100 GHz silicon–organic hybrid modulator
Open accessAbstract
Electro-optic modulation at frequencies of 100 GHz and beyond is important for photonic-electronic signal processing at the highest speeds. To date, however, only a small number of devices exist that can operate up to this frequency. In this study, we demonstrate that this frequency range can be addressed by nanophotonic, silicon-based modulators. We exploit the ultrafast Pockels effect by using the silicon–organic hybrid (SOH) platform, which combines highly nonlinear organic molecules with silicon waveguides. Until now, the bandwidth of these devices was limited by the losses of the radiofrequency (RF) signal and the RC (resistor-capacitor) time constant of the silicon structure. The RF losses are overcome by using a device as short as 500 µm, and the RC time constant is decreased by using a highly conductive electron accumulation layer and an improved gate insulator. Using this method, we demonstrate for the first time an integrated silicon modulator with a 3dB bandwidth at an operating frequency beyond 100 GHz. Our results clearly indicate that the RC time constant is not a fundamental speed limitation of SOH devices at these frequencies. Our device has a voltage–length product of only V π L =11 V mm, which compares favorably with the best silicon-photonic modulators available today. Using cladding materials with stronger nonlinearities, the voltage–length product is expected to improve by more than an order of magnitude.
Integrity signals
Registry
Cites
Statistics
Claims the paper makes
Claims other papers make about this one
Each is checked against this paper’s own text: does it say what the citing paper says it does?
The most pure electro-optic modulation relies on the Pockels effect, which provides an intrinsically very high E/O BW, even exceeding 100 GHz.
“The most ‘pure’ electro-optic modulation relies on the Pockels effect, which provides an intrinsically very high E/O BW, even exceeding 100 GHz57,67–70”
From Roadmapping the next generation of silicon photonics (2024) · cites this paper as [67]
Polymer silicon-organic-hybrid (SOH) and plasmonic-organic-hybrid (POH) require poling and hermetic sealing, creating significant challenges to making stable devices.
“Polymer silicon-organic-hybrid (SOH)67,72 and plasmonic-organic-hybrid (POH)69 require poling and hermetic sealing, creating significant challenges to making stable devices.”
From Roadmapping the next generation of silicon photonics (2024) · cites this paper as [67]
Cites
Physics of Semiconductor Devices
Sze, S. M., & Ng, K. K. (2006) · doi:10.1002/0470068329 · Cited by 14,627 · see citing works
Physics of Semiconductor Devices
Colinge, J.-P., & Colinge, C. (2002) · Kluwer Academic Publishers eBooks · doi:10.1007/b117561 · Cited by 14,074 · see citing works
Optoelectronic microwave oscillator
Yao, X. S., & Maleki, L. (1996) · Journal of the Optical Society of America B · doi:10.1364/josab.13.001725 · Cited by 1,206 · see citing works
Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator
Green, W. M. J., Rooks, M. J., Sekaric, L., & Vlasov, Y. A. (2007) · Optics Express · doi:10.1364/oe.15.017106 · Cited by 742 · see citing works
Strained silicon as a new electro-optic material
Jacobsen, R. S., Andersen, K. N., Borel, P. I., Fage-Pedersen, J., Frandsen, L. H., Hansen, O., Kristensen, M., Lavrinenko, A. V., Moulin, G., Ou, H., et al. (2006) · Nature · doi:10.1038/nature04706 · Cited by 663 · see citing works
Broadband Modulation of Light by Using an Electro-Optic Polymer
Lee, M., Katz, H. E., Erben, C. M., Gill, D. M., Gopalan, P., Heber, J. D., & McGee, D. J. (2002) · Science · doi:10.1126/science.1077446 · Cited by 558 · see citing works
Demonstration of 110 GHz electro-optic polymer modulators
Chen, D., Fetterman, H. R., Chen, A., Steier, W. H., Dalton, L. R., Wang, W., & Shi, Y. (1997) · Applied Physics Letters · doi:10.1063/1.119162 · Cited by 477 · see citing works
50-Gb/s Silicon Optical Modulator
