Cited by 148Neuroscience and Neural EngineeringUndergraduate Neuroscience Education and ResearchAnalog and Mixed-Signal Circuit Design

A new high-density (25 electrodes/mm2) penetrating microelectrode array for recording and stimulating sub-millimeter neuroanatomical structures

Open access
Wark, H A C, Sharma, R, Mathews, K S, Fernandez, E, Yoo, J, Christensen, B, Tresco, P, Rieth, L +3 more·2013·Journal of Neural Engineering

Abstract

OBJECTIVE: Among the currently available neural interface devices, there has been a need for a penetrating electrode array with a high electrode-count and high electrode-density (the number of electrodes/mm(2)) that can be used for electrophysiological studies of sub-millimeter neuroanatomical structures. We have developed such a penetrating microelectrode array with both a high electrode-density (25 electrodes/mm(2)) and high electrode-count (up to 96 electrodes) for small nervous system structures, based on the existing Utah Slanted Electrode Array (USEA). Such high electrode-density arrays are expected to provide greater access to nerve fibers than the conventionally spaced USEA especially in small diameter nerves. APPROACH: One concern for such high density microelectrode arrays is that they may cause a nerve crush-type injury upon implantation. We evaluated this possibility during acute (<10 h) in vivo experiments with electrode arrays implanted into small diameter peripheral nerves of anesthetized rats (sciatic nerve) and cats (pudendal nerve). MAIN RESULTS: Successful intrafascicular implantation and viable nerve function was demonstrated via microstimulation, single-unit recordings and histological analysis. Measurements of the electrode impedances and quantified electrode dimensions demonstrated fabrication quality. The results of these experiments show that such high density neural interfaces can be implanted acutely into neural tissue without causing a complete nerve crush injury, while mediating intrafascicular access to fibers in small diameter peripheral nerves. SIGNIFICANCE: This new penetrating microelectrode array has characteristics un-matched by other neural interface devices currently available for peripheral nervous system neurophysiological research.

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Written from the paper’s full text.

TL;DR

The paper reports a high-density Utah Slanted Electrode Array (HD-USEA) with 25 electrodes/mm² and up to 96 electrodes for penetrating small peripheral nerves. Acute rat sciatic and cat pudendal implants showed viable recording/stimulation and no complete nerve crush injury.

Key findings

  • HD-USEAs were fabricated at 25 electrodes/mm² with up to 96 electrodes; final wired arrays used 4 or 5 × 10 electrodes with targeted lengths of 300–800 μm and 200 μm spacing. Across ten devices, average longest and shortest electrode lengths ranged from 884 ± 39 to 310 ± 60 μm.
  • In acute rat sciatic nerve experiments, >25 of 48 wired electrodes recorded single- or multiunit activity in each preparation, with mean SNR >4. Stimulation via individual electrodes selectively evoked ankle flexion in 15 ± 6 electrodes and extension in 17 ± 8 electrodes, with selectivity at tip-to-tip separation as low as 208 μm.
  • Histology from rat sciatic nerves (n = 2) and a feline pudendal nerve (n = 1) showed no complete nerve crush injury; damage was limited to electrode tracks, with little or no compression around electrode tips or shanks. One feline pudendal electrode was broken before implantation and did not penetrate the fascicular space.
  • Tip de-insulation by oxygen plasma produced GSA of 4543 ± 526 μm² (n = 17 tips from one device), while excimer laser plus plasma produced 473 ± 365 μm² (n = 22 tips from one device; significantly lower, p = 1.06 × 10⁻²⁶). In vitro mean tip impedances were 440 ± 340 kΩ for laser-de-insulated and 179 ± 216 kΩ for plasma-de-insulated electrodes.

Methods

  • Devices were fabricated from boron-doped silicon wafers using back-side dicing, glassing, metallization, front-side dicing, wet etching, Ti/IrOx tip metallization, parylene-C coating, and tip de-insulation by oxygen plasma etching or excimer laser ablation.
  • In vitro characterization included 1 kHz, 10 mV impedance testing in saline, SEM imaging, and optical microscopy for electrode dimensions and geometric surface area.
  • In vivo validation used acute (<10 h) implants in anesthetized Sprague-Dawley rats (sciatic nerve, 350–500 g) and cats (pudendal nerve), with pneumatic insertion, 1100-channel stimulation and EMG recording, Cerebus data acquisition, and serial semithin histology.

