The DOI matches its Crossref record; 40 of the 40 references it cites were found in a registry or an index.
Oxygen discharges diluted with argon: dissociation processes
Abstract
We use a global (volume averaged) model to study the dissociation processes and the presence of negative ions and metastable species in a low pressure high density O 2 /Ar discharge in the pressure range 1–100 mTorr. The electron density and the fractional dissociation of the oxygen molecule increases with increased argon content in the discharge. We relate this increase in fractional dissociation to an increase in the reaction rate for electron impact dissociation of the oxygen molecule which is due to the increased electron temperature with increased argon content in the discharge. The electron temperature increases due to higher ionization potential of argon than for molecular and atomic oxygen. We find the contribution of dissociation by quenching of the argon metastable Ar m by molecular oxygen (Penning dissociation) to the creation of atomic oxygen to be negligible. The negative oxygen ion O − is found to be the dominant negative ion in the discharge. Dissociative attachment of the oxygen molecule in the ground state and in particular the metastable oxygen molecule O 2 ( a 1 Δ g ) are the dominating channels for creation of the negative oxygen ion O − .
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Cites
Principles of Plasma Discharges and Materials Processing
Lieberman, M. A., & Lichtenberg, A. J. (2005) · doi:10.1002/0471724254 · Cited by 4,748
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Kinetic model of a low-pressure N/sub 2/-O/sub 2/ flowing glow discharge
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A simple formula for diffusion calculations involving wall reflection and low density
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O 2 ( Δ 1 ) production in He∕O2 mixtures in flowing low pressure plasmas
Stafford, D. S., & Kushner, M. J. (2004) · Journal of Applied Physics · doi:10.1063/1.1768615 · Cited by 299
Excitation of the 1s5,1s4, 1s3, and 1s2levels of argon by low-energy electrons
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Splitting of CO2by vibrational excitation in non-equilibrium plasmas: a reaction kinetics model
Kozák, T., & Bogaerts, A. (2014) · Plasma Sources Science and Technology · doi:10.1088/0963-0252/23/4/045004 · Cited by 420
Murakami, T., Niemi, K., Gans, T., O'Connell, D., & Graham, W. G. (2012) · Plasma Sources Science and Technology · doi:10.1088/0963-0252/22/1/015003 · Cited by 324
A global (volume averaged) model of a nitrogen discharge: I. Steady state
Thorsteinsson, E. G., & Gudmundsson, J. T. (2009) · Plasma Sources Science and Technology · doi:10.1088/0963-0252/18/4/045001 · Cited by 132
Self-citationGudmundsson, J. T., Kawamura, E., & Lieberman, M. A. (2013) · Plasma Sources Science and Technology · doi:10.1088/0963-0252/22/3/035011 · Cited by 107
Self-citationWen, D.-Q., Krek, J., Gudmundsson, J. T., Kawamura, E., Lieberman, M. A., & Verboncoeur, J. P. (2021) · Plasma Sources Science and Technology · doi:10.1088/1361-6595/ac1b22 · Cited by 48
Metadata
- Authors
- Gudmundsson, J. T., & Thorsteinsson, E. G.
- Venue
- Plasma Sources Science and Technology
- Publisher
- IOP Publishing
- Published
- 2007-04-19
- Volume
- 16
- Issue
- 2
- Pages
- 399-412
- ISSN
- 0963-0252 (ISSN-L)
- 1361-6595
- OpenAlex
- W2090910147
- Cited by
- 337
- References
- 40
- FWCI
- 9.13
- Type
- journal article
- Language
- en
- Open access
- closed
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