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Thermal conduction inhomogeneity of nanocrystalline diamond films by dual-side thermoreflectance

Bozorg-Grayeli, Elah, Sood, Aditya, Asheghi, Mehdi, Gambin, Vincent, Sandhu, Rajinder, Feygelson, Tatyana I., Pate, Bradford B., Hobart, Karl, Goodson, Kenneth E.·2013·Applied Physics Letters

Abstract

Thin diamond films of thickness near 1 μm can have highly nonuniform thermal conductivities owing to spatially varying disorder associated with nucleation and grain coalescence. Here, we examine the nonuniformity for nanocrystalline chemical vapor deposited diamond films of thickness 0.5, 1.0, and 5.6 μm using picosecond thermoreflectance from both the top and bottom diamond surfaces, enabled by etching a window in the silicon substrate. The extracted local thermal conductivities vary from less than 100 W m−1 K−1 to more than 1300 W m−1 K−1 and suggest that the most defective material is confined to within 1 μm of the growth surface.

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Crossref · 10.1063/1.4796168

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  • Transient thermoreflectance has been widely applied to explore thermal properties of novel materials ranging from low thermal conductivity ≤0.1 W/m·K of hybrid materials and fullerene derivatives to very high thermal conductivity such as graphene.

    “Transient thermoreflectance method has been widely applied to explore thermal properties of novel materials that ranging from low thermal conductivity of ≤ 0.1 W/m•K of hybrid materials [132,133] and fullerene derivatives [134,135], to very high thermal conductivity such as graphene [136].”

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Metadata

Authors
Bozorg-Grayeli, E., Sood, A., Asheghi, M., Gambin, V., Sandhu, R., Feygelson, T. I., Pate, B. B., Hobart, K., & Goodson, K. E.
Affiliations
  • Department of Mechanical Engineering, Stanford University 1 , Stanford, California 94305, USA
  • Northrop Grumman Corporation 3 , San Diego, California 92127, USA
  • Science Applications International Corporation 4 , McLean, Virginia 22102, USA
  • Naval Research Laboratory 5 , Washington, DC 20375, USA
Venue
Applied Physics Letters
Published
2013-03-18
Volume
102
Issue
11
ISSN
  • 0003-6951
  • 1077-3118
Cited by
42
References
2
Language
en

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