Monolithic silicon-photonic platforms in state-of-the-art CMOS SOI processes [Invited]
Open accessAbstract
Integrating photonics with advanced electronics leverages transistor performance, process fidelity and package integration, to enable a new class of systems-on-a-chip for a variety of applications ranging from computing and communications to sensing and imaging. Monolithic silicon photonics is a promising solution to meet the energy efficiency, sensitivity, and cost requirements of these applications. In this review paper, we take a comprehensive view of the performance of the silicon-photonic technologies developed to date for photonic interconnect applications. We also present the latest performance and results of our "zero-change" silicon photonics platforms in 45 nm and 32 nm SOI CMOS. The results indicate that the 45 nm and 32 nm processes provide a "sweet-spot" for adding photonic capability and enhancing integrated system applications beyond the Moore-scaling, while being able to offload major communication tasks from more deeply-scaled compute and memory chips without complicated 3D integration approaches.
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The option to integrate the PIC with the EIC has been around since the first commercially successful silicon photonic product.
“The option to integrate the PIC with the EIC has been around since the first commercially successful silicon photonic product1,127,129.”
From Roadmapping the next generation of silicon photonics (2024) · cites this paper as [129]
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Optical MEMS accelerometer sensor relying on a micro‐ring resonator and an elliptical disk
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Space charge effects on the bandwidth of Ge/Si avalanche photodetectors
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Multiple Tb/s Coherent Optical Transceivers for Short Reach Interconnect
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Unconventional Monolithic Electronics in a Conventional Silicon Photonics Platform
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Multi-Level Analysis of On-Chip Optical Wireless Links
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Exploiting Process Variations to Secure Photonic NoC Architectures From Snooping Attacks
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High-speed, zero-biased silicon-germanium photodetector
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Self-citationTowards monolithic low-loss silicon nitride waveguides on a mature 200 mm CMOS platform
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Self-citation4×112 Gbps/Fiber CWDM VCSEL Arrays for Co-Packaged Interconnects
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Junction-less optical phase shifter loaded silicon Mach–Zehnder modulator
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1310/1550 nm Optical Receivers With Schottky Photodiode in Bulk CMOS
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Advanced hydrogenation process applied on Ge on Si quantum dots for enhanced light emission
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3-D Packaging Technologies for Advanced Integrated Photonics Modules: A Review
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Quantum Communication Networks for Energy Applications: Review and Perspective
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Local laser annealing for amorphous/polycrystalline silicon hybrid photonics on CMOS
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Self-citation
- Authors
- Stojanović, V., Ram, R. J., Popović, M., Lin, S., Moazeni, S., Wade, M., Sun, C., Alloatti, L., Atabaki, A., Pavanello, F., Mehta, N., & Bhargava, P.
- ORCID
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2018-05-07
- Volume
- 26
- Issue
- 10
- Pages
- 13106
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W2801471062
- Cited by
- 229
- References
- 23
- Citations by year
- 2026: 15 · 2025: 18 · 2024: 32 · 2023: 35 · 2022: 28 · 2021: 30 · 2020: 38 · 2019: 27 · 2018: 6
- FWCI
- 9.66
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Optics Express (publishedVersion)
- PubMed (publishedVersion)
- Funders
- Defense Advanced Research Projects Agency (DARPA) (HR0011-11-C-0100)
- Directorate for Engineering (ENG) (1611296)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Semiconductor Lasers and Optical Devices
- Physical Sciences › Computer Science › Computer Networks and Communications › Interconnection Networks and Systems
- Keywords
- optical interconnects, system-on-chip, photonic integration, integrated photonics
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