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Cited by 916

The DOI matches its Crossref record; 61 of the 61 references it cites were found in a registry or an index.

Phase change memory technology

Open access
Burr, Geoffrey W., Breitwisch, Matthew J., Franceschini, Michele, Garetto, Davide, Gopalakrishnan, Kailash, Jackson, Bryan, Kurdi, Bülent, Lam, Chung, Lastras, Luis A., Padilla, Alvaro, Rajendran, Bipin, Raoux, Simone, Shenoy, Rohit S.·2010·Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Abstract

The authors survey the current state of phase change memory (PCM), a nonvolatile solid-state memory technology built around the large electrical contrast between the highly resistive amorphous and highly conductive crystalline states in so-called phase change materials. PCM technology has made rapid progress in a short time, having passed older technologies in terms of both sophisticated demonstrations of scaling to small device dimensions, as well as integrated large-array demonstrators with impressive retention, endurance, performance, and yield characteristics. They introduce the physics behind PCM technology, assess how its characteristics match up with various potential applications across the memory-storage hierarchy, and discuss its strengths including scalability and rapid switching speed. Challenges for the technology are addressed, including the design of PCM cells for low reset current, the need to control device-to-device variability, and undesirable changes in the phase change material that can be induced by the fabrication procedure. They then turn to issues related to operation of PCM devices, including retention, device-to-device thermal cross-talk, endurance, and bias-polarity effects. Several factors that can be expected to enhance PCM in the future are addressed, including multilevel cell technology for PCM (which offers higher density through the use of intermediate resistance states), the role of coding, and possible routes to an ultrahigh-density PCM technology.

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Crossref · 10.1116/1.3301579

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Metadata

Authors
Burr, G. W., Breitwisch, M. J., Franceschini, M., Garetto, D., Gopalakrishnan, K., Jackson, B., Kurdi, B., Lam, C., Lastras, L. A., Padilla, A., Rajendran, B., Raoux, S., & Shenoy, R. S.
Venue
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Published
2010-03
Volume
28
Issue
2
Pages
223-262
ISSN
  • 2166-2746 (ISSN-L)
  • 2166-2754
OpenAlex
W2078260102
Cited by
916
References
61
FWCI
24.71
Type
journal article
Language
en
Open access
green

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CoChat. (2026). Citation check: Phase change memory technology. https://app.cochat.ai/papers/10.1116/1.3301579
The paper
Burr, G. W., Breitwisch, M. J., Franceschini, M., Garetto, D., Gopalakrishnan, K., Jackson, B., Kurdi, B., Lam, C., Lastras, L. A., Padilla, A., Rajendran, B., Raoux, S., & Shenoy, R. S. (2010). Phase change memory technology. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. https://doi.org/10.1116/1.3301579

Data sources

Bibliographic data: Semantic Scholar, OpenAlex, Crossref.

Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.