Ultra-low loss waveguide platform and its integration with silicon photonics

Abstract

Planar waveguides with ultra-low optical propagation loss enable a plethora of passive photonic integrated circuits, such as splitters and combiners, filters, delay lines, and components for advanced modulation formats. An overview is presented of the status of the field of ultra-low loss waveguides and circuits, including the design, the trade-off between bend radius and loss, and fabrication rationale. The characterization methods to accurately measure such waveguides are discussed. Some typical examples of device and circuit applications are presented. An even wider range of applications becomes possible with the integration of active devices, such as lasers, amplifiers, modulators and photodetectors, on such an ultra-low loss waveguide platform. A summary of efforts to integrate silicon nitride and silica-based low-loss waveguides with silicon and III/V based photonics, either hybridly or heterogeneously, will be presented. The approach to combine these integration technologies heterogeneously on a single silicon substrate is discussed and an application example of a high-bandwidth receiver is shown.