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SU-8: a low-cost negative resist for MEMS
Open accessAbstract
This paper describes the characterization of a home-made negative photoresist developed by IBM. This resist, called SU-8, can be produced with commercially available materials. Three blends were prepared for this article and some of its optical and mechanical properties are presented. One of its numerous advantages is the broad range of thicknesses which can be obtained in one spin: from 750 nm to with a conventional spin coater. The resist is exposed with a standard UV aligner and has an outstanding aspect ratio near 15 for lines and 10 for trenches. These ratios combined with the electroplating of copper allow the fabrication of highly integrated electromagnetic coils.
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Cited by
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Li, J., & Pumera, M. (2021) · Chemical Society Reviews · doi:10.1039/d0cs01062f · Cited by 303
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Pancrazio, J. J., Deku, F., Ghazavi, A., Stiller, A. M., Rihani, R., Frewin, C. L., Varner, V. D., Gardner, T. J., & Cogan, S. F. (2017) · Neuromodulation: Technology at the Neural Interface · doi:10.1111/ner.12716 · Cited by 60
Guanxing, Z., Liu, Z., Deng, W., & Zhu, W. (2021) · Journal of Optics · doi:10.1088/2040-8986/abcc52 · Cited by 34
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Metadata
- Authors
- Lorenz, H., Despont, M., Fahrni, N., LaBianca, N., Renaud, P., & Vettiger, P.
- Venue
- Journal of Micromechanics and Microengineering
- Publisher
- IOP Publishing
- Published
- 1997-09-01
- Volume
- 7
- Issue
- 3
- Pages
- 121-124
- ISSN
- 0960-1317 (ISSN-L)
- 1361-6439
- OpenAlex
- W2082983861
- Cited by
- 979
- References
- 0
- FWCI
- 15.58
- Type
- journal article
- Language
- en
- Open access
- bronze
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- CoChat. (2026). Citation check: SU-8: a low-cost negative resist for MEMS. https://app.cochat.ai/papers/10.1088/0960-1317/7/3/010
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- Lorenz, H., Despont, M., Fahrni, N., LaBianca, N., Renaud, P., & Vettiger, P. (1997). SU-8: a low-cost negative resist for MEMS. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/0960-1317/7/3/010
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
