The DOI matches its Crossref record; 1 of the 1 references it cites were found in a registry or an index.
Thermal-wave detection and thin-film thickness measurements with laser beam deflection
Abstract
A new technique has been developed that employs highly focused laser beams for both generating and detecting thermal waves in the megahertz frequency regime. This technique includes a comprehensive 3-D depth-profiling theoretical model; it has been used to measure the thickness of both transparent and opaque thin films with high spatial resolution. Thickness sensitivities of ±2% over the 500–25,000-Å range have been obtained for Al and SiO2 films on Si substrates.
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Citations
Cites
Methods of Theoretical Physics
Morse, P. M., Feshbach, H., & Hill, E. L. (1954) · American Journal of Physics · doi:10.1119/1.1933765 · Cited by 13,197
Cited by
Applications of photoacoustic sensing techniques
Tam, A. C. (1986) · Reviews of Modern Physics · doi:10.1103/revmodphys.58.381 · Cited by 1,306
A frequency-domain thermoreflectance method for the characterization of thermal properties
Schmidt, A. J., Cheaito, R., & Chiesa, M. (2009) · Review of Scientific Instruments · doi:10.1063/1.3212673 · Cited by 543
Detection of thermal waves through optical reflectance
Rosencwaig, A., Opsal, J., Smith, W. L., & Willenborg, D. L. (1985) · Applied Physics Letters · doi:10.1063/1.95794 · Cited by 385
Self-citationCoherent Phonon Detection From Ultrafast Surface Vibrations
Wright, O. B., & Kawashima, K. (1992) · Physical Review Letters · doi:10.1103/physrevlett.69.1668 · Cited by 180
Characterization of Thin Metal Films Via Frequency-Domain Thermoreflectance
Schmidt, A. J., Cheaito, R., & Chiesa, M. (2010) · Journal of Applied Physics · doi:10.1063/1.3289907 · Cited by 156
Metadata
- Authors
- Opsal, J., Rosencwaig, A., & Willenborg, D. L.
- Venue
- Applied Optics
- Publisher
- Optica Publishing Group
- Published
- 1983-10-15
- Volume
- 22
- Issue
- 20
- Pages
- 3169
- ISSN
- 0003-6935 (ISSN-L)
- 1539-4522
- OpenAlex
- W2087772914
- Cited by
- 245
- References
- 1
- FWCI
- 14.72
- Type
- journal article
- Language
- en
- Open access
- closed
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- Opsal, J., Rosencwaig, A., & Willenborg, D. L. (1983). Thermal-wave detection and thin-film thickness measurements with laser beam deflection. Applied Optics. https://doi.org/10.1364/ao.22.003169
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
