High-Performance SiO2-SiNx Distributed Bragg Reflectors Fabricated by Ion-Assisted Reactive Magnetron Sputtering

Handbook of Optical Constants of Solids

(1985) · Elsevier eBooks · doi:10.1016/c2009-0-20920-2 · Cited by 21,162 · see citing works

New CMOS-compatible platforms based on silicon nitride and Hydex for nonlinear optics

Moss, D. J., Morandotti, R., Gaeta, A. L., & Lipson, M. (2013) · Nature Photonics · doi:10.1038/nphoton.2013.183 · Cited by 1,792 · see citing works

Reliable determination of chemical state in x-ray photoelectron spectroscopy based on sample-work-function referencing to adventitious carbon: Resolving the myth of apparent constant binding energy of the C 1s peak

Greczyński, G., & Hultman, L. (2018) · Applied Surface Science · doi:10.1016/j.apsusc.2018.04.226 · Cited by 1,437 · see citing works

Compromising Science by Ignorant Instrument Calibration—Need to Revisit Half a Century of Published XPS Data

Greczyński, G., & Hultman, L. (2020) · Angewandte Chemie International Edition · doi:10.1002/anie.201916000 · Cited by 691 · see citing works

The same chemical state of carbon gives rise to two peaks in X-ray photoelectron spectroscopy

Greczyński, G., & Hultman, L. (2021) · Scientific Reports · doi:10.1038/s41598-021-90780-9 · Cited by 669 · see citing works

Magnetron sputtering of transparent conductive zinc oxide: relation between the sputtering parameters and the electronic properties

Ellmer, K. (2000) · Journal of Physics D Applied Physics · doi:10.1088/0022-3727/33/4/201 · Cited by 607 · see citing works

Thin-films field-transfer matrix theory of planar multilayer waveguides and reflection from prism-loaded waveguides

Chilwell, J., & Hodgkinson, I. J. (1984) · Journal of the Optical Society of America A · doi:10.1364/josaa.1.000742 · Cited by 410 · see citing works

Band gap engineering of amorphous silicon quantum dots for light-emitting diodes

Park, N., Kim, T.-S., & Park, S.-J. (2001) · Applied Physics Letters · doi:10.1063/1.1367277 · Cited by 390 · see citing works

Raman spectroscopy of amorphous and microcrystalline silicon films deposited by low-pressure chemical vapor deposition

Voutsas, A. T., Hatalis, M. K., Boyce, J. B., & Chiang, A. (1995) · Journal of Applied Physics · doi:10.1063/1.360468 · Cited by 231 · see citing works

Spray Synthesis of Photonic Crystal Based Automotive Coatings with Bright and Angular‐Dependent Structural Colors

Wang, C., Lin, X., Schäfer, C. G., Hirsemann, S., & Ge, J. (2020) · Advanced Functional Materials · doi:10.1002/adfm.202008601 · Cited by 181 · see citing works

Molecular simulation of the plastic deformation and crack formation in single grit grinding of 4H-SiC single crystal

Gao, S., Wang, H., Han Huang, A., & Kang, R. (2023) · International Journal of Mechanical Sciences · doi:10.1016/j.ijmecsci.2023.108147 · Cited by 166 · see citing works

Review Paper: Residual Stresses in Deposited Thin-Film Material Layers for Micro- and Nano-Systems Manufacturing

Huff, M. A. (2022) · Micromachines · doi:10.3390/mi13122084 · Cited by 159 · see citing works

Optical properties of HfO2 thin films deposited by magnetron sputtering: From the visible to the far-infrared

Bright, T. J., Watjen, J. I., Zhang, Z. M., Muratore, C., & Voevodin, A. A. (2012) · Thin Solid Films · doi:10.1016/j.tsf.2012.07.037 · Cited by 145 · see citing works

Polymer Distributed Bragg Reflectors for Vapor Sensing

Lova, P., Manfredi, G., Boarino, L., Comite, A., Laus, M., Patrini, M., Marabelli, F., Soci, C., & Comoretto, D. (2015) · ACS Photonics · doi:10.1021/ph500461w · Cited by 110 · see citing works

