Cited by 3,291Advanced Sensor and Energy Harvesting MaterialsNanomaterials and Printing TechnologiesDielectric materials and actuators

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Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers

Mannsfeld, Stefan C. B., Tee, Benjamin C-K., Stoltenberg, Randall M., Chen, Christopher V. H-H., Barman, Soumendra, Muir, Beinn V. O., Sokolov, Anatoliy N., Reese, Colin, Bao, Zhenan·2010·Nature Materials

DOI 10.1038/nmat2834

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Abstract

The development of an electronic skin is critical to the realization of artificial intelligence that comes into direct contact with humans, and to biomedical applications such as prosthetic skin. To mimic the tactile sensing properties of natural skin, large arrays of pixel pressure sensors on a flexible and stretchable substrate are required. We demonstrate flexible, capacitive pressure sensors with unprecedented sensitivity and very short response times that can be inexpensively fabricated over large areas by microstructuring of thin films of the biocompatible elastomer polydimethylsiloxane. The pressure sensitivity of the microstructured films far surpassed that exhibited by unstructured elastomeric films of similar thickness, and is tunable by using different microstructures. The microstructured films were integrated into organic field-effect transistors as the dielectric layer, forming a new type of active sensor device with similarly excellent sensitivity and response times.

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Self-citation
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Authors: Mannsfeld, S. C. B., Tee, B. C.-K., Stoltenberg, R. M., Chen, C. V. H.-H., Barman, S., Muir, B. V. O., Sokolov, A. N., Reese, C., & Bao, Z.
Affiliations: Stanford University (US)
Corresponding author: Bao, Zhenan
ORCID: Mannsfeld, Stefan C. B.
Tee, Benjamin C-K.
Stoltenberg, Randall M.
Sokolov, Anatoliy N.
Bao, Zhenan
Venue: Nature Materials
Publisher: Springer Science and Business Media LLC
Published: 2010-09-12
Volume: 9
Issue: 10
Pages: 859-864
ISSN: 1476-1122 (ISSN-L)
1476-4660
DOI: 10.1038/nmat2834
OpenAlex: W2114682092
Cited by: 3,291
References: 28
Citations by year: 2026: 160 · 2025: 225 · 2024: 227 · 2023: 253 · 2022: 287 · 2021: 272 · 2020: 284 · 2019: 283 · 2018: 311 · 2017: 238 · 2016: 202 · 2015: 176 · 2014: 143 · 2013: 103 · 2012: 68
FWCI: 43.42
Type: journal article
Language: en
Open access: closed
Licence: www.springer.com/tdm (tdm)
www.springer.com/tdm (vor)
Locations: Nature Materials (publishedVersion)
PubMed (publishedVersion)
Funders: National Science Foundation
Multidisciplinary University Research Initiative
Division of Electrical, Communications and Cyber Systems
Topics: Physical Sciences › Engineering › Biomedical Engineering › Advanced Sensor and Energy Harvesting Materials
Physical Sciences › Engineering › Electrical and Electronic Engineering › Nanomaterials and Printing Technologies
Physical Sciences › Materials Science › Electronic, Optical and Magnetic Materials › Dielectric materials and actuators
Keywords: flexible pressure sensors, capacitive sensors, polydimethylsiloxane, electronic skin, organic field-effect transistors, dielectric layer, tactile sensing, stretchable electronics, pressure sensitivity, response time (sensor)

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Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers

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