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Silicon-on-insulator spectrometers with integrated GaInAsSb photodiodes for wide-band spectroscopy from 1510 to 2300 nm
Open accessAbstract
We present a silicon-on-insulator (SOI) based spectrometer platform for a wide operational wavelength range. Both planar concave grating (PCG, also known as echelle grating) and arrayed waveguide grating (AWG) spectrometer designs are explored for operation in the short-wave infrared. In addition, a total of four planar concave gratings are designed to cover parts of the wavelength range from 1510 to 2300 nm. These passive wavelength demultiplexers are combined with GaInAsSb photodiodes. These photodiodes are heterogeneously integrated on SOI with benzocyclobutene (DVS-BCB) as an adhesive bonding layer. The uniformity of the photodiode characteristics and high processing yield, indicate a robust fabrication process. We demonstrate good performance of the miniature spectrometers over all operational wavelengths which paves the way to on-chip absorption spectroscopy in this wavelength range.
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The WG-QDPD results are on par with the best-performing bonded III-V photodetectors reported in the literature (responsivity 0.4-1.4 A/W around 2.3 μm and dark current 10 nA-2.5 μA).
“Notably, these results are on par with the best-performing bonded III-V photodetectors reported in the literature (responsivity 0.4-1.4 A/W around 2.3 μ m and dark current 10 nA-2.5 μ A), 6-9 outperforming monolithically grown GeSn (responsivity < 0.52 A/W and dark current > 1 mA). 13-16”
From A silicon photonics waveguide-coupled colloidal quantum dot photodiode sensitive beyond 1.6 µ m (2024) · cites this paper as [6]
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Research works printed but not linked: 10
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Wang, R., Vasiliev, A., Muneeb, M., Malik, A., Sprengel, S., Boehm, G., Amann, M.-C., Šimonytė, I., Vizbaras, A., Vizbaras, K., et al. (2017) · Sensors · doi:10.3390/s17081788 · Cited by 97
Self-citationA silicon photonics waveguide-coupled colloidal quantum dot photodiode sensitive beyond 1.6 µ m
Pang, C., Deng, Y.-H., Kheradmand, E., Hagelsieb, L. M., Guo, Y., Cheyns, D., Geiregat, P., Hens, Z., & Van Thourhout, D. (2024) · APL Photonics · doi:10.1063/5.0206386 · Cited by 9
Metadata
- Authors
- Ryckeboer, E., Gassenq, A., Muneeb, M., Hattasan, N., Pathak, S., Cerutti, L., Rodriguez, J. B., Tournié, E., Bogaerts, W., Baets, R., & Roelkens, G.
- Affiliations
- Ghent University (BE)
- Centre National de la Recherche Scientifique (FR)
- ORCID
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2013-03-04
- Volume
- 21
- Issue
- 5
- Pages
- 6101
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W1997968321
- Cited by
- 106
- References
- 0
- Citations by year
- 2026: 2 · 2025: 8 · 2024: 7 · 2023: 6 · 2022: 4 · 2021: 8 · 2020: 12 · 2019: 10 · 2018: 7 · 2017: 11 · 2016: 7 · 2015: 5 · 2014: 14 · 2013: 5
- FWCI
- 6.20
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Optics Express (publishedVersion)
- PubMed (publishedVersion)
- Ghent University Academic Bibliography (Ghent University) (submittedVersion, other-oa)
- HAL (submittedVersion)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photorefractive and Nonlinear Optics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced Fiber Optic Sensors
- Keywords
- short-wave infrared spectroscopy, arrayed waveguide grating, wavelength demultiplexer, heterogeneous integration, integrated photonics
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