Student or educator? Sign up with your school email and get 6 months of Pro free.
Cited by 1,150

The DOI matches its Crossref record; 3 of the 3 references it cites were found in a registry or an index.

Resistive switching mechanism of TiO2 thin films grown by atomic-layer deposition

Open access
Choi, B. J., Jeong, D. S., Kim, S. K., Rohde, C., Choi, S., Oh, J. H., Kim, H. J., Hwang, C. S., Szot, K., Waser, R., Reichenberg, B., Tiedke, S.·2005·Journal of Applied Physics

Abstract

The resistive switching mechanism of 20- to 57-nm-thick TiO2 thin films grown by atomic-layer deposition was studied by current-voltage measurements and conductive atomic force microscopy. Electric pulse-induced resistance switching was repetitively (> a few hundred times) observed with a resistance ratio ⪢102. Both the low- and high-resistance states showed linear log current versus log voltage graphs with a slope of 1 in the low-voltage region where switching did not occur. The thermal stability of both conduction states was also studied. Atomic force microscopy studies under atmosphere and high-vacuum conditions showed that resistance switching is closely related to the formation and elimination of conducting spots. The conducting spots of the low-resistance state have a few tens times higher conductivity than those of the high-resistance state and their density is also a few tens times higher which results in a ∼103 times larger overall conductivity. An interesting finding was that the area where the conducting spots do not exist shows a few times different resistance between the low- and high-resistance state films. It is believed that this resistance change is due to the difference in point defect density that was generated by the applied bias field. The point defects possibly align to form tiny conducting filaments in the high-resistance state and these tiny conducting filaments gather together to form stronger and more conducting filaments during the transition to the low-resistance state.

Overview

The claims and statistics of this paper haven’t been checked yet.

Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.

A few free checks a day · papers already verified open instantly · results are public

Integrity signals

Registry

Crossref · 10.1063/1.2001146

Cites

3 of 3 references verified0 citation errors · 0 not checkable

Statistics

Verification

Claims the paper makes

The claims and statistics of this paper haven’t been checked yet.

Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.

A few free checks a day · papers already verified open instantly · results are public

Self-check

Percentages, sums and reported differences re-computed from the paper’s own numbers.

The self-check needs the paper’s full text.

Citations

Cites

Show all 3 references

Research works printed but not linked: 16

  1. 2003, Nanoelectronics and Information Technology, 527
  2. 2004, Technical Digest—International Electron Devices Meeting
  3. 1997, Nature (London), 388, 50, 10.1038/40363 · DOI · Paper page
  4. 2003, Appl. Phys. Lett., 83, 957, 10.1063/1.1590741 · DOI · Paper page
  5. 2003, Superlattices Microstruct., 34, 459, 10.1016/j.spmi.2004.03.042 · DOI
  6. Tech. Dig. - Int. Electron Devices Meet., 2003, 37
  7. 1964, Solid-State Electron., 7, 785, 10.1016/0038-1101(64)90131-5 · DOI · Paper page
  8. 2001, Appl. Phys. Lett., 78, 3738, 10.1063/1.1377617 · DOI · Paper page
  9. 1968, Rev. Mod. Phys., 40, 677, 10.1103/RevModPhys.40.677 · DOI · Paper page
  10. 2004, Appl. Phys. Lett., 85, 4112, 10.1063/1.1812832 · doi:10.1063/1.1812832
  11. 2002, Phys. Rev. Lett., 88, 075508, 10.1103/PhysRevLett.88.075508 · DOI · Paper page
  12. 1990, Binary Alloy Phase Diagrams, 2926
  13. 1992, J. Mater. Res., 7, 3260, 10.1557/JMR.1992.3260 · doi:10.1557/jmr.1992.3260
  14. 2002, J. Appl. Phys., 92, 7200, 10.1063/1.1522475 · doi:10.1063/1.1522475
  15. 1999, J. Appl. Phys., 86, 506, 10.1063/1.370759 · doi:10.1063/1.370759
  16. 2003, J. Appl. Phys., 94, 6741, 10.1063/1.1620377 · DOI

Cited by

See all 1,150

Metadata

Authors
Choi, B. J., Jeong, D. S., Kim, S. K., Rohde, C., Choi, S., Oh, J. H., Kim, H. J., Hwang, C. S., Szot, K., Waser, R., Reichenberg, B., & Tiedke, S.
Venue
Journal of Applied Physics
Published
2005-08-01
Volume
98
Issue
3
ISSN
  • 0021-8979 (ISSN-L)
  • 1089-7550
OpenAlex
W1943178046
Cited by
1,150
References
3
FWCI
39.41
Type
journal article
Language
en
Open access
green

About these checks

Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.

Statistics and arithmetic are recomputed, not judged.

Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.

What counts as a claim ›How we measure confidence ›How we check this ›

Are you an author, or do you see a problem with this page? Request a review

How to cite

Cite CoChat for the checks on this page, and the paper for its own findings.

This page
CoChat. (2026). Citation check: Resistive switching mechanism of TiO2 thin films grown by atomic-layer deposition. https://app.cochat.ai/papers/10.1063/1.2001146
The paper
Choi, B. J., Jeong, D. S., Kim, S. K., Rohde, C., Choi, S., Oh, J. H., Kim, H. J., Hwang, C. S., Szot, K., Waser, R., Reichenberg, B., & Tiedke, S. (2005). Resistive switching mechanism of TiO2 thin films grown by atomic-layer deposition. Journal of Applied Physics. https://doi.org/10.1063/1.2001146

Data sources

Bibliographic data: Semantic Scholar, OpenAlex, Crossref.

Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.