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Cited by 540

The DOI matches its Crossref record; 8 of the 8 references it cites were found in a registry or an index.

Proceedings of Winter Simulation Conference

·1994·Proceedings of Winter Simulation Conference WSC-94
DOI 10.1109/wsc.1994.717062
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Abstract

A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have increased, semiconductor fabs have moved toward the use of automated material handling systems (AMHS). However, the behavior of AMHS and the effects of AMHS on fab productivity is not well understood. This research involves the development of a design and analysis methodology for evaluating the throughput capacity of AMHS. A set of simulation experiments is used to evaluate the throughput capacity of an AMHS and the effects on fab performance measures. The analysis uses SEMATECH fab data for full semiconductor fabs to evaluate the AMHS throughput capacity. 1

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Crossref · 10.1109/wsc.1994.717062

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Metadata

Venue
Proceedings of Winter Simulation Conference WSC-94
Publisher
IEEE
Published
1994
Pages
iii
DOI
10.1109/wsc.1994.717062
OpenAlex
W2125784747
Cited by
540
References
8
FWCI
56.49
Type
conference paper
Language
en
Open access
closed

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CoChat. (2026). Citation check: Proceedings of Winter Simulation Conference. https://app.cochat.ai/papers/10.1109/wsc.1994.717062
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Proceedings of Winter Simulation Conference. (1994). Proceedings of Winter Simulation Conference WSC-94. https://doi.org/10.1109/wsc.1994.717062

Data sources

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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.