The DOI matches its Crossref record; 2 of the 2 references it cites were found in a registry or an index.
Applications of atomic layer deposition to nanofabrication and emerging nanodevices
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Citations
Cites
One‐Dimensional Nanostructures: Synthesis, Characterization, and Applications
Xia, Y., Yang, P., Sun, Y., Wu, Y., Mayers, B., Gates, B., Yin, Y., Kim, F., & Yan, H. (2003) · Advanced Materials · doi:10.1002/adma.200390087 · Cited by 8,559
Catalytic nanoarchitectures—The importance of nothing and the unimportance of periodicity
Rolison, D. R. (2003) · Science · doi:10.1126/science.1082332 · Cited by 1,037
Cited by
Biswas, A., Bayer, I. S., Biris, A. S., Wang, T., Dervishi, E., & Faupel, F. (2012) · Advances in Colloid and Interface Science · doi:10.1016/j.cis.2011.11.001 · Cited by 909
High-k Gate Dielectrics for Emerging Flexible and Stretchable Electronics
Wang, B., Huang, W., Chi, L., Al-Hashimi, M., Marks, T. J., & Facchetti, A. (2018) · Chemical Reviews · doi:10.1021/acs.chemrev.8b00045 · Cited by 818
Atomic Layer Deposition of Nanostructured Materials for Energy and Environmental Applications
Marichy, C., Bechelany, M., & Pinna, N. (2012) · Advanced Materials · doi:10.1002/adma.201104129 · Cited by 591
Emerging Applications of Atomic Layer Deposition for Lithium‐Ion Battery Studies
Meng, X., Yang, X., & Sun, X. (2012) · Advanced Materials · doi:10.1002/adma.201200397 · Cited by 573
Semiconductor Gas Sensors: Dry Synthesis and Application
Tricoli, A., Righettoni, M., & Teleki, A. (2010) · Angewandte Chemie International Edition · doi:10.1002/anie.200903801 · Cited by 543
Metadata
- Authors
- Kim, H., Lee, H.-B.-R., & Maeng, W.-J.
- Venue
- Thin Solid Films
- Publisher
- Elsevier BV
- Published
- 2009-02
- Volume
- 517
- Issue
- 8
- Pages
- 2563-2580
- ISSN
- 0040-6090 (ISSN-L)
- OpenAlex
- W2120491593
- Cited by
- 595
- References
- 2
- FWCI
- 26.30
- Type
- journal article
- Language
- en
- Open access
- closed
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Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
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- CoChat. (2026). Citation check: Applications of atomic layer deposition to nanofabrication and emerging nanodevices. https://app.cochat.ai/papers/10.1016/j.tsf.2008.09.007
- The paper
- Kim, H., Lee, H.-B.-R., & Maeng, W.-J. (2009). Applications of atomic layer deposition to nanofabrication and emerging nanodevices. Thin Solid Films. https://doi.org/10.1016/j.tsf.2008.09.007
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