Thomson, D. J., Gardes, F. Y., Fédéli, J.-M., Zlatanovic, S., Hu, Y., Kuo, B. P.-P., Myslivets, E., Alić, N., Radic, S., Mashanovich, G. Z., et al. (2011) · IEEE Photonics Technology Letters · doi:10.1109/lpt.2011.2177081 · Cited by 413 · see citing works
40 Gbit/s silicon optical modulator for high-speed applications
Liao, L., Liu, A., Rubin, D., Basak, J., Chetrit, Y., Nguyen, H. T., Cohen, R., Izhaky, N., & Paniccia, M. J. (2007) · Electronics Letters · doi:10.1049/el:20072253 · Cited by 401 · see citing works
427 Gbit/s electro-optic modulator in silicon technology
Alloatti, L., Korn, D., Palmer, R., Hillerkuss, D., Li, J., Barklund, A. M., Dinu, R., Wieland, J., Fournier, M., Fédéli, J.-M., et al. (2011) · Optics Express · doi:10.1364/oe.19.011841 · Cited by 195 · see citing works
Self-citationUltralow drive voltage silicon traveling-wave modulator
Baehr-Jones, T. W., Ding, R., Liu, Y., Ayazi, A., Pinguet, T. J., Harris, N. C., Streshinsky, M., Lee, P.-S., Zhang, Y., Lim, A. E.-J., et al. (2012) · Optics Express · doi:10.1364/oe.20.012014 · Cited by 186 · see citing works
Silicon Organic Hybrid Technology—A Platform for Practical Nonlinear Optics
Leuthold, J., Freude, W., Brosi, J.-M., Baets, R., Dumon, P., Biaggio, I., Scimeca, M. L., Diederich, F., Frank, B., & Koos, C. G. (2009) · Proceedings of the IEEE · doi:10.1109/jproc.2009.2016849 · Cited by 166 · see citing works
Self-citationTang, Y., Peters, J. D., & Bowers, J. E. (2012) · Optics Express · doi:10.1364/oe.20.011529 · Cited by 139 · see citing works
Systematic Nanoengineering of Soft Matter Organic Electro-optic Materials
Dalton, L. R., Benight, S. J., Johnson, L. E., Knorr, D. B., Kosilkin, I. V., Eichinger, B. E., Robinson, B. H., Jen, A. K. ‐., & Overney, R. M. (2010) · Chemistry of Materials · doi:10.1021/cm102166j · Cited by 130 · see citing works
Low-Loss Silicon Strip-to-Slot Mode Converters
Palmer, R., Alloatti, L., Korn, D., Heni, W., Schindler, P. C., Bolten, J., Karl, M., Waldow, M., Wahlbrink, T., Freude, W., et al. (2013) · IEEE photonics journal · doi:10.1109/jphot.2013.2239283 · Cited by 99 · see citing works
Self-citationWitzens, J., Baehr-Jones, T., & Hochberg, M. (2010) · Optics Express · doi:10.1364/oe.18.016902 · Cited by 77 · see citing works
Flat Frequency Comb Generation With an Integrated Dual-Parallel Modulator
Gheorma, L. L., & Gopalakrishnan, G. K. (2007) · IEEE Photonics Technology Letters · doi:10.1109/lpt.2007.898766 · Cited by 69 · see citing works
Shi, Z., Luo, J., Huang, S., Polishak, B. M., Zhou, X., Liff, S. M., Younkin, T. R., Block, B. A., & Jen, A. K. ‐. (2011) · Journal of Materials Chemistry · doi:10.1039/c1jm14254b · Cited by 68 · see citing works
Environmental Stress Testing of Electro–Optic Polymer Modulators
Dinu, R., Jin, D., Yu, G., Chen, B., Huang, D., Chen, H., Barklund, A. M., Miller, E., Wei, C., & Vemagiri, J. (2009) · Journal of Lightwave Technology · doi:10.1109/jlt.2009.2014178 · Cited by 47 · see citing works
Self-citationAlloatti, L., Lauermann, M., Sürgers, C., Koos, C. G., Freude, W., & Leuthold, J. (2013) · Applied Physics Letters · doi:10.1063/1.4817255 · Cited by 30 · see citing works
Self-citationPalmer, R., Elder, D. L., Lepage, G., Dalton, L. R., Korn, D., Campenhout, J. V., Leuthold, J., Alloatti, L., Verheyen, P., Yu, H., et al. (2013) · European Conference on Optical Communication · doi:10.1049/cp.2013.1443 · Cited by 15 · see citing works
Self-citation
Flagged first, then by citations
Cited by
Sorted by citations
Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages
Wang, C., Zhang, M., Chen, X., Bertrand, M., Shams-Ansari, A., Chandrasekhar, S., Winzer, P., & Lončar, M. (2018) · Nature · doi:10.1038/s41586-018-0551-y · Cited by 2,593 · see citing works
He, M., Xu, M., Ren, Y., Jian, J., Ruan, Z., Xu, Y., Gao, S., Sun, S., Wen, X., Zhou, L., et al. (2019) · Nature Photonics · doi:10.1038/s41566-019-0378-6 · Cited by 1,204 · see citing works
Roadmapping the next generation of silicon photonics
Shekhar, S., Bogaerts, W., Chrostowski, L., Bowers, J. E., Hochberg, M., Soref, R., & Shastri, B. J. (2024) · Nature Communications · doi:10.1038/s41467-024-44750-0 · Cited by 878 · see citing works
