EUV multilayer optics
Integrity signals
Registry
Cites
Statistics
Claims the paper makes
Cites
Henke, B. L., Gullikson, E. M., & Davis, J. C. (1993) · Atomic Data and Nuclear Data Tables · doi:10.1006/adnd.1993.1013 · Cited by 6,313 · see citing works
Design of grazing-incidence multilayer supermirrors for hard-x-ray reflectors
Joensen, K. D., Voutov, P., Szentgyorgyi, A. H., et al. (1995) · Applied Optics · doi:10.1364/ao.34.007935 · Cited by 127 · see citing works
Highly repetitive, extreme-ultraviolet radiation source based on a gas-discharge plasma
Bergmann, K., Schriever, G., Rosier, O., et al. (1999) · Applied Optics · doi:10.1364/ao.38.005413 · Cited by 99 · see citing works
Kozhevnikov, I. V., Bukreeva, I., & Ziegler, E. (2001) · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · doi:10.1016/s0168-9002(00)01079-2 · Cited by 97 · see citing works
Supermirror-based beam devices
Böni, P. (1997) · Physica B Condensed Matter · doi:10.1016/s0921-4526(96)01255-0 · Cited by 54 · see citing works
Depth-graded multilayer X-ray optics with broad angular response
Wang, Z., Cao, J., & Michette, A. G. (2000) · Optics Communications · doi:10.1016/s0030-4018(00)00576-9 · Cited by 32 · see citing works
X-ray multilayer mirrors with an extended angular range
Protopopov, V., & Kal’nov, V. A. (1998) · Optics Communications · doi:10.1016/s0030-4018(98)00498-2 · Cited by 29 · see citing works
Flagged first, then by citations
Cited by
Sorted by citations
Photoelectric Effect at Ultrahigh Intensities
Sorokin, A. A., Bobashev, S. V., Feigl, T., Tiedtke, K., Wabnitz, H., & Richter, M. (2007) · Physical Review Letters · doi:10.1103/physrevlett.99.213002 · Cited by 262 · see citing works
Self-citationExtreme ultraviolet lithography
Kazazis, D., Santaclara, J. G., van Schoot, J., Mochi, I., & Ekinci, Y. (2024) · Nature Reviews Methods Primers · doi:10.1038/s43586-024-00361-z · Cited by 149 · see citing works
- Authors
- Feigl, T., Yulin, S., Benoit, N., & Kaiser, N.
- Affiliations
- Fraunhofer Institute for Applied Optics and Precision Engineering (DE)
- Corresponding author
- Feigl, Torsten
- ORCID
- Kaiser, Norbert
- Venue
- Microelectronic Engineering
- Publisher
- Elsevier BV
- Published
- 2006-04
- Volume
- 83
- Issue
- 4-9
- Pages
- 703-706
- ISSN
- 0167-9317 (ISSN-L)
- OpenAlex
- W2029409541
- Cited by
- 61
- References
- 7
- Citations by year
- 2026: 2 · 2025: 2 · 2024: 3 · 2023: 6 · 2021: 4 · 2019: 1 · 2018: 2 · 2017: 3 · 2016: 5 · 2015: 6 · 2014: 4 · 2013: 3 · 2012: 4
- FWCI
- 2.70
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Microelectronic Engineering (publishedVersion)
- Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft) (submittedVersion)
- Fraunhofer-Publica (Fraunhofer-Gesellschaft) (submittedVersion)
- Funders
- Bundesministerium für Bildung und Forschung
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advancements in Photolithography Techniques
- Physical Sciences › Materials Science › Surfaces, Coatings and Films › Optical Coatings and Gratings
- Physical Sciences › Physics and Astronomy › Radiation › Advanced X-ray Imaging Techniques
- Keywords
- EUV lithography, magnetron sputtering
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