Approximate calculation of the reflection coefficient from a stratified medium

Sheppard, C. J. R. (1995) · Pure and Applied Optics Journal of the European Optical Society Part A · doi:10.1088/0963-9659/4/5/018 · Cited by 105 · see citing works

Distributed Bragg Reflectors for GaN-Based Vertical-Cavity Surface-Emitting Lasers

Zhang, C., ElAfandy, R. T., & Han, J. W. (2019) · Applied Sciences · doi:10.3390/app9081593 · Cited by 90 · see citing works

Raman scattering of alternating nanocrystalline silicon/amorphous silicon multilayers

Wu, X. L., Siu, G. G., Tong, S. Y., Liu, X. N., Yan, F., Jiang, S. S., Zhang, X. K., & Feng, D. (1996) · Applied Physics Letters · doi:10.1063/1.117774 · Cited by 84 · see citing works

Increasing the laser-induced damage threshold of single-crystal ZnGeP_2

Zawilski, K. T., Setzler, S. D., Schunemann, P. G., & Pollak, T. M. (2006) · Journal of the Optical Society of America B · doi:10.1364/josab.23.002310 · Cited by 83 · see citing works

Micro-Raman spectroscopy measurement of stress in silicon

Wu, X., Yu, J., Ren, T., & Liu, L. (2006) · Microelectronics Journal · doi:10.1016/j.mejo.2006.09.007 · Cited by 78 · see citing works

Effect of thickness on the structure, morphology and optical properties of sputter deposited Nb 2 O 5 films

Lai, F., Lin, L., Huang, Z., Gai, R., & Qu, Y. (2006) · Applied Surface Science · doi:10.1016/j.apsusc.2006.03.014 · Cited by 76 · see citing works

On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR

Sakai, T., Kushimoto, M., Zhang, Z., Sugiyama, N., SCHOWALTER, L. J., Honda, Y., Sasaoka, C., & Amano, H. (2020) · Applied Physics Letters · doi:10.1063/1.5145017 · Cited by 70 · see citing works

Enhanced Photon Collection in Luminescent Solar Concentrators with Distributed Bragg Reflectors

Xu, L., Yao, Y., Bronstein, N. D., Li, L., Alivisatos, A. P., & Nuzzo, R. G. (2016) · ACS Photonics · doi:10.1021/acsphotonics.5b00630 · Cited by 66 · see citing works

Design and fabrication of UV band-pass filters based on SiO2/Si3N4 dielectric distributed bragg reflectors

Dai, J., Gao, W., Liu, B., Cao, X., Tao, T., Xie, Z., Zhao, H. W., Chen, D., Han, P., & Zhang, R. (2015) · Applied Surface Science · doi:10.1016/j.apsusc.2015.12.222 · Cited by 52 · see citing works

Reactive HiPIMS Deposition of SiO2/Ta2O5 Optical Interference Filters

Hála, M., Vernhes, R., Zabeida, O., Klemberg-Sapieha, J.-E., & Martinu, L. (2014) · Journal of Applied Physics · doi:10.1063/1.4903285 · Cited by 51 · see citing works

Design, fabrication and characterization of a distributed Bragg reflector for reducing the étendue of a wavelength converting system

Gao, B., George, J. P., Beeckman, J., & Neyts, K. (2020) · Optics Express · doi:10.1364/oe.391080 · Cited by 51 · see citing works

Fabrication and characterization of TiO2/SiO2 based Bragg reflectors for light trapping applications

Dubey, R. S., & Ganesan, V. (2017) · Results in Physics · doi:10.1016/j.rinp.2017.06.041 · Cited by 42 · see citing works

Design and Modeling of High-Performance DBR-Based Resonant-Cavity-Enhanced GeSn Photodetector for Fiber-Optic Telecommunication Networks

Ghosh, S., Kumar, H., Mukhopadhyay, B., & Chang, G. (2021) · IEEE Sensors Journal · doi:10.1109/jsen.2021.3054475 · Cited by 35 · see citing works

Optical thin films for waveguide applications

Mir, J. M., & Agostinelli, J. A. (1994) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/1.579334 · Cited by 34 · see citing works

Influence of surface roughness on laser-induced damage of Nd:YAG transparent ceramics

