Cited by 2,145Force Microscopy Techniques and ApplicationsAdvanced MEMS and NEMS TechnologiesScientific Measurement and Uncertainty Evaluation

Calibration of rectangular atomic force microscope cantilevers

Sader, John E., Chon, James W. M., Mulvaney, Paul·1999·Review of Scientific Instruments

Abstract

A method to determine the spring constant of a rectangular atomic force microscope cantilever is proposed that relies solely on the measurement of the resonant frequency and quality factor of the cantilever in fluid (typically air), and knowledge of its plan view dimensions. This method gives very good accuracy and improves upon the previous formulation by Sader et al. [Rev. Sci. Instrum. 66, 3789 (1995)] which, unlike the present method, requires knowledge of both the cantilever density and thickness.

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Crossref · 10.1063/1.1150021

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  • The force determined by AFM cantilever deflection calibrated using the thermal noise method has an error lower than 5%.

    “Similarly, the force F was determined by recording the AFM cantilever deflection during sample deformation and knowing the spring constant of the AFM cantilever, calibrated using the thermal noise method [25]. The error in force measurements using this calibration method has been shown to be lower than 5% [26].”

    From Extreme strength observed in limpet teeth (2015) · cites this paper as [25]

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Authors
Sader, J. E., Chon, J. W. M., & Mulvaney, P.
Affiliations
The University of Melbourne (AU)
Venue
Review of Scientific Instruments
Published
1999-10-01
Volume
70
Issue
10
Pages
3967-3969
ISSN
  • 0034-6748 (ISSN-L)
  • 1089-7623
OpenAlex
W2082877303
Cited by
2,145
References
0
Citations by year
2026: 72 · 2025: 68 · 2024: 81 · 2023: 80 · 2022: 84 · 2021: 95 · 2020: 113 · 2019: 108 · 2018: 108 · 2017: 110 · 2016: 100 · 2015: 104 · 2014: 102 · 2013: 122 · 2012: 125
FWCI
6.06
Type
journal article
Language
en
Open access
closed
Locations
Review of Scientific Instruments (publishedVersion)
Topics
  • Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Force Microscopy Techniques and Applications
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
  • Social Sciences › Decision Sciences › Statistics, Probability and Uncertainty › Scientific Measurement and Uncertainty Evaluation
Keywords
rectangular cantilever, atomic force microscopy, resonant frequency, quality factor

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