Development of a flexible three-axial tactile sensor array for a robotic finger
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Conventional polyimide patterning processes use reactive ion etching or chemical etching with the polyimide etchant of KOH-ethanol-DI water mixture.
“The conventional polyimide patterning processes use reactive ion etching (RIE)66 or chemical etching process5152 with the polyimide etchant of KOH-ethanol-DI water mixture.”
From A Flexible and Wearable Human Stress Monitoring Patch (2016) · cites this paper as [51]
Cites
A Flexible Polymer Tactile Sensor: Fabrication and Modular Expandability for Large Area Deployment
Lee, H.-K., Chang, S.-I., & Yoon, E. (2006) · Journal of Microelectromechanical Systems · doi:10.1109/jmems.2006.886021 · Cited by 399 · see citing works
Polymer micromachined multimodal tactile sensors
Engel, J., Chen, J., Fan, Z., & Liu, C. (2005) · Sensors and Actuators A: Physical · doi:10.1016/j.sna.2004.05.037 · Cited by 224 · see citing works
Hwang, E.-S., Seo, J., & Kim, Y.-J. (2007) · Journal of Microelectromechanical Systems · doi:10.1109/jmems.2007.896716 · Cited by 184 · see citing works
Design and fabrication of a hybrid silicon three-axial force sensor for biomechanical applications
Beccai, L., Roccella, S., Arena, A., Valvo, F., Valdastri, P., Menciassi, A., Carrozza, M. C., & Dario, P. (2005) · Sensors and Actuators A Physical · doi:10.1016/j.sna.2005.01.007 · Cited by 184 · see citing works
Silicon three-axial tactile sensor
Chu, Z., Sarro, P. M., & Middelhoek, S. (1996) · Sensors and Actuators A Physical · doi:10.1016/s0924-4247(95)01190-0 · Cited by 147 · see citing works
An integrated MEMS three-dimensional tactile sensor with large force range
Mei, T., Li, W. J., Yu, G., et al. (2000) · Sensors and Actuators A Physical · doi:10.1016/s0924-4247(99)00261-7 · Cited by 137 · see citing works
Tactile Sensor Based on Piezoelectric Resonance
Krishna, G. M., & Rajanna, K. (2004) · IEEE Sensors Journal · doi:10.1109/jsen.2004.833505 · Cited by 126 · see citing works
New tactile sensor chip with silicone rubber cover
Leineweber, M., Pelz, G., Schmidt, M., et al. (2000) · Sensors and Actuators A Physical · doi:10.1016/s0924-4247(00)00310-1 · Cited by 107 · see citing works
A flexible robot skin for safe physical human robot interaction
Duchaine, V., Lauzier, N., Baril, M., et al. (2009) · Proceedings - IEEE International Conference on Robotics and Automation/Proceedings · doi:10.1109/robot.2009.5152595 · Cited by 92 · see citing works
Piezoelectric Vibration-Type Tactile Sensor Using Elasticity and Viscosity Change of Structure
Motoo, K., Arai, F., & Fukuda, T. (2007) · IEEE Sensors Journal · doi:10.1109/jsen.2007.895973 · Cited by 51 · see citing works
Ohka, M., Kobayashi, H., & MITSUYA, Y. (2005) · IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS) · doi:10.1109/iros.2005.1545264 · Cited by 49 · see citing works
A Small and Low-Cost 3-D Tactile Sensor for a Wearable Force Plate
Liu, T., INOUE, Y., & SHIBATA, K. (2009) · IEEE Sensors Journal · doi:10.1109/jsen.2009.2026509 · Cited by 49 · see citing works
Kim, J., Choi, W.-C., Kwon, H.-J., & Kang, D.-I. (2006) · doi:10.1109/icsens.2007.355911 · Cited by 15 · see citing works
Self-citationKwon, H.-J., & Choi, W.-C. (2010) · Microsystem Technologies · doi:10.1007/s00542-010-1125-6 · Cited by 15 · see citing works
Self-citationFlexible and tactile sensor based on a photosensitive polymer
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Yussof, H., Abdullah, S. C., & Ohka, M. (2010) · Asia International Conference on Mathematical/Analytical Modelling and Computer Simulation · doi:10.1109/ams.2010.126 · Cited by 11 · see citing works
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Hammock, M. L., Chortos, A., Tee, B. C. ‐., Tok, J. B. ‐., & Bao, Z. (2013) · Advanced Materials · doi:10.1002/adma.201302240 · Cited by 2,396 · see citing works
A Flexible and Wearable Human Stress Monitoring Patch
Yoon, S., Sim, J. K., & Cho, Y.-H. (2016) · Scientific Reports · doi:10.1038/srep23468 · Cited by 151 · see citing works
Chen, T., Zhao, M., Shi, Q., Yang, Z., Liu, H., Sun, L., Ouyang, J., & Lee, C. (2018) · Nano Energy · doi:10.1016/j.nanoen.2018.06.022 · Cited by 89 · see citing works
- Authors
- Kwon, H.-J., Kim, J.-H., & Choi, W.-C.
- Affiliations
- University of Maryland, College Park (US)
- Korea Research Institute of Standards and Science (KR)
- Busan TechnoPark (KR)
- Corresponding author
- Choi, Woo-Chang
- ORCID
- Choi, Woo-Chang
- Venue
- Microsystem Technologies
- Published
- 2011-10-14
- Volume
- 17
- Issue
- 12
- Pages
- 1721-1726
- ISSN
- 0946-7076 (ISSN-L)
- 1432-1858
- OpenAlex
- W2053816127
- Cited by
- 24
- References
- 16
- Citations by year
- 2022: 1 · 2021: 1 · 2020: 1 · 2018: 2 · 2017: 3 · 2016: 7 · 2015: 1 · 2014: 2 · 2013: 5 · 2012: 1
- FWCI
- 1.51
- Type
- journal article
- Language
- en
- Open access
- closed
- Licence
- www.springer.com/tdm (tdm)
- Locations
- Microsystem Technologies (publishedVersion)
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Sensor and Energy Harvesting Materials
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Physical Sciences › Computer Science › Computer Networks and Communications › Sensor Technology and Measurement Systems
- Keywords
- tactile sensor array, robotic fingers, piezoresistive strain gauges, polymer micromachining, hysteresis error, repeatability error, slip detection, flexible sensors
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Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
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