Fu, Y., Li, J., Liu, Y., Liu, L., Zhao, H., & Pan, Y. (2015) · Ceramics International · doi:10.1016/j.ceramint.2015.06.036 · Cited by 34 · see citing works

SiO2/TiO2 distributed Bragg reflector near 1.5 <i>μ</i>m fabricated by e-beam evaporation

Feng, I.-W., Jin, S., Li, J., Lin, J., & Jiang, H. (2013) · Journal of Vacuum Science &amp; Technology A: Vacuum, Surfaces, and Films · doi:10.1116/1.4823705 · Cited by 29 · see citing works

Broadband solar distributed Bragg reflector design using numerical optimization

Kim, H., Kaya, M., & Hajimirza, S. (2021) · Solar Energy · doi:10.1016/j.solener.2021.04.045 · Cited by 28 · see citing works

Distributed Bragg Reflectors Employed in Sensors and Filters Based on Cavity-Mode Spectral-Domain Resonances

Gryga, M., Ciprián, D., & Hlubina, P. (2022) · Sensors · doi:10.3390/s22103627 · Cited by 26 · see citing works

Enhanced ultraviolet GaN photo-detector response on Si(111) via engineered oxide buffers with embedded Y2O3/Si distributed Bragg reflectors

Szyszka, A., Lupina, L., Łupina, G., Mazur, M., Schubert, M. A., Storck, P., Thapa, S. B., & Schroeder, T. A. (2014) · Applied Physics Letters · doi:10.1063/1.4861000 · Cited by 24 · see citing works

Optical, structural, and mechanical properties of silicon oxynitride films prepared by pulsed magnetron sputtering

Tang, C.-J., Jaing, C., Tien, C., Sun, W.-C., & Lin, S.-C. (2016) · Applied Optics · doi:10.1364/ao.56.00c168 · Cited by 24 · see citing works

Fabrication and Characterization of Low-Threshold Single Fundamental Mode VCSELs With Dielectric DBR Mirror

Qiu, P., Wu, B., Fu, P., Li, M., Xie, Y., & Kan, Q. (2021) · IEEE photonics journal · doi:10.1109/jphot.2021.3089710 · Cited by 23 · see citing works

Ultra-thin distributed Bragg reflectors via stacked single-crystal silicon nanomembranes

Cho, M., Seo, J., Lee, J., Zhao, D., Mi, H., Yin, X., Kim, M., Wang, X., Zhou, W., & Ma, Z. (2015) · Applied Physics Letters · doi:10.1063/1.4921055 · Cited by 22 · see citing works

Enhanced performance of GaN-based visible flip-chip mini-LEDs with highly reflective full-angle distributed Bragg reflectors

Shi, L., Zhao, X., Du, P. D., Liu, Y., Lv, Q., & Zhou, S. (2021) · Optics Express · doi:10.1364/oe.446122 · Cited by 22 · see citing works

BAW Resonator with an Optimized SiO2/Ta2O5 Reflector for 5G Applications

Lv, L., Shuai, Y., Huang, S., Zhu, D., Wang, Y., Luo, W., Wu, C., & Zhang, W. (2022) · ACS Omega · doi:10.1021/acsomega.2c01749 · Cited by 21 · see citing works

Reflection of Blue Light Using Bi-Layer Al2O3–TiO2 E-Beam Coating Films

Liu, J., Lin, C., Tzou, W., Hsueh, N.-K., Yang, C., & Chen, Y. (2018) · Crystal Growth & Design · doi:10.1021/acs.cgd.8b00805 · Cited by 19 · see citing works

Investigation of solar cell performance using multilayer thin film structure (SiO2/Si3N4) and grating

Dubey, R. S., Jhansirani, K., & Singh, S. K. (2016) · Results in Physics · doi:10.1016/j.rinp.2016.11.065 · Cited by 17 · see citing works

A comparison of structures and properties of SiNx and SiOx films prepared by PECVD

Xu, X., Zhang, L., Huang, L., He, Q., Fan, T., Yang, Z. J., Jiang, Y., & Li, Z. (2011) · Journal of Non-Crystalline Solids · doi:10.1016/j.jnoncrysol.2011.08.029 · Cited by 16 · see citing works

