Polymer micromachined multimodal tactile sensors
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Conventional polyimide patterning processes use reactive ion etching or chemical etching with the polyimide etchant of KOH-ethanol-DI water mixture.
“The conventional polyimide patterning processes use reactive ion etching (RIE)66 or chemical etching process5152 with the polyimide etchant of KOH-ethanol-DI water mixture.”
From A Flexible and Wearable Human Stress Monitoring Patch (2016) · cites this paper as [66]
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- Authors
- Engel, J., Chen, J., Fan, Z., & Liu, C.
- Affiliations
- University of Illinois Urbana-Champaign (US)
- Corresponding author
- Engel, Jonathan
- ORCID
- Venue
- Sensors and Actuators A: Physical
- Publisher
- Elsevier BV
- Published
- 2005-01
- Volume
- 117
- Issue
- 1
- Pages
- 50-61
- ISSN
- 0924-4247 (ISSN-L)
- OpenAlex
- W2135991480
- Cited by
- 224
- References
- 38
- Citations by year
- 2026: 4 · 2025: 2 · 2024: 3 · 2023: 2 · 2022: 11 · 2021: 6 · 2020: 8 · 2019: 5 · 2018: 10 · 2017: 10 · 2016: 11 · 2015: 12 · 2014: 13 · 2013: 17 · 2012: 20
- FWCI
- 8.07
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Sensors and Actuators A Physical (publishedVersion)
- Funders
- National Science Foundation
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Sensor and Energy Harvesting Materials
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Life Sciences › Neuroscience › Cognitive Neuroscience › Tactile and Sensory Interactions
- Keywords
- polymer micromachining, temperature sensing, object discrimination, soft robotics
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