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High Breakdown Voltage AlGaN–GaN HEMTs Achieved by Multiple Field Plates
Open accessAbstract
High-voltage Al/sub 0.22/Ga/sub 0.78/N-GaN high-electron mobility transistors have been fabricated using multiple field plates over dielectric passivation layers. The device breakdown voltage was found to increase with the addition of the field plates. With two field plates, the device showed a breakdown voltage as high as 900 V. This technique is easy to apply, based on the standard planar transistor fabrication, and especially attractive for the power switching applications.
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Cited by
Perspective: Ga2O3 for ultra-high power rectifiers and MOSFETS
Pearton, S. J., Ren, F., Tadjer, M., & Kim, J. (2018) · Journal of Applied Physics · doi:10.1063/1.5062841 · Cited by 659
High Breakdown Voltage Achieved on AlGaN/GaN HEMTs With Integrated Slant Field Plates
Dora, Y., Chakraborty, A., Mccarthy, L., Keller, S., Denbaars, S. P., & Mishra, U. K. (2006) · IEEE Electron Device Letters · doi:10.1109/led.2006.881020 · Cited by 448
Self-citation1200-V Normally Off GaN-on-Si Field-Effect Transistors With Low Dynamic on -Resistance
Chu, R., Corrion, A., Chen, M., Li, R., Wong, D., Zehnder, D., Hughes, B., & Boutros, K. (2011) · IEEE Electron Device Letters · doi:10.1109/led.2011.2118190 · Cited by 367
A Review of GaN HEMT Dynamic On-Resistance and Dynamic Stress Effects on Field Distribution
Gill, L., DasGupta, S., Neely, J. C., Kaplar, R. J., & Michaels, A. J. (2024) · IEEE Transactions on Power Electronics · doi:10.1109/tpel.2023.3318182 · Cited by 68
Metadata
- Authors
- Xing, H., Dora, Y., Chini, A., Heikman, S., Keller, S., & Mishra, U. K.
- Venue
- IEEE Electron Device Letters
- Published
- 2004-04
- Volume
- 25
- Issue
- 4
- Pages
- 161-163
- ISSN
- 0741-3106 (ISSN-L)
- OpenAlex
- W2152320292
- Cited by
- 360
- References
- 0
- FWCI
- 9.95
- Type
- journal article
- Language
- en
- Open access
- green
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- Xing, H., Dora, Y., Chini, A., Heikman, S., Keller, S., & Mishra, U. K. (2004). High Breakdown Voltage AlGaN–GaN HEMTs Achieved by Multiple Field Plates. IEEE Electron Device Letters. https://doi.org/10.1109/led.2004.824845
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