The DOI matches its Crossref record; 20 of the 20 references it cites were found in a registry or an index.
Integrated waveguide coupled Si_3N_4 resonators in the ultrahigh-Q regime
Open accessAbstract
The vast majority of work on waveguide-coupled reso-nators focuses on decreasing losses in the waveguide and coupling region. Here we present fully integrated reso-nators based on an ultralow-loss Si3N4 waveguide plat-form. By tailoring the directional coupler excitation to the resonators, we are able to achieve lower loss single-mode coupling to multimode waveguide widths com-pared to straight bus waveguide directional couplers. This allows us to demonstrate record-high integrated waveguide coupled intrinsic quality factor (Qint) values of 81 million at a 9.65 mm bend radius, with a future direction to both stronger and lower loss waveguide– resonator coupling. This result opens up integration possibilities for narrow linewidth integrated diode lasers, low noise feedback systems, microwave photonic research, and the ultrastable timing reference
Overview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cites
Integrated microwave photonics
Marpaung, D., Roeloffzen, C., Heideman, R., Leinse, A., Sales, S., & Capmany, J. (2013) · Laser & Photonics Reviews · doi:10.1002/lpor.201200032 · Cited by 787
Optical Properties of Silicon Nitride
Philipp, H. R. (1973) · Journal of The Electrochemical Society · doi:10.1149/1.2403440 · Cited by 467
Planar waveguides with less than 01 dB/m propagation loss fabricated with wafer bonding
Bauters, J. F., Heck, M. J. R., John, D. D., Barton, J. S., Bruinink, C. M., Leinse, A., Heideman, R. G., Blumenthal, D. J., & Bowers, J. E. (2011) · Optics Express · doi:10.1364/oe.19.024090 · Cited by 418
Self-citationOptical resonators with ten million finesse
Savchenkov, A. A., Matsko, A. B., Ilchenko, V. S., & Maleki, L. (2007) · Optics Express · doi:10.1364/oe.15.006768 · Cited by 363
High confinement micron-scale silicon nitride high Q ring resonator
Gondarenko, A., Levy, J. S., & Lipson, M. (2009) · Optics Express · doi:10.1364/oe.17.011366 · Cited by 320
Schwelb, O. (2004) · Journal of Lightwave Technology · doi:10.1109/jlt.2004.827666 · Cited by 295
Overcoming Si_3N_4 film stress limitations for high quality factor ring resonators
Luke, K., Dutt, A., Poitras, C. B., & Lipson, M. (2013) · Optics Express · doi:10.1364/oe.21.022829 · Cited by 234
Ultra-low loss waveguide platform and its integration with silicon photonics
Heck, M. J. R., Bauters, J. F., Davenport, M. L., Spencer, D. T., & Bowers, J. E. (2014) · Laser & Photonics Reviews · doi:10.1002/lpor.201300183 · Cited by 183
Self-citationUltralow-loss silicon ring resonators
Biberman, A., Shaw, M. J., Timurdogan, E., Wright, J. B., & Watts, M. R. (2012) · Optics Letters · doi:10.1364/ol.37.004236 · Cited by 179
Zhuang, L., Marpaung, D., Burla, M., Beeker, W., Leinse, A., & Roeloffzen, C. (2011) · Optics Express · doi:10.1364/oe.19.023162 · Cited by 153
Cited by
Integrated photonics on thin-film lithium niobate
Zhu, D., Shao, L., Yu, M., Cheng, R., Desiatov, B., Xin, C. J., Hu, Y., Holzgrafe, J., Ghosh, S., Shams-Ansari, A., et al. (2021) · Advances in Optics and Photonics · doi:10.1364/aop.411024 · Cited by 1,516
Broadband mid-infrared frequency comb generation in a Si_3N_4 microresonator
Luke, K., Okawachi, Y., Lamont, M. R. E., Gaeta, A. L., & Lipson, M. (2015) · Optics Letters · doi:10.1364/ol.40.004823 · Cited by 648
Silicon nitride in silicon photonics
Blumenthal, D. J., Heideman, R., Geuzebroek, D., Leinse, A., & Roeloffzen, C. (2018) · Proceedings of the IEEE · doi:10.1109/jproc.2018.2861576 · Cited by 641
Hertz-linewidth semiconductor lasers using CMOS-ready ultra-high-Q microresonators
Jin, W., Yang, Q.-F., Chang, L., Shen, B., Wang, H., Leal, M. A., Wu, L., Gao, M., Feshali, A., Paniccia, M., et al. (2021) · Nature Photonics · doi:10.1038/s41566-021-00761-7 · Cited by 617
Self-citationOn-chip dual-comb source for spectroscopy
Dutt, A., Joshi, C., Ji, X., Cardenas, J., Okawachi, Y., Luke, K., Gaeta, A. L., & Lipson, M. (2018) · Science Advances · doi:10.1126/sciadv.1701858 · Cited by 453
Metadata
- Authors
- Spencer, D. T., Bauters, J. F., Heck, M. J. R., & Bowers, J. E.
- Venue
- Optica
- Publisher
- Optica Publishing Group
- Published
- 2014-09-08
- Volume
- 1
- Issue
- 3
- Pages
- 153
- ISSN
- 2334-2536 (ISSN-L)
- OpenAlex
- W1975337999
- Cited by
- 292
- References
- 20
- FWCI
- 11.14
- Type
- journal article
- Language
- en
- Open access
- gold
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: Integrated waveguide coupled Si_3N_4 resonators in the ultrahigh-Q regime. https://app.cochat.ai/papers/10.1364/optica.1.000153
- The paper
- Spencer, D. T., Bauters, J. F., Heck, M. J. R., & Bowers, J. E. (2014). Integrated waveguide coupled Si_3N_4 resonators in the ultrahigh-Q regime. Optica. https://doi.org/10.1364/optica.1.000153
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.