Cited by 224Advanced Sensor and Energy Harvesting MaterialsAdvanced MEMS and NEMS TechnologiesTactile and Sensory Interactions

Polymer micromachined multimodal tactile sensors

Engel, Jonathan, Chen, Jack, Fan, Zhifang, Liu, Chang·2005·Sensors and Actuators A: Physical

Integrity signals

Registry

Crossref · 10.1016/j.sna.2004.05.037

Cites

38 of 38 references verified0 citation errors · 0 not checkable

Statistics

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Claims the paper makes

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Claims other papers make about this one

Each is checked against this paper’s own text: does it say what the citing paper says it does?

  • Conventional polyimide patterning processes use reactive ion etching or chemical etching with the polyimide etchant of KOH-ethanol-DI water mixture.

    “The conventional polyimide patterning processes use reactive ion etching (RIE)66 or chemical etching process5152 with the polyimide etchant of KOH-ethanol-DI water mixture.”

    From A Flexible and Wearable Human Stress Monitoring Patch (2016) · cites this paper as [66]

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Authors
Engel, J., Chen, J., Fan, Z., & Liu, C.
Affiliations
University of Illinois Urbana-Champaign (US)
Corresponding author
Engel, Jonathan
Venue
Sensors and Actuators A: Physical
Publisher
Elsevier BV
Published
2005-01
Volume
117
Issue
1
Pages
50-61
ISSN
0924-4247 (ISSN-L)
OpenAlex
W2135991480
Cited by
224
References
38
Citations by year
2026: 4 · 2025: 2 · 2024: 3 · 2023: 2 · 2022: 11 · 2021: 6 · 2020: 8 · 2019: 5 · 2018: 10 · 2017: 10 · 2016: 11 · 2015: 12 · 2014: 13 · 2013: 17 · 2012: 20
FWCI
8.07
Type
journal article
Language
en
Open access
closed
Locations
Sensors and Actuators A Physical (publishedVersion)
Funders
National Science Foundation
Topics
  • Physical Sciences › Engineering › Biomedical Engineering › Advanced Sensor and Energy Harvesting Materials
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
  • Life Sciences › Neuroscience › Cognitive Neuroscience › Tactile and Sensory Interactions
Keywords
polymer micromachining, temperature sensing, object discrimination, soft robotics

About these checks

Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.

Statistics and arithmetic are recomputed, not judged.

Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.

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