The DOI matches its Crossref record; 3 of the 3 references it cites were found in a registry or an index.
Application of the three omega thermal conductivity measurement method to a film on a substrate of finite thickness
Abstract
The three omega thermal conductivity measurement method is analyzed for the case of one or more thin films on a substrate of finite thickness. The analysis is used to obtain the thermal conductivities of SiO2 films on Si substrates and of a chemical vapor deposition (CVD) diamond plate. For the case of the SiO2 films on a Si, we find an apparent thickness dependence of the thermal conductivity of the SiO2 films. However, the data can also be explained by a thickness-independent thermal conductivity and an interfacial thermal resistance. For the case of the CVD diamond plate, the fit of the theory to the experimental data is significantly improved if we assume that an interface layer separates the heater from the diamond plate.
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Citations
Cites
Thermal conductivity measurement from 30 to 750 K: the 3ω method
Cahill, D. G. (1990) · Review of Scientific Instruments · doi:10.1063/1.1141498 · Cited by 1,928
Thermal conductivity of amorphous solids above the plateau
Cahill, D. G., & Pohl, R. O. (1987) · Physical Review B · doi:10.1103/physrevb.35.4067 · Cited by 813
Heat transport in thin dielectric films
Lee, S.-M., & Cahill, D. G. (1997) · Journal of Applied Physics · doi:10.1063/1.363923 · Cited by 732
Cited by
Analysis of heat flow in layered structures for time-domain thermoreflectance
Cahill, D. G. (2004) · Review of Scientific Instruments · doi:10.1063/1.1819431 · Cited by 1,543
Data Reduction in 3ω Method for Thin-Film Thermal Conductivity Determination
Borca-Tasciuc, T., Kumar, A. R., & Chen, G. (2001) · Review of Scientific Instruments · doi:10.1063/1.1353189 · Cited by 439
Jiang, P., Qian, X., & Yang, R. (2018) · Journal of Applied Physics · doi:10.1063/1.5046944 · Cited by 424
Measurement of thermal conductivity of silicon dioxide thin films using a 3ω method
Yamane, T., Nagai, N., Katayama, S.-I., & Todoki, M. (2002) · Journal of Applied Physics · doi:10.1063/1.1481958 · Cited by 367
Ballistic to diffusive crossover of heat flow in graphene ribbons
Bae, M.-H., Li, Z., Aksamija, Z., Martin, P. N., Xiong, F., Ong, Z.-Y., Knezevic, I., & Pop, E. (2013) · Nature Communications · doi:10.1038/ncomms2755 · Cited by 332
Metadata
- Authors
- Kim, J. H., Feldman, A., & Novotny, D.
- Venue
- Journal of Applied Physics
- Publisher
- AIP Publishing
- Published
- 1999-10-01
- Volume
- 86
- Issue
- 7
- Pages
- 3959-3963
- ISSN
- 0021-8979 (ISSN-L)
- 1089-7550
- OpenAlex
- W2089595166
- Cited by
- 200
- References
- 3
- FWCI
- 2.00
- Type
- journal article
- Language
- en
- Open access
- closed
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- Kim, J. H., Feldman, A., & Novotny, D. (1999). Application of the three omega thermal conductivity measurement method to a film on a substrate of finite thickness. Journal of Applied Physics. https://doi.org/10.1063/1.371314
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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