Silicon carbonitride thin films deposited by reactive high power impulse magnetron sputtering

Hänninen, T., Schmidt, S., Ivanov, I. G., Jensen, J. A. D., Hultman, L., & Högberg, H. (2017) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2017.12.037 · Cited by 16 · see citing works

All-nitride AlxGa1−xN:Mn/GaN distributed Bragg reflectors for the near-infrared

Capuzzo, G., Kysylychyn, D., Adhikari, R., Li, T., Faina, B., Martín-Luengo, A. T., & Bonanni, A. (2017) · Scientific Reports · doi:10.1038/srep42697 · Cited by 15 · see citing works

Vertical sidewall of silicon nitride mask and smooth surface of etched-silicon simultaneously obtained using CHF3/O2 inductively coupled plasma

Sun, J., Chen, Z., Zhou, S., Sun, Y., Liu, Z., Chen, C., Liu, Y., Sun, Y., Wang, M., Xie, S., et al. (2022) · Vacuum · doi:10.1016/j.vacuum.2022.111650 · Cited by 15 · see citing works

Effect of sintering temperature on hardness gradient of Si3N4 ceramics fabricated by spark plasma sintering

Li, P., Wang, T., Guo, R., Huang, Q., & Wang, X. (2023) · Vacuum · doi:10.1016/j.vacuum.2023.112479 · Cited by 15 · see citing works

Effects of C content on the microstructure, mechanical and tribological properties of TiAlSiCN coatings

Huang, B., Chen, L., Liang, D., Chen, Q., Zhang, E., & Zhou, Q. (2023) · Vacuum · doi:10.1016/j.vacuum.2023.112488 · Cited by 13 · see citing works

High Reflectance Dielectric Distributed Bragg Reflectors for near Ultra-Violet Planar Microcavities: SiO2/HfO2 versus SiO2/SiNx

Réveret, F., Bignet, L., Zhigang, W., Lafosse, X., Patriarche, G., Disseix, P., Médard, F., Mihailovic, M., Leymarie, J., Zúñiga-Pérez, J., et al. (2016) · Journal of Applied Physics · doi:10.1063/1.4961658 · Cited by 12 · see citing works

Cavity designs for nitride VCSELs with dielectric DBRs operating efficiently at different temperatures

Sarzała, R. P., Śpiewak, P., Nakwaski, W., & Wasiak, M. (2020) · Optics & Laser Technology · doi:10.1016/j.optlastec.2020.106482 · Cited by 12 · see citing works

Comparisons of Theoretical and Experimental Results of Blue Light SiO2–Nb2O5 Distributed Bragg Reflector Fabricated Using E-Beam Deposition

Yuan, Z.-S., Jhang, J.-M., Yu, P.-H., Jiang, C.-M., Huang, Y.-C., Wu, Y.-L., Lin, J.-J., & Yang, C.-F. (2020) · Vacuum · doi:10.1016/j.vacuum.2020.109782 · Cited by 12 · see citing works

Heat dissipation effect on modulation bandwidth of high-speed 850-nm VCSELs

Guo, X., Dong, J., He, X., Hu, S., He, Y., Lv, B., & Li, C. (2017) · Journal of Applied Physics · doi:10.1063/1.4979532 · Cited by 10 · see citing works

Effect of ion assistance on silicon nitride films deposited by reactive magnetron sputtering

You, D., Liu, W., Jiang, Y., Cao, Y., Guo, W., & Tan, M. (2023) · Materials Science in Semiconductor Processing · doi:10.1016/j.mssp.2023.107312 · Cited by 10 · see citing works

Improving the adhesion of diamond-like carbon films on glass substrate by chemical etching and oxygen plasma treatment

Zhou, Y., Liu, Y., Song, H., Li, J., Shu, Y., He, J., Jiang, H. F., & Xiong, C. (2023) · Vacuum · doi:10.1016/j.vacuum.2023.112629 · Cited by 10 · see citing works

Design and preparation of high-transmittance broadband antireflection coatings with tailored refractive indices deposited by PECVD

Hang, L., Liu, W., Zhang, X., Zhou, S., Xu, J., & Li, C. (2022) · Vacuum · doi:10.1016/j.vacuum.2022.111714 · Cited by 9 · see citing works

