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Chemical Etching of Silicon
Open accessAbstract
The kinetics of the reaction of silicon with solutions of hydrofluoric acid, nitric acid, and acetic acid are reported as a function of the composition of the etchant. The system qualitatively behaves in the same manner as the system hydrofluoric acid, nitric acid, and water, which has been reported previously. Quantitatively, the acetic acid diluted system shows a much higher tolerance for the diluent than does the water diluted system. The greater tolerance for acetic acid has been explained on the basis of the lesser ionization of nitric acid in acetic acid than in water. The reaction mechanisms postulated for the water diluted system have been found to apply equally well to the acetic acid diluted system.
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Cited by
Campbell, P. K., Jones, K. E., Huber, R. J., Horch, K. W., & Normann, R. A. (1991) · IEEE Transactions on Biomedical Engineering · doi:10.1109/10.83588 · Cited by 881
Anisotropic etching of silicon
Bean, K. E. (1978) · IEEE Transactions on Electron Devices · doi:10.1109/t-ed.1978.19250 · Cited by 803
Bulk micromachining of silicon
Kovacs, G. T. A., Maluf, N. I., & Petersen, K. E. (1998) · Proceedings of the IEEE · doi:10.1109/5.704259 · Cited by 733
Selective Etching of Silicon from Ti3SiC2 (MAX) To Obtain 2D Titanium Carbide (MXene)
Alhabeb, M., Maleski, K., Mathis, T. S., Sarycheva, A., Hatter, C. B., Uzun, S., Levitt, A., & Gogotsi, Y. (2018) · Angewandte Chemie International Edition · doi:10.1002/anie.201802232 · Cited by 452
A wafer-scale etching technique for high aspect ratio implantable MEMS structures
Bhandari, R., Negi, S., Rieth, L., & Solzbacher, F. (2010) · Sensors and Actuators A: Physical · doi:10.1016/j.sna.2010.06.011 · Cited by 71
Metadata
- Authors
- Robbins, H., & Schwartz, B.
- Venue
- Journal of The Electrochemical Society
- Publisher
- The Electrochemical Society
- Published
- 1960
- Volume
- 107
- Issue
- 2
- Pages
- 108
- ISSN
- 0013-4651 (ISSN-L)
- OpenAlex
- W2121286028
- Cited by
- 199
- References
- 0
- FWCI
- 0.00
- Type
- journal article
- Language
- en
- Open access
- bronze
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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