Limitations

  • Stated: only acute (<10 h) implantation was studied; chronic damage, long-term efficacy, and biocompatibility were not assessed. Laser de-insulation was manual and less uniform, and further optimization is needed for higher-density arrays; foil-mask de-insulation still produced relatively large GSAs. Feline preparations were histology only, and lower stimulation voltages were not tested because of the stimulator’s lower limit.
  • Evident: sample sizes were small (physiology n = 3 rats; histology n = 2 rat sciatic nerves and n = 1 cat pudendal nerve), and the absence of chronic data limits conclusions about long-term safety and function.

Model-written summary. Check it against the paper before relying on it.

Integrity signals

Registry

Crossref · 10.1088/1741-2560/10/4/045003

Cites

Statistics

Nothing to recompute.

Claims the paper makes

0 of 38 cited sources checked · 0 supported · 0 flagged

  • Findingown data

    Measurements of electrode impedances and quantified electrode dimensions demonstrated fabrication quality.

    “Measurements of the electrode impedances and quantified electrode dimensions demonstrated fabrication quality.”
    Quote in the paperNot a substantial claim
  • Findingnone given

    The authors developed a penetrating electrode array with a 25 electrodes/mm2 density, called the High-Density Utah Slanted Electrode Array (HD-USEA).

    “We have recently developed a penetrating electrode array with a 25 electrodes/mm 2 density (called the High-Density Utah Slanted Electrode Array or HD-USEA).”
    Quote in the paperSubstantial claim
  • Findingcitation

    Physiological and histological evaluations showed no evidence of complete nerve trunk injury after acute (<10 h) implantation of HD-USEAs.

    “Physiological and histological evaluations showed no evidence of complete nerve trunk injury [23] after acute (<10 h) implantation of HD-USEAs.”
    Quote in the paperSubstantial claim0 of 1 sources checked
    • cites [23] Lee S K, 2000, J. Am. Acad. Orthop. Surg. source

      Not checked in the free run.

  • Findingown data

    The average lengths of the longest and shortest electrodes measured from ten HD-USEAs ranged from 884 ± 39 to 310 ± 60 μm.

    “The average lengths of the longest and shortest electrodes measured from these ten devices ranged from 884 ± 39 to 310 ± 60 μm, respectively (averages were calculated from all ten electrode rows).”
    Quote in the paperSubstantial claim
  • Findingown data

    Selective activation of flexor versus extensor muscles was achieved by delivering stimulation via two catercornered electrodes with an approximate tip-to-tip separation of 208 μm.

    “This selective activation of flexor versus extensor muscles was achieved by delivering stimulation via two catercornered electrodes with an approximate tip-to-tip separation of 208 μm.”
    Quote in the paperSubstantial claim
  • May combine two claims. 20
  • Classified as probably not a substantial claim. 12
  • The quote only partly states this claim. 1
  • May combine two claims.

    Findingnone given

    The HD-USEA grid used in these studies had graded electrode lengths ranging from 300 to 800 μm with neighboring electrodes separated by 200 μm.

    “The grid of electrodes used in these studies had graded electrode lengths ranging from 300 to 800 μm with neighboring electrodes separated by 200 μm.”
    Quote in the paperSubstantial claim
  • May combine two claims.

    Findingown data

    Successful intrafascicular implantation and viable nerve function were demonstrated via microstimulation, single-unit recordings, and histological analysis.

    “Successful intrafascicular implantation and viable nerve function was demonstrated via microstimulation, single-unit recordings and histological analysis.”
    Quote in the paperSubstantial claim
  • May combine two claims.

    Findingown data

    In all three rat preparations, there were 15 ± 6 and 17 ± 8 electrodes that selectively evoked ankle flexion and extension, respectively.

    “In all three rat preparations, there were 15 ± 6 and 17 ± 8 (mean ± sd) electrodes that selectively evoked ankle flexion and extension, respectively.”
    Quote in the paperSubstantial claim
  • May combine two claims.

