The DOI matches its Crossref record; 19 of the 19 references it cites were found in a registry or an index.
Molecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Ethylene Glycol
Abstract
Polymeric films can be grown by a sequential, self-limiting surface chemistry process known as molecular layer deposition (MLD). The MLD reactants are typically bifunctional monomers for stepwise condensation polymerization and can yield completely organic films. The MLD of organic–inorganic hybrid polymers can also be accomplished using a bifunctional organic monomer and a multifunctional inorganic monomer. In this work, the growth of a poly(aluminum ethylene glycol) polymer is demonstrated using the sequential exposures of trimethylaluminum (TMA) and ethylene glycol (EG). These hybrid polymers, known as alucones, were grown over a wide range of temperatures from 85 to 175 °C. In situ quartz crystal microbalance and ex situ X-ray reflectivity experiments confirmed linear growth of the alucone film versus number of TMA/EG reaction cycles at all temperatures. The alucone growth rates decreased at higher temperatures. Growth rates varied from 4.0 Å per cycle at 85 °C to 0.4 Å per cycle at 175 °C. In situ Fourier transform infrared spectroscopy was used to monitor the surface reactions during alucone MLD. Ex situ FTIR spectroscopy, X-ray photoelectron spectroscopy, and X-ray reflectivity measurements were also employed to determine the chemical composition, thickness, and density of the alucone films. These ex situ studies revealed that the alucone films grown on Al 2 O 3 ALD surfaces evolved under ambient conditions before reaching a stable state. Alucone films capped with rapid SiO 2 ALD displayed much more stability than alucone films grown on Al 2 O 3 ALD surfaces. These results indicated that H 2 O may facilitate the chemical transformation of the alucone MLD films. The alucone films represent a new class of organic–inorganic hybrid polymers. Modification of this basic alucone MLD chemistry with use of other diols or other bifunctional monomers can produce different alucone polymers with variable properties.
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Cites
Introduction to Infrared and Raman Spectroscopy
(1975) · Elsevier eBooks · doi:10.1016/b978-0-12-182552-2.x5001-3 · Cited by 5,474
Infrared characteristic group frequencies
Goldstein, M. (1981) · Endeavour · doi:10.1016/0160-9327(81)90159-9 · Cited by 2,628
High Resolution XPS of Organic Polymers: The Scienta ESCA300 Database
Beamson, G., & Briggs, D. P. (1992) · Medical Entomology and Zoology · Cited by 2,012
Low-Temperature Al2O3 Atomic Layer Deposition
Groner, M. D., Fabreguette, F. H., Elam, J. W., & George, S. M. (2004) · Chemistry of Materials · doi:10.1021/cm0304546 · Cited by 1,403
Self-citationHigh resolution XPS of organic polymers: the scienta ESCA300 database
Pireaux, J. J. (1993) · Journal of Electron Spectroscopy and Related Phenomena · doi:10.1016/0368-2048(93)85006-7 · Cited by 851
Surface Analysis of Polymers by XPS and Static SIMS
Briggs, D. (1998) · Cambridge University Press eBooks · doi:10.1017/cbo9780511525261 · Cited by 772
Surface Chemistry for Atomic Layer Growth
George, S. M., Ott, A. W., & Klaus, J. W. (1996) · The Journal of Physical Chemistry · doi:10.1021/jp9536763 · Cited by 680
Self-citationElam, J. W., Groner, M. D., & George, S. M. (2002) · Review of Scientific Instruments · doi:10.1063/1.1490410 · Cited by 570
Self-citationSurface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence
Dillon, A. C., Ott, A. W., Way, J. D., & George, S. M. (1995) · Surface Science · doi:10.1016/0039-6028(95)90033-0 · Cited by 462
Self-citationNucleation and Growth during Al2O3 Atomic Layer Deposition on Polymers
Wilson, C. A., Grubbs, R. K., & George, S. M. (2005) · Chemistry of Materials · doi:10.1021/cm050704d · Cited by 423
Self-citationAtomic layer deposition of ultrathin and conformal Al2O3 films on BN particles
Ferguson, J. D., Weimer, A. W., & George, S. M. (2000) · Thin Solid Films · doi:10.1016/s0040-6090(00)00973-1 · Cited by 207
Self-citationFisher, G. L., Walker, A. V., Hooper, A. E., Tighe, T. B., Bahnck, K. B., Skriba, H. T., Reinard, M. D., Haynie, B. C., Opila, R. L., Winograd, N., et al. (2002) · Journal of the American Chemical Society · doi:10.1021/ja0123453 · Cited by 200
Atomic Layer Deposition of Al2O3 Films on Polyethylene Particles
Ferguson, J. D., Weimer, A. W., & George, S. M. (2004) · Chemistry of Materials · doi:10.1021/cm040008y · Cited by 195
Self-citationMolecular Layer Deposition of Nylon 66 Films Examined Using in Situ FTIR Spectroscopy
Du, Y., & George, S. M. (2007) · The Journal of Physical Chemistry C · doi:10.1021/jp067041n · Cited by 173
Self-citationAdamczyk, N. M., Dameron, A. A., & George, S. M. (2008) · Langmuir · doi:10.1021/la7025279 · Cited by 173
Self-citationRotary reactor for atomic layer deposition on large quantities of nanoparticles
McCormick, J. A., Cloutier, B. L., Weimer, A. W., & George, S. M. (2007) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/1.2393299 · Cited by 152
Self-citationAnalysis of Al2O3 Atomic Layer Deposition on ZrO2 Nanoparticles in a Rotary Reactor
McCormick, J. A., Rice, K. P., Paul, D. F., Weimer, A. W., & George, S. M. (2007) · Chemical Vapor Deposition · doi:10.1002/cvde.200606563 · Cited by 70
Self-citationPhonons of clean and metal-modified oxide films: an infrared and HREELS study
Frank, M. M., Wolter, K., Magg, N., Heemeier, M., Kühnemuth, R., Bäumer, M., & Freund, H. (2001) · Surface Science · doi:10.1016/s0039-6028(01)01475-3 · Cited by 51
Group 13 alkyl compounds incorporating aliphatic and aromatic diolate ligands
Ziemkowska, W. (2005) · Coordination Chemistry Reviews · doi:10.1016/j.ccr.2005.02.022 · Cited by 16
Cited by
Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic−Inorganic Polymers
George, S. M., Yoon, B., & Dameron, A. A. (2009) · Accounts of Chemical Research · doi:10.1021/ar800105q · Cited by 377
Self-citationJung, Y. S., Cavanagh, A. S., Dillon, A. C., Groner, M. D., George, S. M., & Lee, S.-H. (2010) · Journal of The Electrochemical Society · doi:10.1149/1.3258274 · Cited by 361
Self-citationLiu, J., Yoon, B., Kuhlmann, E., Tian, M., Zhu, J., George, S. M., Lee, Y.-C., & Yang, R. (2013) · Nano Letters · doi:10.1021/nl403244s · Cited by 105
Self-citation
Metadata
- Authors
- Dameron, A. A., Seghete, D., Burton, B. B., Davidson, S. D., Cavanagh, A. S., Bertrand, J. A., & George, S. M.
- Venue
- Chemistry of Materials
- Publisher
- American Chemical Society (ACS)
- Published
- 2008-04-29
- Volume
- 20
- Issue
- 10
- Pages
- 3315-3326
- ISSN
- 0897-4756 (ISSN-L)
- 1520-5002
- OpenAlex
- W2008365303
- Cited by
- 342
- References
- 19
- FWCI
- 13.15
- Type
- journal article
- Language
- en
- Open access
- closed
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