Excimer-laser deinsulation of Parylene-C coated Utah electrode array tips
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Production of a defined geometric surface area (GSA) of the electrode tips was possible using either an oxygen plasma etching technique or excimer laser ablation.
“We have shown that the production of a defined geometric surface area (GSA) of the electrode tips was possible using either an oxygen plasma etching technique [1,21] or by excimer laser ablation [22].”
From A new high-density (25 electrodes/mm<sup>2</sup>) penetrating microelectrode array for recording and stimulating sub-millimeter neuroanatomical structures (2013) · cites this paper as [22]
The carbon debris layer is thinner than the parylene-C layer.
“The carbon debris layer is thinner than the parylene-C layer [22], and thus, we hypothesized that the etching of the carbon debris could be carried out in 2 min without the need of a foil mask.”
From A new high-density (25 electrodes/mm<sup>2</sup>) penetrating microelectrode array for recording and stimulating sub-millimeter neuroanatomical structures (2013) · cites this paper as [22]
Cites
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Characterization of parylene C as an encapsulation material for implanted neural prostheses
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Parylene as a Chronically Stable, Reproducible Microelectrode Insulator
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Encapsulation of an Integrated Neural Interface Device With Parylene C
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Self-citationTechnology Insight: future neuroprosthetic therapies for disorders of the nervous system
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Self-citationLaser exposure of Parylene-C insulated microelectrodes
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Wark, H. A. C., Sharma, R., Mathews, K. S., Fernandez, E., Yoo, J., Christensen, B., Tresco, P., Rieth, L., Solzbacher, F., Normann, R. A., et al. (2013) · Journal of Neural Engineering · doi:10.1088/1741-2560/10/4/045003 · Cited by 148 · see citing works
Self-citation
- Authors
- Yoo, J.-M., Sharma, A., Tathireddy, P., Rieth, L. W., Solzbacher, F., & Song, J.-I.
- Affiliations
- University of Utah (US)
- Gwangju Institute of Science and Technology (KR)
- Corresponding author
- Yoo, Je-Min
- Song, Jong-In
- Venue
- Sensors and Actuators B: Chemical
- Publisher
- Elsevier BV
- Published
- 2012-05
- Volume
- 166-167
- Pages
- 777-786
- ISSN
- 0925-4005 (ISSN-L)
- OpenAlex
- W2086003589
- Cited by
- 15
- References
- 15
- Citations by year
- 2025: 1 · 2020: 1 · 2019: 1 · 2018: 1 · 2017: 3 · 2016: 1 · 2015: 2 · 2014: 1 · 2013: 3 · 2012: 1
- FWCI
- 0.92
- Type
- journal article
- Language
- en
- Open access
- closed
- Licence
- Locations
- Sensors and Actuators B Chemical (publishedVersion)
- Funders
- Defense Advanced Research Projects Agency (N66001-06-C-4056)
- Western Carolina University (R31-2008-000-10026-0)
- Gwangju Institute of Science and Technology
- Topics
- Life Sciences › Neuroscience › Cellular and Molecular Neuroscience › Neuroscience and Neural Engineering
- Life Sciences › Neuroscience › Cognitive Neuroscience › Undergraduate Neuroscience Education and Research
- Physical Sciences › Materials Science › Polymers and Plastics › Conducting polymers and applications
- Keywords
- Utah electrode array, Parylene C coating, iridium oxide films, laser-induced damage, electrical impedance, neural recording, neurostimulation, biocompatible coatings
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