Nanoplasmonic waveguides: towards applications in integrated nanophotonic circuits
Fang, Y., & Sun, M. (2015) · Light Science & Applications · doi:10.1038/lsa.2015.67 · Cited by 640 · see citing works
Rahim, A., Hermans, A., Wohlfeil, B., Petousi, D., Kuyken, B., Van Thourhout, D., & Baets, R. G. (2021) · Advanced Photonics · doi:10.1117/1.ap.3.2.024003 · Cited by 391 · see citing works
Parriaux, A., Hammani, K., & Millot, G. (2020) · Advances in Optics and Photonics · doi:10.1364/aop.382052 · Cited by 389 · see citing works
Epsilon-near-zero Al-doped ZnO for ultrafast switching at telecom wavelengths
Kinsey, N., DeVault, C., Kim, J. L., Ferrera, M., Shalaev, V. M., & Boltasseva, A. E. (2015) · Optica · doi:10.1364/optica.2.000616 · Cited by 380 · see citing works
Electro-optic modulation in integrated photonics
Sinatkas, G., Christopoulos, T., Tsilipakos, O., & Kriezis, E. E. (2021) · Journal of Applied Physics · doi:10.1063/5.0048712 · Cited by 282 · see citing works
Recent advances in silicon-based passive and active optical interconnects
Subbaraman, H., Xu, X., Hosseini, A., Zhang, X., Zhang, Y., Kwong, D. N., & Chen, R. T. (2015) · Optics Express · doi:10.1364/oe.23.002487 · Cited by 278 · see citing works
High-Speed Silicon Photonics Modulators
Witzens, J. (2018) · Proceedings of the IEEE · doi:10.1109/jproc.2018.2877636 · Cited by 266 · see citing works
Nanophotonic Pockels modulators on a silicon nitride platform
Alexander, K., George, J. P., Verbist, J., Neyts, K., Kuyken, B., Thourhout, D. V., & Beeckman, J. (2018) · Nature Communications · doi:10.1038/s41467-018-05846-6 · Cited by 259 · see citing works
Wu, J., Li, Z., Luo, J., & Jen, A. K. ‐. (2020) · Journal of Materials Chemistry C · doi:10.1039/d0tc03224g · Cited by 259 · see citing works
Review and perspective on ultrafast wavelength-size electro-optic modulators
Liu, K., Ye, C. R., Khan, S., & Sorger, V. J. (2015) · Laser & Photonics Review · doi:10.1002/lpor.201400219 · Cited by 244 · see citing works
Ultra-high electro-optic activity demonstrated in a silicon-organic hybrid modulator
Kieninger, C., Kutuvantavida, Y., Elder, D. L., Wolf, S., Zwickel, H., Blaicher, M., Kemal, J. N., Lauermann, M., Randel, S., Freude, W., et al. (2018) · Optica · doi:10.1364/optica.5.000739 · Cited by 208 · see citing works
Self-citationPhotonic tensor cores for machine learning
Miscuglio, M., & Sorger, V. J. (2020) · Applied Physics Reviews · doi:10.1063/5.0001942 · Cited by 206 · see citing works
Athermal Broadband Graphene Optical Modulator with 35 GHz Speed
Dalir, H., Xia, Y., Wang, Y., & Zhang, X. (2016) · ACS Photonics · doi:10.1021/acsphotonics.6b00398 · Cited by 201 · see citing works
Non‐Volatile Reconfigurable Integrated Photonics Enabled by Broadband Low‐Loss Phase Change Material
Fang, Z., Zheng, J., Saxena, A., Whitehead, J., Chen, Y., & Majumdar, A. (2021) · Advanced Optical Materials · doi:10.1002/adom.202002049 · Cited by 199 · see citing works
Recent advances in polymer electro-optic modulators
Liu, J., Xu, G., Liu, F., Kityk, I. V., Liu, X., & Zhen, Z. (2015) · RSC Advances · doi:10.1039/c4ra13250e · Cited by 194 · see citing works
Slow-light silicon modulator with 110-GHz bandwidth
Han, C., Zheng, Z. M., Shu, H., Jin, M., Qin, J., Chen, R., Tao, Y., Shen, B., Bai, B., Yang, F., et al. (2023) · Science Advances · doi:10.1126/sciadv.adi5339 · Cited by 193 · see citing works
Ultra-Wideband and Adaptive Photonic Signal Processing of Microwave Signals
Minasian, R. A. (2015) · IEEE Journal of Quantum Electronics · doi:10.1109/jqe.2015.2499729 · Cited by 184 · see citing works
Lu, G.-W., Hong, J., Qiu, F., Spring, A. M., Kashino, T., Oshima, J., Ozawa, M.-A., Nawata, H., & Yokoyama, S. (2020) · Nature Communications · doi:10.1038/s41467-020-18005-7 · Cited by 177 · see citing works
Silicon–Organic and Plasmonic–Organic Hybrid Photonics
Heni, W., Kutuvantavida, Y., Haffner, C., Zwickel, H., Kieninger, C., Wolf, S., Lauermann, M., Fedoryshyn, Y. M., Tillack, A. F., Johnson, L. E., et al. (2017) · ACS Photonics · doi:10.1021/acsphotonics.7b00224 · Cited by 171 · see citing works
