods Primers

Advancements in Photolithography TechniquesAdvanced X-ray Imaging Techniques

Cited by 149

Extreme ultraviolet lithography reaches 5 nm resolution

Giannopoulos, I., Mochi, I., Vockenhuber, M., Ekinci, Y., & Kazazis, D. (2024) · Nanoscale

Advancements in Photolithography TechniquesAdvanced X-ray Imaging Techniques

Cited by 69

Mechanistic insights in Zr-and Hf-based molecular hybrid EUV photoresists

Wu, L., Baljozovic, M., Portale, G., Kazazis, D., Vockenhuber, M., Jung, T., Ekinci, Y., & Castellanos Ortega, S. (2019) · Journal of Micro/Nanopatterning Materials and Metrology

Advancements in Photolithography TechniquesPhotopolymerization techniques and applications

Cited by 49

Resistless EUV lithography: Photon-induced oxide patterning on silicon

Tseng, L.-T., Karadan, P., Kazazis, D., Constantinou, P. C., Stock, T. J. Z., Curson, N. J., Schofield, S. R., Muntwiler, M., Aeppli, G., & Ekinci, Y. (2023) · Science Advances

Advancements in Photolithography TechniquesNanofabrication and Lithography Techniques

Cited by 34

EUV-induced hydrogen desorption as a step towards large-scale silicon quantum device patterning

Constantinou, P., Stock, T. J. Z., Tseng, L.-T., Kazazis, D., Muntwiler, M., Vaz, C. A. F., Ekinci, Y., Aeppli, G., Curson, N. J., & Schofield, S. R. (2024) · Nature Communications

Advancements in Photolithography TechniquesNanofabrication and Lithography Techniques

Cited by 27

High-efficiency diffraction gratings for EUV and soft x-rays using spin-on-carbon underlayers

Wang, X., Kazazis, D., Tseng, L.-T., Robinson, A. P. G., & Ekinci, Y. (2022) · Nanotechnology

Advancements in Photolithography TechniquesOptical Coatings and Gratings

Cited by 15

Advancements in EUV photoresists for high-NA lithography

Develioglu, A., Vockenhuber, M., van Lent-Protasova, L., Mochi, I., Ekinci, Y., & Kazazis, D. (2023) · International Conference on Extreme Ultraviolet Lithography 2023

Advancements in Photolithography TechniquesAdvanced X-ray Imaging Techniques

Cited by 12