The DOI matches its Crossref record; 14 of the 14 references it cites were found in a registry or an index.
Piezoelectric micromachined ultrasonic transducers based on PZT thin films
Open accessAbstract
This paper describes fabrication and characterization results of piezoelectric micromachined ultrasonic transducers (pMUTs) based on 2-microm-thick Pb(Zr0.53Ti0.47O3) (PZT) thin films. The applied structures are circular plates held at four bridges, thus partially unclamped. A simple analytical model for the fully clamped structure is used as a reference to optimize design parameters such as thickness relations and electrodes, and to provide approximate predictions for coupling coefficients related to previously determined thin film properties. The best coupling coefficient was achieved with a 270-microm plate and amounted to kappa2 = 5.3%. This value compares well with the calculated value based on measured small signal dielectric (epsilon = 1050) and piezoelectric (e3l,f = 15 Cm(-2)) properties of the PZT thin film at 100 kV/cm dc bias. The resonances show relatively large Q-factors, which can be partially explained by the small diameters as compared to the sound wavelength in air and in the test liquid (Fluorinert 77). A transmit-receive experiment with two quasi-identical pMUTs was performed showing significant signal transmission up to a distance of 20 cm in air and 2 cm in the test liquid.
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Cites
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Self-citationFundamentals on Piezoelectricity
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Self-citationMicromachined high frequency ferroelectric sonar transducers
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Self-citationPiezoelectric thin films for mems
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Cited by
Fu, Y. Q., Luo, J. K., Du, X. Y., Flewitt, A. J., Li, Y., Markx, G. H., Walton, A. J., & Milne, W. I. (2010) · Sensors and Actuators B: Chemical · doi:10.1016/j.snb.2009.10.010 · Cited by 419
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Piezoelectric films for high frequency ultrasonic transducers in biomedical applications
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Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting
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Self-citationRecent Progress in Materials Issues for Piezoelectric MEMS
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Metadata
- Authors
- Muralt, P., Ledermann, N., Paborowski, J., Barzegar, A., Gentil, S., Belgacem, B., Petitgrand, S., Bosseboeuf, A., & Setter, N.
- Venue
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
- Published
- 2005-12
- Volume
- 52
- Issue
- 12
- Pages
- 2276-2288
- ISSN
- 0885-3010 (ISSN-L)
- OpenAlex
- W2124726994
- Cited by
- 332
- References
- 14
- FWCI
- 12.97
- Type
- journal article
- Language
- en
- Open access
- green
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