Self-citationSagnac interference in integrated photonics
Arianfard, H., Juodkazis, S., Moss, D., & Wu, J. (2023) · Applied Physics Reviews · doi:10.1063/5.0123236 · Cited by 204 · see citing works
Optical phase change materials in integrated silicon photonic devices: review
Miller, K., Haglund, R. F., & Weiss, S. M. (2018) · Optical Materials Express · doi:10.1364/ome.8.002415 · Cited by 161 · see citing works
240 Gb/s optical transmission based on an ultrafast silicon microring modulator
Zhang, Y., Zhang, H., Zhang, J., Liu, J., Wang, L., Chen, D., Chi, N., Xiao, X., & Yu, S. (2022) · Photonics Research · doi:10.1364/prj.441791 · Cited by 153 · see citing works
Silicon-Organic Hybrid (SOH) and Plasmonic-Organic Hybrid (POH) Integration
Koos, C. G., Leuthold, J., Freude, W., Kohl, M., Dalton, L. R., Bogaerts, W., Giesecke, A. L., Lauermann, M., Melikyan, A., Koeber, S., et al. (2015) · Journal of Lightwave Technology · doi:10.1109/jlt.2015.2499763 · Cited by 155 · see citing works
Self-citationPlasmonic modulator with >170 GHz bandwidth demonstrated at 100 GBd NRZ
Hoessbacher, C. B., Josten, A., Baeuerle, B., Fedoryshyn, Y. M., Hettrich, H., Salamin, Y., Heni, W., Haffner, C., Kaiser, C., Schmid, R., et al. (2017) · Optics Express · doi:10.1364/oe.25.001762 · Cited by 146 · see citing works
Self-citationCompact Lithium Niobate Electrooptic Modulators
Rao, A., & Fathpour, S. (2018) · IEEE Journal of Selected Topics in Quantum Electronics · doi:10.1109/jstqe.2017.2779869 · Cited by 145 · see citing works
A Survey of Optical Carrier Generation Techniques for Terabit Capacity Elastic Optical Networks
Imran, M., Anandarajah, P. M., Kaszubowska-Anandarajah, A. M., Sambo, N., & Potì, L. (2017) · IEEE Communications Surveys & Tutorials · doi:10.1109/comst.2017.2775039 · Cited by 135 · see citing works
Roadmap for phase change materials in photonics and beyond
Prabhathan, P., Sreekanth, K. V., Teng, J., Ko, J. H., Yoo, Y. J., Jeong, H., Lee, Y., Zhang, S., Cao, T., Popescu, C., et al. (2023) · iScience · doi:10.1016/j.isci.2023.107946 · Cited by 135 · see citing works
Photonics‐Based Microwave Frequency Mixing: Methodology and Applications
Tang, Z., Li, Y., Yao, J., & Pan, S. (2019) · Laser & Photonics Review · doi:10.1002/lpor.201800350 · Cited by 130 · see citing works
Frequency-bin photonic quantum information
Lu, H., Liscidini, M., Gaeta, A. L., Weiner, A. M., & Lukens, J. M. (2023) · Optica · doi:10.1364/optica.506096 · Cited by 120 · see citing works
Widely tunable, low phase noise microwave source based on a photonic chip
Merklein, M., Stiller, B., Kabakova, I. V., Mutugala, U. S., Vu, K. T., Madden, S., Eggleton, B. J., & Slavı́k, R. (2016) · Optics Letters · doi:10.1364/ol.41.004633 · Cited by 116 · see citing works
Garrett, K. E., Vazquez, X. A. S., Egri, S. B., Wilmer, J., Johnson, L. E., Robinson, B. H., & Isborn, C. M. (2014) · Journal of Chemical Theory and Computation · doi:10.1021/ct500528z · Cited by 113 · see citing works
Zhang, X., Chung, C.-J., Hosseini, A., Subbaraman, H., Luo, J., Jen, A. K. ‐., Nelson, R. L., Lee, C. Y.-C., & Chen, R. T. (2015) · Journal of Lightwave Technology · doi:10.1109/jlt.2015.2471853 · Cited by 112 · see citing works
Silicon-Organic Hybrid (SOH) Mach-Zehnder Modulators for 100 Gbit/s on-off Keying
Wolf, S., Zwickel, H., Hartmann, W., Lauermann, M., Kutuvantavida, Y., Kieninger, C., Altenhain, L., Schmid, R., Luo, J., Jen, A. K. ‐., et al. (2018) · Scientific Reports · doi:10.1038/s41598-017-19061-8 · Cited by 112 · see citing works
Self-citationCao, Z., Ma, Q., Smolders, A. B., Jiao, Y., Wale, M. J., Oh, C. W., Wu, H., & Koonen, A. M. J. (2015) · IEEE Journal of Quantum Electronics · doi:10.1109/jqe.2015.2509256 · Cited by 109 · see citing works
Silicon waveguide optical switch with embedded phase change material
Miller, K. J., Hallman, K. A., Haglund, R. F., & Weiss, S. M. (2017) · Optics Express · doi:10.1364/oe.25.026527 · Cited by 109 · see citing works