Widely tunable refractive index silicon nitride films deposited by ion-assisted pulsed DC reactive magnetron sputtering

You, D., Jiang, Y., Zhao, Y., Guo, W., & Tan, M. (2022) · Optical Materials · doi:10.1016/j.optmat.2022.113354 · Cited by 9 · see citing works

Strategically constructed high-reflectivity multiple-stack distributed Bragg reflectors for efficient GaN-based flip-chip mini-LEDs

Shi, L., Sun, Y., Cui, Y., Du, P. D., Zhuang, J., & Zhou, S. (2023) · Journal of Physics D Applied Physics · doi:10.1088/1361-6463/acc7b3 · Cited by 9 · see citing works

A High-Performance SiO2/SiN x 1-D Photonic Crystal UV Filter Used for Solar-Blind Photodetectors

Yuan, R., You, H., Cai, Q. K., Dong, K., Tao, T., Liu, B., Chen, D., Zhang, R., & Zheng, Y. (2019) · IEEE photonics journal · doi:10.1109/jphot.2019.2931374 · Cited by 5 · see citing works

Fabrication and Characterizations of Porous AlGaN Distributed Bragg Reflectors with Excellent Thermal Stability at High Temperature

Bao, Y., Lu, W., Wang, M., Liu, C., Han, D., Bi, Z., Li, J., Huang, K. F., Kang, J., Kamiyama, S., et al. (2025) · ACS Applied Electronic Materials · doi:10.1021/acsaelm.5c00524 · Cited by 5 · see citing works

Room-temperature reactive sputtering of SiO 2 films for high-transmittance linear variable optical filters

Hu, E.-T., Yu, F., Liu, J., Li, Y., Lin, P., Zhang, Q., Yu, K., Cai, Q.-Y., & Wei, W. (2025) · Optics Express · doi:10.1364/oe.569379 · Cited by 4 · see citing works

Development of hydrophilic multilayer structures for energy saving window applications using sol-gel spin coating

Yepuri, V., & Ramachandramurthy, P. (2024) · Results in Optics · doi:10.1016/j.rio.2024.100749 · Cited by 4 · see citing works

Annealing-induced defects and optical degradation in sputter-deposited silicon nitride: Implications for photonic applications

You, D., Jiang, Y., Li, W. L., Zhao, Y., Wan, L., & Tan, M. (2024) · Ceramics International · doi:10.1016/j.ceramint.2024.03.357 · Cited by 4 · see citing works

Lithium Niobate on Insulator: An Emerging Nanophotonic Crystal for Optimized Light Control

Murali, M., Banerjee, A., & Basu, T. (2024) · Beilstein Journal of Nanotechnology · doi:10.3762/bjnano.15.114 · Cited by 3 · see citing works

Optimization of LPCVD Deposition Conditions of Silicon-Rich Silicon Nitride to Obtain Suitable Optical Properties for Photoluminescent Coating

González, F. U., Leyva, K. M., Moreno, M., Morales-Sánchez, A., Muñoz-Zurita, A., López, J. A. L., López, J. C., de la Luz, J. Á. D. H., & Valdez, A. S. L. S. (2024) · Coatings · doi:10.3390/coatings14111383 · Cited by 3 · see citing works

Nd-doped SiO2/TiO2 Bragg reflectors produced by sol-gel dip-coating deposition

Latreche, F., Bensaha, R., Daldosso, N., Romeo, A., & Enrichi, F. (2025) · Journal of Sol-Gel Science and Technology · doi:10.1007/s10971-025-06891-6 · Cited by 2 · see citing works

Optical properties of low-pressure DC Ar plasma torch with N2–SiH4–B2H6 gas mixture injection for Si–B–N thin film deposition

Ma, Y., Chen, Y., Gao, J. K., Yan, S. Q., Wu, Y., Ren, B. H., & Zhu, X. (2024) · Vacuum · doi:10.1016/j.vacuum.2024.113283 · Cited by 2 · see citing works

Metal Oxide Thin Films for Advanced Photonic Applications

Stîngescu, M.-L., Șopronyi, M.-A., Antohe, Ș., & Scărișoreanu, N.-D. (2026) · Crystals · doi:10.3390/cryst16030164 · Cited by 2 · see citing works

