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An Ultraviolet-Curable Mold for Sub-100-nm Lithography
Abstract
We describe a novel UV-curable mold that is stiff enough for replicating dense sub-100-nm features even with a high aspect ratio. It also allows for flexibility when the mold is prepared on a flexible support such that large area replication can be accomplished. The composite material of the mold is inert to chemicals and solvents. The surface energy is made low with a small amount of releasing agent such that the mold can be removed easily and cleanly after patterning. In addition, the material allows self-replication of the mold. These unique features of the mold material should make the mold quite useful for various patterning purposes.
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Cited by
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Kang, D., Pikhitsa, P. V., Choi, Y. W., Lee, C., Shin, S. S., Piao, L., Park, B., Suh, K.-Y., Kim, T.-I., & Choi, M. (2014) · Nature · doi:10.1038/nature14002 · Cited by 1,626
Self-citationA wet-tolerant adhesive patch inspired by protuberances in suction cups of octopi
Baik, S., Kim, D. W., Park, Y., Lee, T.-J., Ho Bhang, S., & Pang, C. (2017) · Nature · doi:10.1038/nature22382 · Cited by 585
Roadmap for Optical Metasurfaces
Kuznetsov, A. I., Brongersma, M. L., Yao, J., Chen, M. K., Levy, U., Tsai, D. P., Zheludev, N. I., Faraon, A., Arbabi, A., Yu, N., et al. (2024) · ACS Photonics · doi:10.1021/acsphotonics.3c00457 · Cited by 420
Bhushan, B., & Jung, Y. C. (2008) · Journal of Physics: Condensed Matter · doi:10.1088/0953-8984/20/22/225010 · Cited by 344
Influence of Surface Topographical Cues on the Differentiation of Mesenchymal Stem Cells in Vitro
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Metadata
- Authors
- Choi, S.-J., Yoo, P. J., Baek, S. J., Kim, T. W., & Lee, H. H.
- Venue
- Journal of the American Chemical Society
- Publisher
- American Chemical Society (ACS)
- Published
- 2004-06-01
- Volume
- 126
- Issue
- 25
- Pages
- 7744-7745
- ISSN
- 0002-7863 (ISSN-L)
- 1520-5126
- OpenAlex
- W1976988389
- Cited by
- 294
- References
- 0
- FWCI
- 13.12
- Type
- journal article
- Language
- en
- Open access
- closed
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