    Findingown data

    In each preparation, there were neural units that fired spontaneously, and different neural units could be selectively driven by tactile or proprioceptive stimuli.

    “In each preparation, there were neural units that fired spontaneously, and different neural units that could be selectively driven by tactile or proprioceptive stimuli.”
    Quote in the paperSubstantial claim
  • May combine two claims.

    Findingown data

    Histological analysis of the implantation sites verified that multiple HD-USEA electrodes penetrated into individual fascicles (<500 μm in diameter) of both the rat sciatic and feline pudendal nerves with little or no evidence of nerve fiber compression around the electrode tips.

    “Histological analysis of the implantation sites verified that multiple HD-USEA electrodes penetrated into the individual fascicles (<500 μm in diameter) of both the rat sciatic and feline pudendal nerves with little or no evidence of nerve fiber compression around the electrode tips.”
    Quote in the paperSubstantial claim
  • Probably not a substantial claim: may not pass S3 (load-bearing). May combine two claims.

    Findingown data

    One electrode was broken prior to implantation and did not penetrate into the fascicular space.

    “One electrode was broken prior to implantation and does not penetrate into the fascicular space (track marked with an arrowhead; figure 6(a)).”
    Quote in the paperNot a substantial claim
  • Probably not a substantial claim: may not pass S3 (load-bearing).

    Findingnone given

    One wafer yields approximately 20 arrays that do not have any broken electrodes.

    “One wafer yields approximately 20 arrays that do not have any broken electrodes.”
    Quote in the paperNot a substantial claim
  • Probably not a substantial claim: may not pass S3 (load-bearing).

    Findingnone given

    Up to 96 electrodes could be wire-bonded for use in other nerve structures.

    “This number of electrodes was chosen to best fit the dimensions of the peripheral nerves tested in this work, but up to 96 electrodes could be wire-bonded for use in other nerve structures.”
    Quote in the paperNot a substantial claim
  • May combine two claims.

    Findingown data

    De-insulating HD-USEAs using a foil mask and oxygen plasma etching resulted in uniform geometric surface areas (standard deviation 526 μm2) but relatively large areas (4543 μm2).

    “De-insulating HD-USEAs using the foil mask and oxygen plasma etching resulted in uniform GSAs (small distribution with standard deviation of 526 μm 2 ), but relatively large areas (4543 μm 2 ).”
    • Also stated in: § 5. Conclusions · plain
      “The average GSA of electrode tips de-insulated with the oxygen plasma etching (figure1(b)) and laser ablation (figure1(c)) methods were 4543 ± 526 μm 2 (mean ± sd; n = 17 tips from one device) and 473 ± 365 μm 2 (n = 22 tips from one device), respectively.”
    Quote in the paperSubstantial claim
  • The quote only partly states this claim.

    Findingreasoning

    Laser ablation de-insulation produced much less uniform tip exposures (larger distribution around the mean) than plasma etching.

    “The mean GSAs obtained with the laser ablation de-insulation (473 ± 365 μm 2 ) were significantly lower (alpha = 0.05; p = 1.06 × 10 -26 ; two-tailed student t-test); however, this technique produced much less uniform tip exposures (larger distribution around the mean) likely due to the manual nature of the process.”
    Quote in the paperNot a substantial claim
  • May combine two claims.

    Findingown data

    Selective and complete recruitment of rat hind limb muscles was possible with stimulation amplitudes of only -2 V, with 50% recruitment of muscle twitches seen in some trials for pulse-widths <100 μs.

    “Selective and complete recruitment of rat hind limb muscles was possible by delivering stimulation amplitudes of only -2 V with 50% recruitment of muscle twitches seen in some trials for pulse-widths <100 μs.”
    Quote in the paperSubstantial claim
  • May combine two claims.

    Findingown data

    In all animal preparations, spontaneous and stimulus driven neuronal units were recorded on >25 electrodes with an average SNR >4.

    “We were able to record spontaneous and stimulus driven neuronal units on >25 electrodes with an average SNR >4 in all animal preparations, indicating the nerve remained viable for at least the duration of these experiments (<10 h).”
    Quote in the paperSubstantial claim
  • May combine two claims.

