The DOI matches its Crossref record; 58 of the 58 references it cites were found in a registry or an index.
A review on the processing accuracy of two-photon polymerization
Open accessAbstract
Two-photon polymerization (TPP) is a powerful and potential technology to fabricate true three-dimensional (3D) micro/nanostructures of various materials with subdiffraction-limit resolution. And it has been applied to microoptics, electronics, communications, biomedicine, microfluidic devices, MEMS and metamaterials. These applications, such as microoptics and photon crystals, put forward rigorous requirements on the processing accuracy of TPP, including the dimensional accuracy, shape accuracy and surface roughness and the processing accuracy influences their performance, even invalidate them. In order to fabricate precise 3D micro/nanostructures, the factors influencing the processing accuracy need to be considered comprehensively and systematically. In this paper, we review the basis of TPP micro/nanofabrication, including mechanism of TPP, experimental set-up for TPP and scaling laws of resolution of TPP. Then, we discuss the factors influencing the processing accuracy. Finally, we summarize the methods reported lately to improve the processing accuracy from improving the resolution and changing spatial arrangement of voxels.
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Cites
Finer features for functional microdevices
Kawata, S., Sun, H.-B., Tanaka, T., & Takada, K. (2001) · Nature · doi:10.1038/35089130 · Cited by 2,871
Three-dimensional microfabrication with two-photon-absorbed photopolymerization
Maruo, S., Nakamura, O., & Kawata, S. (1997) · Optics Letters · doi:10.1364/ol.22.000132 · Cited by 1,952
Self-Assembly of ZnO: From Nanodots to Nanorods
Pacholski, C., Kornowski, A., & Weller, H. (2002) · Angewandte Chemie International Edition · doi:10.1002/1521-3773(20020402)41:7<1188::aid-anie1188>3.0.co;2-5 · Cited by 1,888
Chou, S. Y., Krauss, P. R., & Renstrom, P. J. (1996) · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena · doi:10.1116/1.588605 · Cited by 1,729
Two-Photon Excitation in CaF2:Eu2+
Kaiser, W., & Garrett, C. G. B. (1961) · Physical Review Letters · doi:10.1103/physrevlett.7.229 · Cited by 1,339
Electron beam lithography: resolution limits and applications
Vieu, C., Carcenac, F., Pépin, A., Chen, Y., Mejias, M., Lebib, A., Manin-Ferlazzo, L., Couraud, L., & Launois, H. (2000) · Applied Surface Science · doi:10.1016/s0169-4332(00)00352-4 · Cited by 1,146
Trapping and emission of photons by a single defect in a photonic bandgap structure
Noda, S., Chutinan, A., & Imada, M. (2000) · Nature · doi:10.1038/35036532 · Cited by 1,048
Three‐dimensional optical laser lithography beyond the diffraction limit
Fischer, J., & Wegener, M. (2013) · Laser & Photonics Reviews · doi:10.1002/lpor.201100046 · Cited by 709
Serbin, J., Egbert, A., Ostendorf, A., Chichkov, B. N., Houbertz, R., Domann, G., Schulz, J., Cronauer, C., Fröhlich, L., & Popall, M. (2003) · Optics Letters · doi:10.1364/ol.28.000301 · Cited by 592
Achieving λ/20 Resolution by One-Color Initiation and Deactivation of Polymerization
Li, L., Gattass, R. R., Gershgoren, E., Hwang, H., & Fourkas, J. T. (2009) · Science · doi:10.1126/science.1168996 · Cited by 524
Cited by
Pagac, M., Hajnys, J., Ma, Q.-P., Jancar, L., Jansa, J., Stefek, P., & Mesicek, J. (2021) · Polymers · doi:10.3390/polym13040598 · Cited by 834
Advances in optical metasurfaces: fabrication and applications [Invited]
Su, V.-C., Chu, C. H., Sun, G., & Tsai, D. P. (2018) · Optics Express · doi:10.1364/oe.26.013148 · Cited by 361
Harinarayana, V., & Shin, Y. C. (2021) · Optics & Laser Technology · doi:10.1016/j.optlastec.2021.107180 · Cited by 259
Arzt, E., Quan, H., McMeeking, R. M., & Hensel, R. (2021) · Progress in Materials Science · doi:10.1016/j.pmatsci.2021.100823 · Cited by 253
Ultrafast Laser Additive Manufacturing: A Review
Saunders, J., Elbestawi, M., & Fang, Q. (2023) · Journal of Manufacturing and Materials Processing · doi:10.3390/jmmp7030089 · Cited by 35
Metadata
- Authors
- Zhou, X., Hou, Y., & Lin, J.
- Venue
- AIP Advances
- Publisher
- AIP Publishing
- Published
- 2015-03-01
- Volume
- 5
- Issue
- 3
- ISSN
- 2158-3226 (ISSN-L)
- OpenAlex
- W2016535073
- Cited by
- 422
- References
- 58
- FWCI
- 6.76
- Type
- journal article
- Language
- en
- Open access
- gold
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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