Xu, H., Elder, D. L., Johnson, L. E., de Coene, Y., Hammond, S. R., Ghinst, W. V., Clays, K., Dalton, L. R., & Robinson, B. H. (2021) · Advanced Materials · doi:10.1002/adma.202104174 · Cited by 103 · see citing works
Non-Volatile Reconfigurable Silicon Photonics Based on Phase-Change Materials
Fang, Z., Chen, R., Zheng, J., & Majumdar, A. (2021) · IEEE Journal of Selected Topics in Quantum Electronics · doi:10.1109/jstqe.2021.3120713 · Cited by 102 · see citing works
Plasmonic monolithic lithium niobate directional coupler switches
Thomaschewski, M., Zenin, V. A., Wolff, C., & Bozhevolnyi, S. I. (2020) · Nature Communications · doi:10.1038/s41467-020-14539-y · Cited by 100 · see citing works
Plasmonic Organic Hybrid Modulators—Scaling Highest Speed Photonics to the Microscale
Haffner, C., Heni, W., Fedoryshyn, Y. M., Josten, A., Baeuerle, B., Hoessbacher, C. B., Salamin, Y., Koch, U., Đorđević, N., Mousel, P., et al. (2016) · Proceedings of the IEEE · doi:10.1109/jproc.2016.2547990 · Cited by 98 · see citing works
Self-citationElder, D. L., Haffner, C., Heni, W., Fedoryshyn, Y. M., Garrett, K. E., Johnson, L. E., Campbell, R. A., Avila, J. D., Robinson, B. H., Leuthold, J., et al. (2017) · Chemistry of Materials · doi:10.1021/acs.chemmater.7b02020 · Cited by 98 · see citing works
Self-citationKieninger, C., Füllner, C., Zwickel, H., Kutuvantavida, Y., Kemal, J. N., Eschenbaum, C., Elder, D. L., Dalton, L. R., Freude, W., Randel, S., et al. (2020) · Optics Express · doi:10.1364/oe.390315 · Cited by 92 · see citing works
Self-citationUltra-compact lithium niobate microcavity electro-optic modulator beyond 110 GHz
Pan, B., Liu, H., Xu, H., Huang, Y., Li, H., Yu, Z., Liu, L., Shi, Y., & Daoxin Dai, A. (2022) · Chip · doi:10.1016/j.chip.2022.100029 · Cited by 92 · see citing works
Vanackere, T., Vandekerckhove, T., Bogaert, L., Billet, M., Poelman, S., Cuyvers, S., Kerrebrouck, J. V., Moerman, A., Caytan, O., Singh, N., et al. (2023) · APL Photonics · doi:10.1063/5.0150878 · Cited by 92 · see citing works
Low-error and broadband microwave frequency measurement in a silicon chip
Pagani, M., Morrison, B., Zhang, Y. Y., Casas‐Bedoya, A., Aalto, T. T., Harjanne, M. T., Kapulainen, M., Eggleton, B. J., & Marpaung, D. A. I. (2015) · Optica · doi:10.1364/optica.2.000751 · Cited by 90 · see citing works
Silicon Photonics Sensors for Biophotonic Applications—A Review
Dhote, C., Singh, A., & Kumar, S. (2022) · IEEE Sensors Journal · doi:10.1109/jsen.2022.3199663 · Cited by 93 · see citing works
Plasmonic Ferroelectric Modulators
Messner, A., Eltes, F., Ma, P., Abel, S., Baeuerle, B., Josten, A., Heni, W., Caimi, D., Fompeyrine, J., & Leuthold, J. (2018) · Journal of Lightwave Technology · doi:10.1109/jlt.2018.2881332 · Cited by 85 · see citing works
Self-citationUmmethala, S., Kemal, J. N., Alam, A. S., Lauermann, M., Kuzmin, A., Kutuvantavida, Y., Nandam, S. H., Hahn, L., Elder, D. L., Dalton, L. R., et al. (2021) · Optica · doi:10.1364/optica.411161 · Cited by 87 · see citing works
Self-citationUltrabroadband thin-film lithium tantalate modulator for high-speed communications
Wang, C., Fang, D., Zhang, J., Kotz, A., Lihachev, G., Churaev, M., Li, Z., Schwarzenberger, A., Ou, X., Koos, C. G., et al. (2024) · Optica · doi:10.1364/optica.537730 · Cited by 85 · see citing works
Self-citationSilicon Nitride Photonics for the Near-Infrared
Bucio, T. D., Lacava, C., Clementi, M., Faneca, J., Skandalos, I., Baldycheva, A. V., Galli, M., Debnath, K., Petropoulos, P., & Gardes, F. Y. (2019) · IEEE Journal of Selected Topics in Quantum Electronics · doi:10.1109/jstqe.2019.2934127 · Cited by 83 · see citing works
108 Gbit/s Plasmonic Mach–Zehnder Modulator with > 70-GHz Electrical Bandwidth
Heni, W., Haffner, C., Baeuerle, B., Fedoryshyn, Y. M., Josten, A., Hillerkuss, D., Niegemann, J., Melikyan, A., Kohl, M., Elder, D. L., et al. (2015) · Journal of Lightwave Technology · doi:10.1109/jlt.2015.2487560 · Cited by 83 · see citing works
Self-citationCompact electro-optic modulator on lithium niobate
Pan, B., Cao, H., Huang, Y., Wang, Z., Chen, K., Li, H., Yu, Z., & Daoxin Dai, A. (2022) · Photonics Research · doi:10.1364/prj.449172 · Cited by 82 · see citing works