    Findingown data

    In rat sciatic nerve, electrode 21 recorded neural responses only during dorsiflexion, while electrode 14 recorded responses only during plantarflexion.

    “Note that electrode 21 recorded neural responses only during dorsiflexion, while electrode 14 recorded responses only during plantarflexion.”
    • Also stated in: § 5. Conclusions · plain
      “968 waveforms show the summation of the responses from two units to dorsiflexion of the foot around the ankle joint recorded by electrode 21 (SNR = 5.9).”
    • Also stated in: § 5. Conclusions · plain
      “1416 waveforms show a unit recorded on electrode 14 that was driven by plantarflexion (SNR = 10.8).”
    Quote in the paperSubstantial claim
  • May combine two claims.

    Findingown data

    The authors developed a novel, high electrode-density (25 electrodes/mm2), high electrode-count (48-96 electrodes) penetrating neural interface designed for stimulation and recording in sub-millimeter neuroanatomical structures, such as small diameter nerves (<2 mm).

    “We have developed a novel, high electrode-density (25 electrodes/mm 2 ), high electrode-count (48-96 electrodes) penetrating neural interface, designed for use in stimulation and recording in sub-millimeter neuroanatomical structures, such as small diameter nerves (<2 mm) like the rat sciatic [37], feline pudendal [38], or feline/human cochlear nerves [46].”
    Quote in the paperSubstantial claim0 of 3 sources checked
    • cites [37] source

      Not checked in the free run.

    • cites [38] source

      Not checked in the free run.

    • cites [46] Badi A N, 2002, Arch. Otolaryngol. Head Neck Surg. source

      Not checked in the free run.

  • Classified as probably not a substantial claim.

    Premisenone given

    There has been a need for a penetrating electrode array with high electrode-count and high electrode-density for electrophysiological studies of sub-millimeter neuroanatomical structures.

    “Among the currently available neural interface devices, there has been a need for a penetrating electrode array with a high electrode-count and high electrode-density (the number of electrodes/mm 2 ) that can be used for electrophysiological studies of sub-millimeter neuroanatomical structures.”
    Quote in the paperSubstantial claim
  • Probably not a substantial claim: may not pass S3 (load-bearing). May combine two claims.

    Premisecitation

    High-count microelectrode arrays have proven useful in basic physiology research and for clinical applications such as restoration of function in people with nervous system injury or stroke.

    “Highcount microelectrode arrays have proven useful in basic physiology research [8], and for clinical applications such as the restoration of function in people with nervous system injury [9] or stroke [10].”
    Quote in the paperNot a substantial claim0 of 3 sources checked
    • cites [8] source

      Not checked in the free run.

    • cites [9] Simeral J D, 2011, J. Neural Eng. source

      Not checked in the free run.

    • cites [10] source

      Not checked in the free run.

  • Probably not a substantial claim: may not pass S4 (based).

    Interpretationnone given

    Higher density microelectrode arrays would improve access to closely spaced individual or sub-populations of neurons and/or nerve fibers in order to investigate mechanisms underlying more complex spatial neural interactions.

    “Moreover, higher density microelectrode arrays would improve the access to closely spaced individual or sub-populations of neurons and/or nerve fibers in order to investigate the mechanisms underlying more complex spatial neural interactions.”
    Quote in the paperNot a substantial claim
  • Classified as probably not a substantial claim.

    Premisereasoning

    Penetrating electrode arrays with higher densities have been needed to expand neurophysiology research and to investigate future clinical applications in sub-millimeter neuroanatomical structures, such as small diameter peripheral nerves or ganglia.

    “However, penetrating electrode arrays with higher densities have been needed to expand neurophysiology research and to investigate future clinical applications in sub-millimeter neuroanatomical structures, such as small diameter peripheral nerves or ganglia (e.g. the 1 mm cat pudendal nerve).”
    Quote in the paperSubstantial claim
  • May combine two claims.

    Interpretationown data

    The architecture of the HD-USEA makes it a unique and useful addition to currently available neural interfaces because it provides unprecedented nerve fiber access in sub-millimeter structures outside the central nervous system.

