The DOI matches its Crossref record; 1 of the 1 references it cites were found in a registry or an index.
Piezoelectric micromotors for microrobots
Abstract
The authors have begun research into piezoelectric ultrasonic motors using ferroelectric thin films. The authors have fabricated the stator components of these millimeter diameter motors on silicon wafers. Ultrasonic motors consist of two pieces: a stator and a rotor. The stator includes a piezoelectric film in which bending is induced in the form of a traveling wave. A small glass lens placed upon the stator becomes the spinning rotor. Piezoelectric micromotors overcome the problems currently associated with electrostatic micromotors such as low torque, friction, and the need for high voltage excitation. More importantly, they may offer a much simpler mechanism for coupling power out. Using thin films of lead zirconate titanate on silicon nitride membranes, various types of actuator structures can be fabricated. By combined new robot control systems with piezoelectric motors and micromechanics, the authors propose creating micromechanical systems that are small, cheap and completely autonomous.>
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Citations
Cites
A robust layered control system for a mobile robot
Brooks, R. (1986) · IEEE Journal on Robotics and Automation · doi:10.1109/jra.1986.1087032 · Cited by 7,799
Self-citation
Cited by
Ferroelectric thin films: Review of materials, properties, and applications
Setter, N., Damjanovic, D., Eng, L., Fox, G., Gevorgian, S., Hong, S., Kingon, A., Kohlstedt, H., Park, N. Y., Stephenson, G. B., et al. (2006) · Journal of Applied Physics · doi:10.1063/1.2336999 · Cited by 1,907
Measurement of piezoelectric coefficients of ferroelectric thin films
Lefki, K., & Dormans, G. J. M. (1994) · Journal of Applied Physics · doi:10.1063/1.357693 · Cited by 593
Ledermann, N., Muralt, P., Baborowski, J., Gentil, S., Mukati, K., Cantoni, M., Seifert, A., & Setter, N. (2003) · Sensors and Actuators A: Physical · doi:10.1016/s0924-4247(03)00090-6 · Cited by 395
PZT thin films for microsensors and actuators: Where do we stand?
Muralt, P. (2000) · IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control · doi:10.1109/58.852073 · Cited by 375
Recent Progress in Materials Issues for Piezoelectric MEMS
Muralt, P. (2008) · Journal of the American Ceramic Society · doi:10.1111/j.1551-2916.2008.02421.x · Cited by 332
Metadata
- Authors
- Flynn, A. M., Tavrow, L. S., Bart, S. F., Brooks, R. A., Ehrlich, D. J., Udayakumar, K. R., & Cross, L. E.
- Venue
- Journal of Microelectromechanical Systems
- Published
- 1992-03
- Volume
- 1
- Issue
- 1
- Pages
- 44-51
- ISSN
- 1057-7157 (ISSN-L)
- OpenAlex
- W2139497148
- Cited by
- 228
- References
- 1
- FWCI
- 13.77
- Type
- journal article
- Language
- en
- Open access
- closed
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- Flynn, A. M., Tavrow, L. S., Bart, S. F., Brooks, R. A., Ehrlich, D. J., Udayakumar, K. R., & Cross, L. E. (1992). Piezoelectric micromotors for microrobots. Journal of Microelectromechanical Systems. https://doi.org/10.1109/84.128055
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