Novel programmable microwave photonic filter with arbitrary filtering shape and linear phase
Zhu, X., Chen, F., Peng, H., & Chen, Z. (2017) · Optics Express · doi:10.1364/oe.25.009232 · Cited by 81 · see citing works
Xu, H., Elder, D. L., Johnson, L. E., Heni, W., de Coene, Y., De Leo, E., Destraz, M., Meier, N., Vander Ghinst, W., Hammond, S. R., et al. (2022) · Materials Horizons · doi:10.1039/d1mh01206a · Cited by 80 · see citing works
Self-citationHigh-efficiency lithium niobate modulator for K band operation
Ahmed, A. N. R., Shi, S., Mercante, A. J., Nelan, S. P., Yao, P. L., & Prather, D. W. (2020) · APL Photonics · doi:10.1063/5.0020040 · Cited by 79 · see citing works
Pockels modulation in integrated nanophotonics
Thomaschewski, M., & Bozhevolnyi, S. I. (2022) · Applied Physics Reviews · doi:10.1063/5.0083083 · Cited by 77 · see citing works
Polymer modulators in silicon photonics: review and projections
Taghavi, I., Moridsadat, M., Tofini, A., Raza, S., Jaeger, N. A. F., Chrostowski, L., Shastri, B. J., & Shekhar, S. (2022) · Nanophotonics · doi:10.1515/nanoph-2022-0141 · Cited by 78 · see citing works
Gardes, F. Y., Shoaa, A., Paoli, G. D., Skandalos, I., Ilie, S. T., Rutirawut, T., Talataisong, W., Faneca, J., Vitali, V., Hou, Y., et al. (2022) · Sensors · doi:10.3390/s22114227 · Cited by 77 · see citing works
Fundamental Scaling Laws in Nanophotonics
Liu, K., Sun, S., Majumdar, A., & Sorger, V. J. (2016) · Scientific Reports · doi:10.1038/srep37419 · Cited by 77 · see citing works
Graphene-based all-optical modulators
Zhong, C., Li, J., & Lin, H. (2020) · Frontiers of Optoelectronics · doi:10.1007/s12200-020-1020-4 · Cited by 73 · see citing works
Optical Interconnects Finally Seeing the Light in Silicon Photonics: Past the Hype
Mekawey, H. I., Elsayed, M., Ismail, Y., & Swillam, M. A. (2022) · Nanomaterials · doi:10.3390/nano12030485 · Cited by 69 · see citing works
Scalability of Large-Scale Photonic Integrated Circuits
Su, Y., He, Y., Guo, X., Xie, W., Ji, X., Wang, H., Cai, X., Tong, L., & Yu, S. (2023) · ACS Photonics · doi:10.1021/acsphotonics.2c01529 · Cited by 63 · see citing works
Coherent modulation up to 100 GBd 16QAM using silicon-organic hybrid (SOH) devices
Wolf, S., Zwickel, H., Kieninger, C., Lauermann, M., Hartmann, W., Kutuvantavida, Y., Freude, W., Randel, S., & Koos, C. G. (2018) · Optics Express · doi:10.1364/oe.26.000220 · Cited by 64 · see citing works
Self-citationPatrick, L. (2002) · PubMed · Cited by 64 · see citing works
Xu, H., Liu, J., Liu, J., Yu, C., Zhai, Z., Qin, G., & Liu, F. (2019) · Materials Chemistry Frontiers · doi:10.1039/c9qm00508k · Cited by 63 · see citing works
3D Printed Photoresponsive Materials for Photonics
Nocentini, S., Martella, D., Parmeggiani, C., & Wiersma, D. S. (2019) · Advanced Optical Materials · doi:10.1002/adom.201900156 · Cited by 62 · see citing works
Grating-Assisted Fiber to Chip Coupling for SOI Photonic Circuits
Nambiar, S. R., Sethi, P., & Selvaraja, S. K. (2018) · Applied Sciences · doi:10.3390/app8071142 · Cited by 61 · see citing works
Electro-optic Response in Germanium Halide Perovskites
Walters, G., & Sargent, E. H. (2018) · The Journal of Physical Chemistry Letters · doi:10.1021/acs.jpclett.7b03353 · Cited by 61 · see citing works
Wolf, S., Lauermann, M., Schindler, P., Ronniger, G., Geistert, K., Palmer, R., Köber, S., Bogaerts, W., Leuthold, J., Freude, W., et al. (2015) · Journal of Lightwave Technology · doi:10.1109/jlt.2015.2394511 · Cited by 60 · see citing works
Self-citationCoherent modulation up to 100 GBd 16QAM using silicon-organic hybrid (SOH) devices
Wolf, S., Zwickel, H., Kieninger, C., Lauermann, M., Hartmann, W., Kutuvantavida, Y., Freude, W., Randel, S., & Koos, C. G. (2018) · Repository KITopen (Karlsruhe Institute of Technology) · doi:10.5445/ir/1000079240 · Cited by 60 · see citing works
Self-citationRoadmap on material-function mapping for photonic-electronic hybrid neural networks
