The DOI matches its Crossref record; 24 of the 24 references it cites were found in a registry or an index.
IC-Compatible Polysilicon Surface Micromachining
Abstract
▪ Abstract Polysilicon surface micromachining is advancing significantly and many new applications are moving beyond the prototyping phase. Recent technical successes are leading to excitement concerning various uses of devices in optical, wireless, sensor, and many other areas. Incorporation of state-of-the-art integrated circuit (IC) fabrication methods, such as planarization by chemical mechanical polishing (CMP), has enabled extension to a five-level technology. This has opened significant design space, especially for microactuator applications. Recent advancement of in situ microdiagnostics for materials and surface properties has enhanced our understanding of device reliability and performance and will allow devices to operate near well-known materials limits. New IC-compatible materials will further enhance the capabilities of microsystems in terms of performance, reliability, and operation in harsh environments.
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Cites
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Surface micromachining for microelectromechanical systems
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Cited by
Structural superlubricity and ultralow friction across the length scales
Hod, O., Meyer, E., Zheng, Q., & Urbakh, M. (2018) · Nature · doi:10.1038/s41586-018-0704-z · Cited by 678
Surface tension-powered self-assembly of microstructures - The state-of-the-art
Syms, R. R. A., Yeatman, E. M., Bright, V. M., & Whitesides, G. M. (2003) · Journal of Microelectromechanical Systems · doi:10.1109/jmems.2003.811724 · Cited by 339
Micro-Raman thermometry of thermal flexure actuators
Serrano, J. R., Phinney, L. M., & Kearney, S. P. (2006) · Journal of Micromechanics and Microengineering · doi:10.1088/0960-1317/16/7/004 · Cited by 38
Phinney, L. M., Serrano, J. R., Piekos, E. S., Torczynski, J. R., Gallis, M. A., & Gorby, A. D. (2010) · Journal of Heat Transfer · doi:10.1115/1.4000965 · Cited by 16
Metadata
- Authors
- Sniegowski, J. J., & de Boer, M. P.
- Venue
- Annual Review of Materials Science
- Publisher
- Annual Reviews
- Published
- 2000-08
- Volume
- 30
- Issue
- 1
- Pages
- 299-333
- ISSN
- 0084-6600 (ISSN-L)
- OpenAlex
- W2151380664
- Cited by
- 255
- References
- 24
- FWCI
- 15.59
- Type
- journal article
- Language
- en
- Open access
- closed
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- Sniegowski, J. J., & de Boer, M. P. (2000). IC-Compatible Polysilicon Surface Micromachining. Annual Review of Materials Science. https://doi.org/10.1146/annurev.matsci.30.1.299
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
