Cited by 439

The DOI matches its Crossref record; 2 of the 2 references it cites were found in a registry or an index.

Data reduction in 3ω method for thin-film thermal conductivity determination

Borca-Tasciuc, T., Kumar, A. R., Chen, G.·2001·Review of Scientific Instruments

Abstract

The 3ω method has been proven to be very useful for determining the thermal conductivity of thin films and their substrates. Several simplifications are often used in determining the thermal conductivity of the films based on the experimentally measured 3ω signal. These simplifications, however, have limited range of applicability. In this work, we present a detailed analysis and mathematical modeling of the 3ω method applied for different experimental conditions. Effects considered include the finite substrate thickness, anisotropic nature of the film and substrate thermal conductivity, the film-substrate thermal property contrasts, the effect of heat capacitance of the heater, and the effect of thermal boundary resistance. Several experimental results are analyzed using the models presented. This work shows that the 3ω method can be extended to a wide range of sample conditions, with anisotropic conductivities in both the substrate and the film, and with small film-substrate conductivity contrast.

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Crossref · 10.1063/1.1353189

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2 of 2 references verified0 citation errors · 0 not checkable

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Citations

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Research works printed but not linked: 11

  1. 1997, J. Appl. Phys., 81, 2590, 10.1063/1.363923 · DOI · Paper page
  2. 1997, Appl. Phys. Lett., 70, 2957, 10.1063/1.118755 · DOI
  3. 1998, Mater. Res. Soc. Symp. Proc., 545, 473, 10.1557/PROC-545-473 · DOI
  4. 1998, ASME HTD, 357-3, 187
  5. 1999, ASME HTD, 364-3, 117
  6. 1999, J. Appl. Phys., 86, 3959, 10.1063/1.371314 · DOI
  7. 2000, Phys. Rev. B, 61, 3091, 10.1103/PhysRevB.61.3091 · DOI
  8. 2000, Superlattices Microstruct., 28, 199, 10.1006/spmi.2000.0900 · DOI
  9. 2000, ASME HTD, 366-2, 381
  10. 2000, ASME HTD, 366-2, 393
  11. 1998, J. Appl. Phys., 83, 5783, 10.1063/1.367500 · DOI

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Metadata

Authors
Borca-Tasciuc, T., Kumar, A. R., & Chen, G.
Affiliations
Mechanical and Aerospace Engineering Department, Nanoscale Heat Transfer and Thermoelectrics Laboratory, University of California at Los Angeles, Los Angeles, California 90095-1597
Venue
Review of Scientific Instruments
Published
2001-04-01
Volume
72
Issue
4
Pages
2139-2147
ISSN
  • 0034-6748
  • 1089-7623
Cited by
439
References
2
Language
en

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