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Cited by 371

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Sub 50-nm FinFET: PMOS

Xuejue Huang, Wen-Chin Lee, Charles Kuo, Hisamoto, D., Leland Chang, Kedzierski, J., Anderson, E., Takeuchi, H., Yang-Kyu Choi, Asano, K., Subramanian, V., Tsu-Jae King, Bokor, J., Chenming Hu·2003·International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318)

Abstract

High performance PMOSFETs with gate length as short as 18-nm are reported. A self-aligned double-gate MOSFET structure (FinFET) is used to suppress the short channel effect. A 45 nm gate-length PMOS FinEET has an I/sub dsat/ of 410 /spl mu/A//spl mu/m (or 820 /spl mu/A//spl mu/m depending on the definition of the width of a double-gate device) at Vd=Vg=1.2 V and Tox=2.5 nm. The quasi-planar nature of this variant of the double-gate MOSFETs makes device fabrication relatively easy using the conventional planar MOSFET process technologies. Simulation shows possible scaling to 10-nm gate length.

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Metadata

Authors
Huang, X., Lee, W.-C., Kuo, C., Hisamoto, D., Chang, L., Kedzierski, J., Anderson, E., Takeuchi, H., Choi, Y.-K., Asano, K., Subramanian, V., King, T.-J., Bokor, J., & Hu, C.
Venue
International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318)
Publisher
IEEE
Published
2003-01-22
Pages
67-70
ISSN
0163-1918 (ISSN-L)
OpenAlex
W2536886358
Cited by
371
References
2
FWCI
32.92
Type
conference paper
Language
en
Open access
closed

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CoChat. (2026). Citation check: Sub 50-nm FinFET: PMOS. https://app.cochat.ai/papers/10.1109/iedm.1999.823848
The paper
Huang, X., Lee, W.-C., Kuo, C., Hisamoto, D., Chang, L., Kedzierski, J., Anderson, E., Takeuchi, H., Choi, Y.-K., Asano, K., Subramanian, V., King, T.-J., Bokor, J., & Hu, C. (2003). Sub 50-nm FinFET: PMOS. International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318). https://doi.org/10.1109/iedm.1999.823848

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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.