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Piezoelectric thin films for mems
Open accessAbstract
A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The Materials figure of merits are given for various applications and discussed. The coupling coefficient for ultrasonic applications is treated in more detail.
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Cited by
Ledermann, N., Muralt, P., Baborowski, J., Gentil, S., Mukati, K., Cantoni, M., Seifert, A., & Setter, N. (2003) · Sensors and Actuators A: Physical · doi:10.1016/s0924-4247(03)00090-6 · Cited by 395
Self-citationPZT thin films for microsensors and actuators: Where do we stand?
Muralt, P. (2000) · IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control · doi:10.1109/58.852073 · Cited by 375
Self-citationPiezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting
Muralt, P., Polcawich, R. G., & Trolier-McKinstry, S. (2009) · MRS Bulletin · doi:10.1557/mrs2009.177 · Cited by 366
Self-citationRecent Progress in Materials Issues for Piezoelectric MEMS
Muralt, P. (2008) · Journal of the American Ceramic Society · doi:10.1111/j.1551-2916.2008.02421.x · Cited by 332
Self-citationPiezoelectric micromachined ultrasonic transducers based on PZT thin films
Muralt, P., Ledermann, N., Paborowski, J., Barzegar, A., Gentil, S., Belgacem, B., Petitgrand, S., Bosseboeuf, A., & Setter, N. (2005) · IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control · doi:10.1109/tuffc.2005.1563270 · Cited by 332
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Metadata
- Authors
- Muralt, P.
- Venue
- Integrated Ferroelectrics
- Publisher
- Informa UK Limited
- Published
- 1997-09
- Volume
- 17
- Issue
- 1-4
- Pages
- 297-307
- ISSN
- 1026-7530 (ISSN-L)
- 1058-4587
- 1607-8489
- OpenAlex
- W2092872972
- Cited by
- 165
- References
- 0
- FWCI
- 6.56
- Type
- journal article
- Language
- en
- Open access
- green
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- Muralt, P. (1997). Piezoelectric thin films for mems. Integrated Ferroelectrics. https://doi.org/10.1080/10584589708013004
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
