Effects of annealing on the optical, structural, and chemical properties of TiO_2 and MgF_2 thin films prepared by plasma ion-assisted deposition
Abstract
Effects of thermal annealing at 400 degrees C on the optical, structural, and chemical properties of TiO2 single-layer, MgF2 single-layer, and TiO2/MgF2 narrow-bandpass filters deposited by conventional electron-beam evaporation (CE) and plasma ion-assisted deposition (PIAD) were investigated. In the case of TiO2 films, the results show that the annealing of both CE and PIAD TiO2 films increases the refractive index slightly and the extinction coefficient and surface roughness greatly. Annealing decreases the thickness of CE TiO2 films drastically, whereas it does not vary that of PIAD TiO2 films. For PIAD MgF2 films, annealing increases the refractive index and decreases the extinction coefficient drastically. An x-ray photoelectron spectroscopy analysis suggests that an increase in the refractive index and a decrease in the extinction coefficient for PIAD MgF2 films after annealing may be related to the enhanced concentration of MgO in the annealed PIAD MgF2 films and the changes in the chemical bonding states of Mg 2p, F 1s, and O is. It is found that (TiO2/MgF2) multilayer filters, consisting of PIAD TiO2 and CE MgF2 films, are as deposited without microcracks and are also thermally stable after annealing.
Integrity signals
Registry
Cites
Statistics
Claims the paper makes
Claims other papers make about this one
Each is checked against this paper’s own text: does it say what the citing paper says it does?
PIAD leads to a higher refractive index n and lower extinction coefficient k than conventional evaporation, confirming the densification effect of ion bombardment.
“Classical studies show that PIAD leads to a higher n and lower k than conventional evaporation, confirming the densification effect of ion bombardment [62].”
From Metal Oxide Thin Films for Advanced Photonic Applications (2026) · cites this paper as [62]
Cites
The preparation and characterization of nanoparticle TiO2/Ti films and their photocatalytic activity
Jing, L., Xiaojun, S., Cai, W., et al. (2003) · Journal of Physics and Chemistry of Solids · doi:10.1016/s0022-3697(02)00362-1 · Cited by 227 · see citing works
Influence of annealing temperature on the properties of titanium oxide thin film
Hou, Y., Zhuang, D. M., Zhang, G., et al. (2003) · Applied Surface Science · doi:10.1016/s0169-4332(03)00569-5 · Cited by 221 · see citing works
Annealing effects on structure and laser-induced damage threshold of Ta2O5/SiO2 dielectric mirrors
Zhao, Y., Wang, Y., Gong, H., et al. (2003) · Applied Surface Science · doi:10.1016/s0169-4332(03)00153-3 · Cited by 67 · see citing works
Atanassov, G., Turlo, J. E., Fu, J. K., & Dai, Y. S. (1999) · Thin Solid Films · doi:10.1016/s0040-6090(98)01407-2 · Cited by 58 · see citing works
Effects of annealing on titanium dioxide structured films
Colgan, M. J., Djurfors, B., Ivey, D. G., et al. (2004) · Thin Solid Films · doi:10.1016/j.tsf.2004.02.019 · Cited by 50 · see citing works
Mori, N., Ooki, S., MASUBUCHI, N., et al. (2002) · Thin Solid Films · doi:10.1016/s0040-6090(02)00164-5 · Cited by 39 · see citing works
Jacob, D., Peiró, F., Quesnel, E., et al. (2000) · Thin Solid Films · doi:10.1016/s0040-6090(99)00738-5 · Cited by 38 · see citing works
Kim, S.-H., & Hwangbo, C. K. (2004) · Thin Solid Films · doi:10.1016/j.tsf.2004.08.035 · Cited by 37 · see citing works
Self-citationBrown, J. T. (2004) · Applied Optics · doi:10.1364/ao.43.004506 · Cited by 31 · see citing works