    “The architecture of this device makes it a unique and useful addition to the neural interfaces currently available, as it provides unprecedented nerve fiber access in sub-millimeter structures outside the central nervous system.”
    Quote in the paperSubstantial claim
  • May combine two claims.

    Interpretationown data

    HD-USEAs are safe and effective for acute neurophysiology studies, with chronic use not yet investigated.

    “Collectively, these results show that HD-USEAs are safe and effective for acute neurophysiology studies (we have yet to investigate their use in chronic experimentation).”
    Quote in the paperSubstantial claim
  • May combine two claims.

    Interpretationown data

    The quality and reproducibility of HD-USEAs is comparable to that of the conventional arrays currently being manufactured.

    “The quality and reproducibility of HD-USEAs is comparable to that of the conventional arrays currently being manufactured.”
    Quote in the paperNot a substantial claim
  • May combine two claims.

    Interpretationreasoning

    Implantation of a 5 × 10 HD-USEA would result in more complete coverage (from 0.2 to 1.0 mm) of a 1 mm nerve and with a high-count number of electrodes (48 electrodes).

    “In contrast, implantation of a 5 × 10 HD-USEA would result in more complete coverage (from 0.2 to 1.0 mm) of the nerve and with a high-count number of electrodes (48 electrodes).”
    Quote in the paperSubstantial claim
  • May combine two claims.

    Interpretationcitation

    The electrode proportions, impedances, number of functionally distinct electrodes, and SNR of HD-USEAs are comparable to the conventionally spaced Utah electrode arrays.

    “The electrode proportions, impedances, number of functionally distinct electrodes and SNR of HD-USEAs are comparable to the conventionally spaced Utah electrode arrays [1,13].”
    Quote in the paperSubstantial claim0 of 2 sources checked
    • cites [1] source

      Not checked in the free run.

    • cites [13] Campbell P K, 1990, Biomed. Sci. Instrum.

      Not checked in the free run.

  • Probably not a substantial claim: may not pass S3 (load-bearing).

    Study design and conductnone given

    All procedures were approved by the Institutional Animal Care and Use Committee of the University of Utah.

    “All procedures were approved by the Institutional Animal Care and Use Committee of the University of Utah.”
    Quote in the paperNot a substantial claim
  • Probably not a substantial claim: may not pass S3 (load-bearing).

    Interpretationreasoning

    The less uniform tip exposures from laser ablation were likely due to the manual nature of the process.

    “however, this technique produced much less uniform tip exposures (larger distribution around the mean) likely due to the manual nature of the process.”
    Quote in the paperNot a substantial claim
  • May combine two claims.

    Premisecitation

    The conventionally spaced, lower density USEA can be implanted acutely (<1 day) and chronically (>6 months) with insult to the epineurium or perineurium limited to the areas penetrated by the microelectrodes.

    “The conventionally spaced, lower density USEA can be implanted both acutely (<1 days) [1] and chronically (>6 months) [40,41] with insult to the epineurium or perinerium limited to the areas penetrated by the microelectrodes.”
    Quote in the paperNot a substantial claim0 of 3 sources checked
    • cites [1] source

      Not checked in the free run.

    • cites [40] source

      Not checked in the free run.

    • cites [41] Torab K, 2011, J. Neural Eng. source

      Not checked in the free run.

  • Probably not a substantial claim: may not pass S3 (load-bearing).

    Study design and conductcitation

    Lower voltages were not investigated because -2 V is the lowest limit of the 1100 channel stimulator used in these studies.

    “Lower voltages were not investigated, as this is the lowest limit of the 1100 channel stimulator used in these studies [33].”
    Quote in the paperNot a substantial claim0 of 1 sources checked
    • cites [33] Hiatt S D, 2010, 15th Annu. Conf. Int. Functional Electrical Stimulation Society

      Not checked in the free run.

  • Probably not a substantial claim: may not pass S3 (load-bearing). May combine two claims.

    Study design and conductnone given

    The laser ablation technique (laser spot-size) was optimized for lower-density (6.25 electrodes/mm2) microelectrode arrays, and more work is needed to optimize parameters for higher-density neural interfaces.

