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Hall mobility and free electron density at the SiC/SiO2 interface in 4H–SiC

Saks, N. S., Agarwal, A. K.·2000·Applied Physics Letters

Abstract

The electron mobility and free electron density have been measured in 4H– and 6H–SiC metal-oxide-semiconductor inversion layers using the Hall effect. The 4H–SiC inversion layers are found to have very poor conductance which is caused by severe trapping of electrons at the Si/SiO2 interface. The trapping causes reduced conductance through a reduction in the number of free electrons in the inversion layer, and also because of a drop in the mobility due to increased Coulombic scattering.

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Metadata

Authors
Saks, N. S., & Agarwal, A. K.
Venue
Applied Physics Letters
Published
2000-11-13
Volume
77
Issue
20
Pages
3281-3283
ISSN
  • 0003-6951 (ISSN-L)
  • 1077-3118
OpenAlex
W2061756481
Cited by
172
References
1
FWCI
5.20
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: Hall mobility and free electron density at the SiC/SiO2 interface in 4H–SiC. https://app.cochat.ai/papers/10.1063/1.1326046
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Saks, N. S., & Agarwal, A. K. (2000). Hall mobility and free electron density at the SiC/SiO2 interface in 4H–SiC. Applied Physics Letters. https://doi.org/10.1063/1.1326046

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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

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