Epitaxial LiNbO3 Thin Films Grown by Pulsed Laser Deposition for Optical Waveguides
Abstract
We have grown good-quality epitaxial LiNbO3 thin films on (0001) sapphire substrates using a pulsed laser deposition technique. The growth conditions permitted us to deposit c-axis oriented films avoiding the problem of the LiNb3O8 Li-deficient phase. The chemical composition of thin films was investigated by secondary ion mass spectrometry and resulted to coincide with the target composition. Guided propagation was demonstrated at 632 and 488 nm with thin films (∼1200 Å).
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Epitaxial LiTaO3 thin films have been obtained only on specific substrates, such as LN or sapphire.
“Regardless, epitaxial thin films have been obtained only on specific substrates, such as LN or sapphire [199-201].”
From Metal Oxide Thin Films for Advanced Photonic Applications (2026) · cites this paper as [201]
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- Authors
- Balestrino, G., Martellucci, S., Medaglia, P. G., Paoletti, A., Petrocelli, G., Tebano, A., Tucciarone, A., Gelli, F., Giorgetti, E., Sottini, S., & Tapfer, L.
- Affiliations
- University of Rome Tor Vergata (IT)
- Istituto di Ricerca sulle Onde Elettromagnetiche “Nello Carrara” (IROE-CNR), via Panciatichi 64, I-50127 Firenze, Italy
- Centro Nazionale Ricerca e Sviluppo Materiali (PASTIS-CNRSM), Strada Statale 7 Appia Km 712, I-72100, Brindisi, Italy
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2001-02-26
- Volume
- 78
- Issue
- 9
- Pages
- 1204-1206
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W1969044528
- Cited by
- 27
- References
- 20
- Citations by year
- 2024: 2 · 2023: 1 · 2022: 1 · 2020: 1 · 2018: 1 · 2017: 3 · 2016: 1 · 2014: 1 · 2012: 1
- FWCI
- 1.17
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Applied Physics Letters (publishedVersion)
- Topics
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photorefractive and Nonlinear Optics
- Physical Sciences › Materials Science › Materials Chemistry › Ferroelectric and Piezoelectric Materials
- Physical Sciences › Materials Science › Materials Chemistry › Electronic and Structural Properties of Oxides
- Keywords
- lithium niobate, epitaxial thin films, pulsed laser deposition, optical waveguides, sapphire substrate, c-axis orientation, guided light propagation, secondary ion mass spectrometry
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