    “The laser ablation technique (laser spot-size) was optimized for lower-density (6.25 electrodes/mm 2 ) microelectrodes arrays, and more work is needed to optimize the parameters for performing laser ablation on higher-density neural interfaces.”
    Quote in the paperNot a substantial claim
  • Probably not a substantial claim: may not pass S3 (load-bearing). May combine two claims.

    Premisecitation

    The plasma etching deinsulation process can be carried out on individual electrode arrays or, for microelectrode arrays with uniform electrode lengths, on the wafer scale.

    “This process can be carried out on individual electrode arrays [13] or-for microelectrode arrays that have uniform electrode lengths-on the wafer scale [24].”
    Quote in the paperNot a substantial claim0 of 2 sources checked
    • cites [13] Campbell P K, 1990, Biomed. Sci. Instrum.

      Not checked in the free run.

    • cites [24] source

      Not checked in the free run.

29 of 29
  • The paper relies on this without support.

    High-density penetrating microelectrode arrays may cause a nerve crush-type injury upon implantation.

    “One concern for such high density microelectrode arrays is that they may cause a nerve crush-type injury upon implantation.”
    “One of the main concerns regarding the use of penetrating microelectrode arrays that have such high electrode densities is that a nerve crush injury may result from their implantation.”
1 of 1

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Self-check

Percentages, sums and reported differences re-computed from the paper’s own numbers.

Each contradiction between two passages listed here was confirmed by an independent check.

  • Conclusion says implantation causes no nerve damage despite reported fiber loss

    Major

    The conclusion states that implantation does not cause nerve damage, but the figure caption reports substantial fiber loss in an electrode track. The observations support a narrower claim about the absence of complete crush injury, not the absence of damage.

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References 48 · Cited by 148

Research works printed but not linked: 3

  1. Campbell P K, 1990, Biomed. Sci. Instrum., 26, 161
  2. Cogan S F Ehrlich J Plante T D Van Wagenen R, 2009, Conf. Proc. IEEE Eng. Med. Biol. Soc., 7147
  3. Hiatt S D, 2010, 15th Annu. Conf. Int. Functional Electrical Stimulation Society, 081

Authors
Wark, H. A. C., Sharma, R., Mathews, K. S., Fernandez, E., Yoo, J., Christensen, B., Tresco, P., Rieth, L., Solzbacher, F., Normann, R. A., & Tathireddy, P.
Affiliations
University of Utah (US)
Corresponding author
Normann, R A
Venue
Journal of Neural Engineering
Published
2013-05-31
Volume
10
Issue
4
Pages
045003
ISSN
  • 1741-2552 (ISSN-L)
  • 1741-2560
OpenAlex
W2107611005
Cited by
148
References
48
Citations by year
2026: 2 · 2025: 4 · 2024: 13 · 2023: 7 · 2022: 6 · 2021: 14 · 2020: 14 · 2019: 12 · 2018: 14 · 2017: 18 · 2016: 14 · 2015: 15 · 2014: 12 · 2013: 3
FWCI
7.20
Type
journal article
Language
en
Open access
Locations
  • Journal of Neural Engineering (publishedVersion, cc-by-nc-sa)
  • PubMed (publishedVersion)
Funders
  • National Science Foundation (1134545)
  • Ministerio de Economía y Competitividad
  • Division of Chemical, Bioengineering, Environmental, and Transport Systems
Topics
  • Life Sciences › Neuroscience › Cellular and Molecular Neuroscience › Neuroscience and Neural Engineering
  • Life Sciences › Neuroscience › Cognitive Neuroscience › Undergraduate Neuroscience Education and Research
  • Physical Sciences › Engineering › Biomedical Engineering › Analog and Mixed-Signal Circuit Design
Keywords
high-density electrode arrays, peripheral nerve recording, peripheral nerve stimulation, nerve crush injury, sciatic nerve, pudendal nerve, single-unit recording, microstimulation, electrode impedance
MeSH terms
Animals, Cats, Diagnostic Techniques, Neurological, Electric Stimulation, Electrodes, Implanted, Equipment Design, Microelectrodes, Peripheral Nerves, Electric Impedance, Rats, Sprague-Dawley, Equipment Failure Analysis, Nanotechnology, Microarray Analysis, Rats

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