The DOI matches its Crossref record; 22 of the 22 references it cites were found in a registry or an index.
Wafer-scale silicon photonic switches beyond die size limit
Open accessAbstract
Fast optical switches have been proposed as a promising alternative to enable continual scaling of data centers with increasing size and data rates. Silicon photonics is a compelling platform for large-scale integrated photonic switches, leveraging advanced manufacturing foundries for electronic integrated circuits. In the past decade, the port counts of silicon photonic switches have increased steadily to 128×128. Further scaling of the switch is constrained by the maximum reticle size (2–3 cm) of lithography tools. Here, we propose to use wafer-scale integration to overcome the die size limit. As a proof of concept demonstration, we fabricated a 240×240 switch by lithographically stitching a 3×3 array of identical 80×80 switch blocks across reticle boundaries. Stitching loss is substantially reduced (0.004 dB) by tapering the waveguide width to 10 μm. The fabricated switch on a 4 cm×4 cm chip exhibits a maximum on-chip loss of 9.8 dB, an ON/OFF ratio of 70 dB, and switching times of less than 400 ns. To our knowledge, this is the largest integrated photonic switch ever reported. The loss-to-port count ratio (0.04 dB/port) is also the lowest.
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In the citing paper
“one of the largest-scale PICs today, a 240 × 240 silicon photonic switch matrix with 57,600 individual switching elements, has been demonstrated experimentally by combining MEMS with silicon photonic waveguides40.”
From Integrated silicon photonic MEMS (2023) · cites this paper as [40]
In the citing paper
“The recently demonstrated large-scale silicon photonic MEMS switch matrix40 and large-scale silicon photonic MEMS LiDAR41 clearly show the potential of the combination of silicon photonics and MEMS.”
From Integrated silicon photonic MEMS (2023) · cites this paper as [40]
In the citing paper
“Even VLSI (>10,000 components) prototypes have now been demonstrated30,32,34.”
From Roadmapping the next generation of silicon photonics (2024) · cites this paper as [34]
In the citing paper
“but technologies such as MEMS/NOEMS look promising34.”
From Roadmapping the next generation of silicon photonics (2024) · cites this paper as [34]
Citations
Cites
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Self-citation32 × 32 silicon electro-optic switch with built-in monitors and balanced-status units
Qiao, L., Tang, W., & Chu, T. (2017) · Scientific Reports · doi:10.1038/srep42306 · Cited by 256
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Research works printed but not linked: 1
- Wang, 2010, C-through: part-time optics in data centers, 327
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Roy, A., Klawson, D., Luo, J., Anderson, E., Zhi, Y., Tang, S., & Wu, M. (2025) · doi:10.1364/cleo_si.2025.ss165_3
Self-citationIntegrated piezoelectric MEMS optical switch based on thin-film lithium niobate
Han, H., Chen, B., Ruan, Z., Gong, S., chen, G., Yang, W., Wang, X., Wu, X., Wang, H., Li, H., et al. (2026) · Photonics Research · doi:10.1364/prj.586843
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What’s Next for Optical Switching?
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Ramanujam, Y., Ali, M., Klapowitz, A., & Liang, D. (2026) · doi:10.1364/cleo_at.2026.atu1d.3
Ultra‐Fast and Energy‐Efficient PZT Optical Tunable Delay Lines for Programmable Photonic Systems
Shi, C., Li, C., Chen, W., Tang, S., Shu, T., Zhu, H., Liu, H., Zhang, Y., Zhang, L., Shieh, W., et al. (2026) · Laser & Photonics Review · doi:10.1002/lpor.71605
Ying, 孙. S., Yiting, 贠. Y., Kai, 许. X., Weiquan, 王. W., Xiang, 李. L., & Lin, H. (2026) · Acta Optica Sinica · doi:10.3788/aos260650
Hu, B., Wan, S., He, Q., Ma, S., & Zhou, L. (2026) · Laser & Photonics Review · doi:10.1002/lpor.71675
DAC‐Free 64 × 64 Silicon Photonic Switch Using Two‐Level Voltage Driving
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Metadata
- Authors
- Seok, T. J., Kwon, K., Henriksson, J., Luo, J., & Wu, M. C.
- Affiliations
- Gwangju Institute of Science and Technology (KR)
- University of California, Berkeley (US)
- Venue
- Optica
- Publisher
- Optica Publishing Group
- Published
- 2019-04-12
- Volume
- 6
- Issue
- 4
- Pages
- 490
- ISSN
- 2334-2536 (ISSN-L)
- OpenAlex
- W2937088522
- Cited by
- 214
- References
- 22
- Citations by year
- 2026: 19 · 2025: 38 · 2024: 31 · 2023: 25 · 2022: 33 · 2021: 32 · 2020: 22 · 2019: 12
- FWCI
- 8.90
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Optica (publishedVersion)
- OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) (submittedVersion)
- Funders
- Advanced Research Projects Agency—Energy (DE-AR0000849)
- National Science Foundation (1827633, EEC-0812072)
- UC Berkeley
- National Research Foundation of Korea (2018R1C1B6005302)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced Optical Network Technologies
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Semiconductor Lasers and Optical Devices
- Keywords
- silicon photonic switches, wafer-scale integration, waveguide tapering, on-chip loss, switching time, data center optical interconnects
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