The DOI matches its Crossref record; 2 of the 2 references it cites were found in a registry or an index.
Laser ablation and micromachining with ultrashort laser pulses
Abstract
The mechanisms of ultrashort-pulse laser ablation of materials are discussed, and the differences to that of long laser pulses are emphasized. Ultrashort laser pulses offer both high laser intensity and precise laser-induced breakdown threshold with reduced laser fluence. The ablation of materials with ultrashort pulses has a very limited heat-affected volume. The advantages of ultrashort laser pulses are applied in precision micromachining of various materials. Some femtosecond laser pulse micromachining results, including comparison with long pulses, are presented. Ultrashort-pulse laser micromachining may have a wide range of applications where micrometer and submicrometer feature sizes are required.
Overview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cites
Compression of amplified chirped optical pulses
Strickland, D., & Mourou, G. (1985) · Optics Communications · doi:10.1016/0030-4018(85)90120-8 · Cited by 3,937 · cited 3×
“The technology of generating and amplifying ultrashortduration laser pulses has only been developed in the past ten years or so [1], [ 2 ].”
BackgroundMethodInfluentialSelf-citationFemtosecond, picosecond and nanosecond laser ablation of solids
Chichkov, B. N., Momma, C., Nolte, S., Alvensleben, F., & Tünnermann, A. (1996) · Applied Physics A Materials Science & Processing · doi:10.1007/bf01567637 · Cited by 3,066
Cited by
Noack, J., & Vogel, A. (1999) · IEEE Journal of Quantum Electronics · doi:10.1109/3.777215 · Cited by 618
Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining
Ahmmed, K., Grambow, C., & Kietzig, A.-M. (2014) · Micromachines · doi:10.3390/mi5041219 · Cited by 466
Compact diode-pumped 11 kW Yb:YAG Innoslab femtosecond amplifier
Russbueldt, P., Mans, T., Weitenberg, J., Hoffmann, H. D., & Poprawe, R. (2010) · Optics Letters · doi:10.1364/ol.35.004169 · Cited by 462
Influence of the pulse duration in the ps-regime on the ablation efficiency of metals
Jaeggi, B., Neuenschwander, B., Schmid, M., Muralt, M., Zuercher, J., & Hunziker, U. (2011) · Physics Procedia · doi:10.1016/j.phpro.2011.03.118 · Cited by 133
Metadata
- Authors
- Liu, X., Du, D., & Mourou, G.
- Venue
- IEEE Journal of Quantum Electronics
- Published
- 1997
- Volume
- 33
- Issue
- 10
- Pages
- 1706-1716
- ISSN
- 0018-9197 (ISSN-L)
- OpenAlex
- W2113295440
- Cited by
- 972
- References
- 2
- FWCI
- 17.97
- Type
- journal article
- Language
- en
- Open access
- closed
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: Laser ablation and micromachining with ultrashort laser pulses. https://app.cochat.ai/papers/10.1109/3.631270
- The paper
- Liu, X., Du, D., & Mourou, G. (1997). Laser ablation and micromachining with ultrashort laser pulses. IEEE Journal of Quantum Electronics. https://doi.org/10.1109/3.631270
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