Miscuglio, M., Adam, G. C., Kuzum, D., & Sorger, V. J. (2019) · APL Materials · doi:10.1063/1.5109689 · Cited by 58 · see citing works
Efficient electro-optical modulation on thin-film lithium niobate
Jin, M., Chen, J., Sua, Y. M., Kumar, P., & Huang, Y. (2021) · Optics Letters · doi:10.1364/ol.419597 · Cited by 57 · see citing works
Elder, D. L., & Dalton, L. R. (2022) · Industrial & Engineering Chemistry Research · doi:10.1021/acs.iecr.1c03836 · Cited by 57 · see citing works
Advances in integrated ultra-wideband electro-optic modulators [Invited]
Xu, M., & Cai, X. (2022) · Optics Express · doi:10.1364/oe.449022 · Cited by 57 · see citing works
Pan, B., Hu, J., Huang, Y., Song, L., Wang, J., Chen, P., Yu, Z., Liu, L., & Dai, D. (2021) · Optics Express · doi:10.1364/oe.416908 · Cited by 56 · see citing works
A Survey of Silicon Photonics for Energy-Efficient Manycore Computing
Pasricha, S., & Nikdast, M. (2020) · IEEE Design and Test · doi:10.1109/mdat.2020.2982628 · Cited by 56 · see citing works
40 GBd 16QAM Signaling at 160 Gb/s in a Silicon-Organic Hybrid Modulator
Lauermann, M., Wolf, S., Schindler, P. C., Palmer, R., Koeber, S., Korn, D., Alloatti, L., Wahlbrink, T., Bolten, J., Waldow, M., et al. (2015) · Journal of Lightwave Technology · doi:10.1109/jlt.2015.2394211 · Cited by 55 · see citing works
Self-citationDemonstration of long-term thermally stable silicon-organic hybrid modulators at 85 °C
Kieninger, C., Kutuvantavida, Y., Miura, H., Kemal, J. N., Zwickel, H., Qiu, F., Lauermann, M., Freude, W., Randel, S., Yokoyama, S., et al. (2018) · Optics Express · doi:10.1364/oe.26.027955 · Cited by 54 · see citing works
Self-citationZwickel, H., Wolf, S., Kieninger, C., Kutuvantavida, Y., Lauermann, M., Keulenaer, T. D., Vyncke, A., Vaernewyck, R., Luo, J., Jen, A. K. ‐., et al. (2017) · Optics Express · doi:10.1364/oe.25.023784 · Cited by 53 · see citing works
Self-citationSecond-order nonlinear optical metamaterials: ABC-type nanolaminates
Alloatti, L., Kieninger, C., Froelich, A., Lauermann, M., Frenzel, T., Köhnle, K., Freude, W., Leuthold, J., Wegener, M., & Koos, C. G. (2015) · Applied Physics Letters · doi:10.1063/1.4931492 · Cited by 53 · see citing works
Self-citationDalton, L. R., Leuthold, J., Robinson, B. H., Haffner, C., Elder, D. L., Johnson, L. E., Hammond, S. R., Heni, W., Hosessbacher, C., Baeuerle, B., et al. (2023) · APL Materials · doi:10.1063/5.0145212 · Cited by 52 · see citing works
Self-citationMolecular Engineering of Structurally Diverse Dendrimers with Large Electro-Optic Activities
Xu, H., Elder, D. L., Johnson, L. E., Robinson, B. H., & Dalton, L. R. (2019) · ACS Applied Materials & Interfaces · doi:10.1021/acsami.9b05306 · Cited by 52 · see citing works
Performance of integrated optical switches based on 2D materials and beyond
Yao, Y., Cheng, Z., Dong, J., & Zhang, X. (2020) · Frontiers of Optoelectronics · doi:10.1007/s12200-020-1058-3 · Cited by 50 · see citing works
Optimization of Plasmonic-Organic Hybrid Electro-Optics
Robinson, B. H., Salamin, Y., Baeuerle, B., Josten, A., Ayata, M., Koch, U., Leuthold, J., Dalton, L. R., Johnson, L. E., Elder, D. L., et al. (2018) · Journal of Lightwave Technology · doi:10.1109/jlt.2018.2865882 · Cited by 49 · see citing works
Self-citationChip-scale frequency combs for data communications in computing systems
Okawachi, Y., Kim, B. Y., Lipson, M. F., & Gaeta, A. L. (2023) · Optica · doi:10.1364/optica.460175 · Cited by 49 · see citing works
Integrated optical frequency shifter in silicon-organic hybrid (SOH) technology
Lauermann, M., Weimann, C., Knopf, A., Heni, W., Palmer, R., Koeber, S., Elder, D. L., Bogaerts, W., Leuthold, J., Dalton, L. R., et al. (2016) · Optics Express · doi:10.1364/oe.24.011694 · Cited by 48 · see citing works
Self-citationHeterogeneous Integration on Silicon Photonics
Marshall, O., Hsu, M., Wang, Z., Kunert, B., Koos, C. G., & Thourhout, D. V. (2018) · Proceedings of the IEEE · doi:10.1109/jproc.2018.2858542 · Cited by 47 · see citing works
Self-citationSinatkas, G., Pitilakis, A., Zografopoulos, D. C., Beccherelli, R., & Kriezis, E. E. (2017) · Journal of Applied Physics · doi:10.1063/1.4973896 · Cited by 46 · see citing works
