Low‐Temperature Synthesis of Large‐Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma‐Enhanced Chemical Vapor Deposition

Ahn, Chisung; Lee, Jinhwan; Kim, Hyeong‐U; Bark, Hunyoung; Jeon, Minhwan; Ryu, Gyeong Hee; Lee, Zonghoon; Yeom, Geun Young; Kim, Kwangsu; Jung, Jaehyuck; Kim, Youngseok; Lee, Changgu; Kim, Taesung

doi:10.1002/adma.201501678

Low‐Temperature Synthesis of Large‐Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma‐Enhanced Chemical Vapor Deposition

By plasma-enhanced chemical vapor deposition, a molybdenum disulfide (MoS2 ) thin film is synthesized directly on a wafer-scale plastic substrate at below 300 °C. The carrier mobility of the films is 3.74 cm(2) V(-1) s(-1) . Also, humidity is successfully detected with MoS2 -based sensors fabrica…