Single films and heat mirrors produced by plasma ion assisted deposition
Fu, J. K., Atanassov, G., Dai, Y. S., et al. (1997) · Journal of Non-Crystalline Solids · doi:10.1016/s0022-3093(97)00207-x · Cited by 24 · see citing works
K-M-S (keep-molecules sputtering) deposition of optical MgF2 thin films
Kawamata, K., Shouzu, T., & Mitamura, N. (1998) · Vacuum · doi:10.1016/s0042-207x(98)00253-x · Cited by 23 · see citing works
Optical constants of heat-treated TiO2 thin films
Mardare, D. M. (2002) · Materials Science and Engineering B · doi:10.1016/s0921-5107(02)00198-8 · Cited by 22 · see citing works
Optical properties and microstructure of CeO2–SiO2 composite thin films
Koo, W. H., Jeoung, S. M., Choi, S. H., et al. (2004) · Thin Solid Films · doi:10.1016/j.tsf.2004.03.042 · Cited by 19 · see citing works
Zhao, Z., Tay, B. K., Huang, L., et al. (2004) · Optical Materials · doi:10.1016/j.optmat.2004.03.027 · Cited by 16 · see citing works
XPS study of hydrated MgCl2 impregnated on flat SiO2/Si(100) Mo and Au substrates
Siokou, A., Kefalas, D., & Ntais, S. (2003) · Surface Science · doi:10.1016/s0039-6028(03)00207-3 · Cited by 15 · see citing works
Low-temperature deposition of optical coatings using ion assistance
Niederwald, H. (2000) · Thin Solid Films · doi:10.1016/s0040-6090(00)01394-8 · Cited by 14 · see citing works
Investigation of the titaniumdioxide–aqueous solution interface using XPS and cryogenics
Cardenas, J., & Sjöberg, S. (2003) · Surface Science · doi:10.1016/s0039-6028(03)00163-8 · Cited by 12 · see citing works
Influence of annealing on the surface topography of MgF2: an atomic force microscopic study
Ye, Y., Gu, N., Zhang, H.-Q., et al. (1999) · Thin Solid Films · doi:10.1016/s0040-6090(98)01769-6 · Cited by 4 · see citing works
Flagged first, then by citations
Cited by
Sorted by citations
Wu, H.-Y., Chen, H.-W., Huang, S.-R., Hsiao, L.-J., Cheng, C.-L., Yu, G.-Y., Sun, Y.-S., & Hsu, J.-C. (2024) · Heliyon · doi:10.1016/j.heliyon.2024.e35507 · Cited by 6 · see citing works
Metal Oxide Thin Films for Advanced Photonic Applications
Stîngescu, M.-L., Șopronyi, M.-A., Antohe, Ș., & Scărișoreanu, N.-D. (2026) · Crystals · doi:10.3390/cryst16030164 · Cited by 2 · see citing works
- Authors
- Woo, S.-H., & Hwangbo, C. K.
- Affiliations
- Inha University (KR)
- ORCID
- Hwangbo, Chang Kwon
- Venue
- Applied Optics
- Publisher
- Optica Publishing Group
- Published
- 2006-03-01
- Volume
- 45
- Issue
- 7
- Pages
- 1447
- ISSN
- 0003-6935 (ISSN-L)
- 1539-4522
- OpenAlex
- W2157207305
- Cited by
- 33
- References
- 18
- Citations by year
- 2025: 2 · 2024: 3 · 2023: 4 · 2022: 1 · 2021: 2 · 2020: 5 · 2019: 3 · 2016: 1 · 2015: 1 · 2014: 1 · 2013: 3
- FWCI
- 1.18
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Applied Optics (publishedVersion)
- PubMed (publishedVersion)
- Topics
- Physical Sciences › Materials Science › Surfaces, Coatings and Films › Optical Coatings and Gratings
- Physical Sciences › Materials Science › Materials Chemistry › Advanced Materials and Semiconductor Technologies
- Physical Sciences › Materials Science › Polymers and Plastics › Transition Metal Oxide Nanomaterials
- Keywords
- annealing, TiO2 thin films, MgF2 thin films, plasma ion assisted deposition, electron beam evaporation, narrow bandpass filters, refractive index, extinction coefficient, surface roughness, MgO formation, chemical bonding states, multilayer optical filters, thermal stability, microcracks
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