Plasmonic, photonic, or hybrid? Reviewing waveguide geometries for electro-optic modulators
Messner, A., Moor, D., Chelladurai, D., Svoboda, R., Smajić, J., & Leuthold, J. (2023) · APL Photonics · doi:10.1063/5.0159166 · Cited by 45 · see citing works
Self-citationYan, Y., Zhang, H., Liu, X., Peng, L., Zhang, Q., Yu, G., Wu, Q. Y., & Li, H. (2024) · Laser & Photonics Review · doi:10.1002/lpor.202400624 · Cited by 45 · see citing works
A silicon‐organic hybrid platform for quantum microwave-to-optical transduction
Witmer, J. D., McKenna, T. P., Arrangoiz-Arriola, P., Van Laer, R., Alex Wollack, E., Lin, F., Jen, A. K.-Y., Luo, J., & Safavi-Naeini, A. H. (2020) · Quantum Science and Technology · doi:10.1088/2058-9565/ab7eed · Cited by 40 · see citing works
Verified equivalent-circuit model for slot-waveguide modulators
Zwickel, H., Singer, S., Kieninger, C., Kutuvantavida, Y., Muradyan, N., Wahlbrink, T., Yokoyama, S., Randel, S., Freude, W., & Koos, C. G. (2020) · Optics Express · doi:10.1364/oe.383120 · Cited by 42 · see citing works
Self-citationSilicon-on-Insulator Slot Waveguides: Theory and Applications in Electro-Optics and Optical Sensing
Steglich, P. C. (2018) · InTech eBooks · doi:10.5772/intechopen.75539 · Cited by 42 · see citing works
Misra, A., Kress, C., Singh, K., Preußler, S., Scheytt, J. C., & Schneider, T. (2019) · Optics Express · doi:10.1364/oe.27.029972 · Cited by 42 · see citing works
Pan, Z., Xu, X., Chung, C., Dalir, H., Yan, H., Chen, K., Wang, Y., Jia, B., & Chen, R. T. (2018) · Laser & Photonics Review · doi:10.1002/lpor.201700300 · Cited by 39 · see citing works
Recent Progress of Imprinted Polymer Photonic Waveguide Devices and Applications
Han, X., Wu, Z.-L., Yang, S.-C., Shen, F.-F., Liang, Y., Wang, L., Wang, J., Ren, J., Jia, L., Zhang, H., et al. (2018) · Polymers · doi:10.3390/polym10060603 · Cited by 40 · see citing works
Enabling Technology in High-Baud-Rate Coherent Optical Communication Systems
Li, S., Huang, H., Pan, Z., Yin, R., Wang, Y., Fang, Y., Zhang, Y., Bao, C., Ren, Y., Li, Z., et al. (2020) · IEEE Access · doi:10.1109/access.2020.3003331 · Cited by 39 · see citing works
Nonlinear photonics on integrated platforms
Geng, W., Fang, Y., Wang, Y., Bao, C., Liu, W., Pan, Z., & Yue, Y. (2024) · Nanophotonics · doi:10.1515/nanoph-2024-0149 · Cited by 38 · see citing works
- Authors
- Alloatti, L., Palmer, R., Diebold, S., Pahl, K. P., Chen, B., Dinu, R., Fournier, M., Fedeli, J.-M., Zwick, T., Freude, W., Koos, C., & Leuthold, J.
- Affiliations
- Karlsruhe Institute of Technology (DE)
- Commissariat à l'Énergie Atomique et aux Énergies Alternatives (FR)
- Corresponding author
- Alloatti, Luca
- Koos, Christian
- ORCID
- Venue
- Light: Science & Applications
- Published
- 2014-05-23
- Volume
- 3
- Issue
- 5
- Pages
- e173-e173
- ISSN
- 2047-7538 (ISSN-L)
- OpenAlex
- W1542036482
- Cited by
- 341
- References
- 21
- Citations by year
- 2026: 15 · 2025: 27 · 2024: 23 · 2023: 35 · 2022: 27 · 2021: 24 · 2020: 36 · 2019: 27 · 2018: 36 · 2017: 30 · 2016: 25 · 2015: 30 · 2014: 5
- FWCI
- 15.94
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Light Science & Applications (publishedVersion, cc-by)
- Repository KITopen (Karlsruhe Institute of Technology) (publishedVersion)
- Repository for Publications and Research Data (ETH Zurich) (submittedVersion, cc-by)
- ETH Zürich Research Collection (cc-by)
- KITopen (other-oa)
- Funders
- Deutsche Forschungsgemeinschaft (248609)
- Bundesministerium für Bildung und Forschung
- Alfried Krupp von Bohlen und Halbach-Stiftung
- FP7 Ideas: European Research Council (280145)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photorefractive and Nonlinear Optics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced Photonic Communication Systems
- Keywords
- electro-optic modulation, silicon waveguides, RC time constant, electron accumulation layer, gate dielectric, voltage-length product, cladding materials
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