Enhancing color purity and efficiency of blue TADF OLEDs with MoO 3 /Al 2 O 3 -based distributed Bragg reflector structures

Song, J., Bi, J. C., Kang, K.-C., Kil, J., Kwon, J.-H., Hwang, S., Lee, J.-S., Lim, H., & Ju, B. (2025) · Optics Express · doi:10.1364/oe.574723 · Cited by 1 · see citing works

Scratch-resistant Ti-doped SiNx film with wavelength conversion characteristics for blue light blocking

Jiang, Y., You, D., Li, W., Zhao, Y., Guo, W., & Tan, M. (2024) · Journal of Alloys and Compounds · doi:10.1016/j.jallcom.2024.177969 · Cited by 1 · see citing works

Magnetron–sputtered Bragg cavities across fiber and planar platforms

Wang, S., Wang, L., Li, Q., Sun, X., Ning, Y., Yin, X., Zhang, B., Luo, Y., Chen, W., Zeng, X., et al. (2026) · Optics Express · doi:10.1364/oe.605340

Compositional tailoring of amorphous silicon nitride films to enhance corrosion resistance, corrosion-assisted wear resistance, and bioactivity of titanium implants

Wang, J., Wang, L., Xu, Y., Tian, H., Yuan, F., Tao, X., Tang, C., & Chen, J. (2026) · Surface and Coatings Technology · doi:10.1016/j.surfcoat.2026.133909

High-Speed AlGaInP Micro-Resonant-Cavity LED Arrays Enabled by Materials and Structural EngineeringPreprint

Chiang, W.-H., Yang, P.-A., Chen, J.-W., Lee, Y.-H., Chen, J.-S., Singh, A. K., Liu, P., & Wuu, D. (2026) · SSRN Electronic Journal · doi:10.2139/ssrn.7478482

碳化硅基底表面改性对全介质膜系反射性能的影响

Tao, 罗. L., Kun, 董. D., Le, J., Wenjun, 许. X., Yingying, 戴. D., Ma, Y., Yuqi, 王. W., Weilong, 林. L., Gen, 林. L., & Wei, 周. Z. (2026) · Acta Optica Sinica · doi:10.3788/aos251974

van der Waals Distributed Bragg Reflectors with Submicron Thickness for Enhanced WSe2 Photodetector Performance

Wang, S., Jiang, N., Lai, Z., Ren, J., Shen, X., Zhang, D., Gong, J., Cai, P., Gan, Y., Liu, G., et al. (2026) · ACS Photonics · doi:10.1021/acsphotonics.6c01447

Ultra-thin distributed Bragg reflectors via stacked single-crystal silicon nanomembranes

Cho, M., Seo, J., Lee, J., Zhao, D., Mi, H., Yin, X., Kim, M., Wang, X., Zhou, W., & Ma, Z. (2015) · Applied Physics Letters · doi:10.1063/1.4921055 · Cited by 22 · see citing works

Infrared distributed Bragg reflectors based on amorphous SiC/SiO2 heterostructures

Convertino, A., Valentini, A., Giugno, P. V., & Cingolani, R. (1997) · Applied Physics Letters · doi:10.1063/1.119063 · Cited by 11 · see citing works

Sputtering AlN/InxAl1−xN distributed Bragg reflector across the full visible range on Si and SiO2 substrates

Long, L., Li, T., Hu, Z., Song, W., Zhang, L., & Wang, L. (2020) · Optics Letters · doi:10.1364/ol.413264

Amorphous Si/SiO2 distributed Bragg reflectors with transfer printed single-crystalline Si nanomembranes

Cho, M., Seo, J., Zhao, D., Lee, J., Xiong, K., Yin, X., Liu, Y., Liu, S.-C., Kim, M., Kim, T. J., et al. (2016) · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · doi:10.1116/1.4945998 · Cited by 15 · see citing works

High-reflection Si/SiO2 Bragg reflector via membrane transfer printing

Cho, M., Seo, J., Lee, J., Zhao, D., Zhou, W., & Ma, Z. (2015) · IEEE/LEOS Summer Topical Meetings · doi:10.1109/phosst.2015.7248261