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Cantilever transducers as a platform for chemical and biological sensors
Abstract
Since the late 1980s there have been spectacular developments in micromechanical or microelectro-mechanical (MEMS) systems which have enabled the exploration of transduction modes that involve mechanical energy and are based primarily on mechanical phenomena. As a result an innovative family of chemical and biological sensors has emerged. In this article, we discuss sensors with transducers in a form of cantilevers. While MEMS represents a diverse family of designs, devices with simple cantilever configurations are especially attractive as transducers for chemical and biological sensors. The review deals with four important aspects of cantilever transducers: (i) operation principles and models; (ii) microfabrication; (iii) figures of merit; and (iv) applications of cantilever sensors. We also provide a brief analysis of historical predecessors of the modern cantilever sensors.
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Cites
Calculation of thermal noise in atomic force microscopy
Butt, H. J., & Jaschke, M. (1995) · Nanotechnology · doi:10.1088/0957-4484/6/1/001 · Cited by 1,589
Cited by
Micro- and nanomechanical sensors for environmental, chemical, and biological detection
Waggoner, P. S., & Craighead, H. G. (2007) · Lab on a Chip · doi:10.1039/b707401h · Cited by 678
Nanosensors for trace explosive detection
Senesac, L., & Thundat, T. G. (2008) · Materials Today · doi:10.1016/s1369-7021(08)70017-8 · Cited by 368
MOSFET-Embedded Microcantilevers for Measuring Deflection in Biomolecular Sensors
Shekhawat, G., Tark, S.-H., & Dravid, V. P. (2006) · Science · doi:10.1126/science.1122588 · Cited by 286
Aponte, V. M., Finch, D. S., & Klaus, D. M. (2006) · Life Sciences · doi:10.1016/j.lfs.2006.04.007 · Cited by 51
Metadata
- Authors
- Lavrik, N. V., Sepaniak, M. J., & Datskos, P. G.
- Venue
- Review of Scientific Instruments
- Publisher
- AIP Publishing
- Published
- 2004-07-01
- Volume
- 75
- Issue
- 7
- Pages
- 2229-2253
- ISSN
- 0034-6748 (ISSN-L)
- 1089-7623
- OpenAlex
- W2061543408
- Cited by
- 1,117
- References
- 1
- FWCI
- 54.61
- Type
- journal article
- Language
- en
- Open access
- closed
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- Lavrik, N. V., Sepaniak, M. J., & Datskos, P. G. (2004). Cantilever transducers as a platform for chemical and biological sensors. Review of Scientific Instruments. https://doi.org/10.1063/1.1763252
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